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Class Information
Number: 438/252
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Planar capacitor > Including doping of semiconductive region > Multiple doping steps
Description: Process having plural steps of introducing electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8674422 Asymmetric dense floating gate nonvolatile memory with decoupled capacitor Mar. 18, 2014
8586431 Three dimensional integration and methods of through silicon via creation Nov. 19, 2013
8563390 Semiconductor devices and methods of fabricating the same Oct. 22, 2013
8361863 Embedded DRAM with multiple gate oxide thicknesses Jan. 29, 2013
8309445 Bi-directional self-aligned FET capacitor Nov. 13, 2012
8227846 Systems and methods for a continuous-well decoupling capacitor Jul. 24, 2012
7980198 Doping apparatus, doping method, and method for fabricating thin film transistor Jul. 19, 2011
7883984 Method of manufacturing flash memory device Feb. 8, 2011
7815287 Fluid ejection device and method Oct. 19, 2010
7713761 Doping apparatus, doping method, and method for fabricating thin film transistor May. 11, 2010
7709365 CMOS well structure and method of forming the same May. 4, 2010
7704810 Manufacturing method of display device Apr. 27, 2010
7700430 Phase-changeable memory device and method of manufacturing the same Apr. 20, 2010
7514318 Method for fabricating non-volatile memory cells Apr. 7, 2009
7491605 Zero cost non-volatile memory cell with write and erase features Feb. 17, 2009
7436067 Methods for forming conductive structures and structures regarding same Oct. 14, 2008
7422942 Method for fabricating a semiconductor device having an insulation film with reduced water content Sep. 9, 2008
7365387 Gate-coupled EPROM cell for printhead Apr. 29, 2008
7345355 Complementary junction-narrowing implants for ultra-shallow junctions Mar. 18, 2008
7306988 Memory cell and method of making the memory cell Dec. 11, 2007
7282406 Method of forming an MOS transistor and structure therefor Oct. 16, 2007
7217616 Non-volatile memory cell and method of forming the same May. 15, 2007
7148103 Multilevel poly-Si tiling for semiconductor circuit manufacture Dec. 12, 2006
7138321 Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge Nov. 21, 2006
6949480 Method for depositing silicon nitride layer of semiconductor device Sep. 27, 2005
6908859 Low leakage power transistor and method of forming Jun. 21, 2005
6890816 Compound semiconductor structure including an epitaxial perovskite layer and method for fabricating semiconductor structures and devices May. 10, 2005
6881999 Semiconductor device with analog capacitor and method of fabricating the same Apr. 19, 2005
6881621 Method of fabricating SOI substrate having an etch stop layer, and method of fabricating SOI integrated circuit using the same Apr. 19, 2005
6790724 Low leakage one transistor static random access memory Sep. 14, 2004
6787430 Semiconductor device and method for manufacturing semiconductor device Sep. 7, 2004
6777304 Method for producing an integrated circuit capacitor Aug. 17, 2004
6767787 Methods of forming integrated circuits using masks to provide ion implantation shielding to portions of a substrate adjacent to an isolation region therein Jul. 27, 2004
6762109 Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation Jul. 13, 2004
6670236 Semiconductor device having capacitance element and method of producing the same Dec. 30, 2003
6627546 Process for removing contaminant from a surface and composition useful therefor Sep. 30, 2003
6621111 Capacitor structure of semiconductor device and method for forming the same Sep. 16, 2003
6599796 Apparatus and fabrication process to reduce crosstalk in pirm memory array Jul. 29, 2003
6569728 Method for manufacturing a capacitor for use in a semiconductor device May. 27, 2003
6495416 Semiconductor integrated circuit device with MOS transistor and MOS capacitor and method for manufacturing the same Dec. 17, 2002
6495426 Method for simultaneous formation of integrated capacitor and fuse Dec. 17, 2002
6489196 Method of forming a capacitor with high capacitance and low voltage coefficient Dec. 3, 2002
6444583 Substrate-cleaning method and substrate-cleaning solution Sep. 3, 2002
6387744 Process for manufacturing semiconductor integrated circuit device May. 14, 2002
6355519 Method for fabricating capacitor of semiconductor device Mar. 12, 2002
6352866 Method for improving the sidewall stoichiometry of thin film capacitors Mar. 5, 2002
6323083 Method for forming lower electrode structure of capacitor of semiconductor device Nov. 27, 2001
6319762 Method for fabricating poly-spacers Nov. 20, 2001
6316326 Gapped-plate capacitor Nov. 13, 2001
6312988 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions Nov. 6, 2001

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