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Class Information
Number: 438/252
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Planar capacitor > Including doping of semiconductive region > Multiple doping steps
Description: Process having plural steps of introducing electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7514318 |
Method for fabricating non-volatile memory cells |
Apr. 7, 2009 |
| 7491605 |
Zero cost non-volatile memory cell with write and erase features |
Feb. 17, 2009 |
| 7436067 |
Methods for forming conductive structures and structures regarding same |
Oct. 14, 2008 |
| 7422942 |
Method for fabricating a semiconductor device having an insulation film with reduced water content |
Sep. 9, 2008 |
| 7365387 |
Gate-coupled EPROM cell for printhead |
Apr. 29, 2008 |
| 7345355 |
Complementary junction-narrowing implants for ultra-shallow junctions |
Mar. 18, 2008 |
| 7306988 |
Memory cell and method of making the memory cell |
Dec. 11, 2007 |
| 7282406 |
Method of forming an MOS transistor and structure therefor |
Oct. 16, 2007 |
| 7217616 |
Non-volatile memory cell and method of forming the same |
May. 15, 2007 |
| 7148103 |
Multilevel poly-Si tiling for semiconductor circuit manufacture |
Dec. 12, 2006 |
| 7138321 |
Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge |
Nov. 21, 2006 |
| 6949480 |
Method for depositing silicon nitride layer of semiconductor device |
Sep. 27, 2005 |
| 6908859 |
Low leakage power transistor and method of forming |
Jun. 21, 2005 |
| 6890816 |
Compound semiconductor structure including an epitaxial perovskite layer and method for fabricating semiconductor structures and devices |
May. 10, 2005 |
| 6881621 |
Method of fabricating SOI substrate having an etch stop layer, and method of fabricating SOI integrated circuit using the same |
Apr. 19, 2005 |
| 6881999 |
Semiconductor device with analog capacitor and method of fabricating the same |
Apr. 19, 2005 |
| 6790724 |
Low leakage one transistor static random access memory |
Sep. 14, 2004 |
| 6787430 |
Semiconductor device and method for manufacturing semiconductor device |
Sep. 7, 2004 |
| 6777304 |
Method for producing an integrated circuit capacitor |
Aug. 17, 2004 |
| 6767787 |
Methods of forming integrated circuits using masks to provide ion implantation shielding to portions of a substrate adjacent to an isolation region therein |
Jul. 27, 2004 |
| 6762109 |
Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation |
Jul. 13, 2004 |
| 6670236 |
Semiconductor device having capacitance element and method of producing the same |
Dec. 30, 2003 |
| 6627546 |
Process for removing contaminant from a surface and composition useful therefor |
Sep. 30, 2003 |
| 6621111 |
Capacitor structure of semiconductor device and method for forming the same |
Sep. 16, 2003 |
| 6599796 |
Apparatus and fabrication process to reduce crosstalk in pirm memory array |
Jul. 29, 2003 |
| 6569728 |
Method for manufacturing a capacitor for use in a semiconductor device |
May. 27, 2003 |
| 6495426 |
Method for simultaneous formation of integrated capacitor and fuse |
Dec. 17, 2002 |
| 6495416 |
Semiconductor integrated circuit device with MOS transistor and MOS capacitor and method for manufacturing the same |
Dec. 17, 2002 |
| 6489196 |
Method of forming a capacitor with high capacitance and low voltage coefficient |
Dec. 3, 2002 |
| 6444583 |
Substrate-cleaning method and substrate-cleaning solution |
Sep. 3, 2002 |
| 6387744 |
Process for manufacturing semiconductor integrated circuit device |
May. 14, 2002 |
| 6355519 |
Method for fabricating capacitor of semiconductor device |
Mar. 12, 2002 |
| 6352866 |
Method for improving the sidewall stoichiometry of thin film capacitors |
Mar. 5, 2002 |
| 6323083 |
Method for forming lower electrode structure of capacitor of semiconductor device |
Nov. 27, 2001 |
| 6319762 |
Method for fabricating poly-spacers |
Nov. 20, 2001 |
| 6316326 |
Gapped-plate capacitor |
Nov. 13, 2001 |
| 6312988 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
Nov. 6, 2001 |
| 6281066 |
Method of manufacturing a capacitor in a memory device |
Aug. 28, 2001 |
| 6262469 |
Capacitor for use in a capacitor divider that has a floating gate transistor as a corresponding capacitor |
Jul. 17, 2001 |
| 6258653 |
Silicon nitride barrier for capacitance maximization of tantalum oxide capacitor |
Jul. 10, 2001 |
| 6238972 |
Method for increasing capacitance |
May. 29, 2001 |
| 6221715 |
Method of making polysilicon self-aligned to field isolation oxide |
Apr. 24, 2001 |
| 6215142 |
Analog semiconductor device and method of fabricating the same |
Apr. 10, 2001 |
| 6211007 |
Process for enhancing refresh in dynamic random access memory devices |
Apr. 3, 2001 |
| 6211003 |
Semiconductor integrated circuit device and process for manufacturing the same |
Apr. 3, 2001 |
| 6180451 |
Method of forming capacitor with a HSG layer |
Jan. 30, 2001 |
| 6162672 |
Method for forming integrated circuit memory devices with high and low dopant concentration regions of different diffusivities |
Dec. 19, 2000 |
| 6159819 |
Fabrication of capacitors with low voltage coefficient of capacitance |
Dec. 12, 2000 |
| 6159808 |
Method of forming self-aligned DRAM cell |
Dec. 12, 2000 |
| 6096594 |
Fabricating method of a dynamic random access memory |
Aug. 1, 2000 |
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