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Class Information
Number: 438/251
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Planar capacitor > Including doping of semiconductive region
Description: Process having a step of introducing an electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.


Sub-classes under this class:

Class Number Class Name Patents
438/252 Multiple doping steps 88


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
7436067 Methods for forming conductive structures and structures regarding same Oct. 14, 2008
7419874 Method of manufacturing semiconductor device with capacitor and transistor Sep. 2, 2008
7387929 Capacitor in semiconductor device and method of manufacturing the same Jun. 17, 2008
7374993 Methods of forming capacitors May. 20, 2008
7329573 Methods of forming capacitors Feb. 12, 2008
7268052 Method for reducing soft error rates of memory cells Sep. 11, 2007
7250334 Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode Jul. 31, 2007
7244650 Transistor and method for manufacturing the same Jul. 17, 2007
7217616 Non-volatile memory cell and method of forming the same May. 15, 2007
7214583 Memory cell with an asymmetric crystalline structure May. 8, 2007
7205190 Semiconductor device fabrication method Apr. 17, 2007
7148103 Multilevel poly-Si tiling for semiconductor circuit manufacture Dec. 12, 2006
7091083 Method for producing a capacitor Aug. 15, 2006
7087486 Method for scalable, low-cost polysilicon capacitor in a planar DRAM Aug. 8, 2006
7060556 Drain extended MOS transistors with multiple capacitors and methods of fabrication Jun. 13, 2006
7029971 Thin film dielectrics for capacitors and methods of making thereof Apr. 18, 2006
6967133 Method for fabricating a semiconductor structure Nov. 22, 2005
6949442 Methods of forming MIM capacitors Sep. 27, 2005
6936514 Semiconductor component and method Aug. 30, 2005
6881999 Semiconductor device with analog capacitor and method of fabricating the same Apr. 19, 2005
6881621 Method of fabricating SOI substrate having an etch stop layer, and method of fabricating SOI integrated circuit using the same Apr. 19, 2005
6833299 Method of fabricating a stacked poly-poly and MOS capacitor using a sige integration scheme Dec. 21, 2004
6777304 Method for producing an integrated circuit capacitor Aug. 17, 2004
6773981 Methods of forming capacitors Aug. 10, 2004
6762109 Method of manufacturing semiconductor device with reduced number of process steps for capacitor formation Jul. 13, 2004
6693003 Semiconductor device and manufacturing method of the same Feb. 17, 2004
6670236 Semiconductor device having capacitance element and method of producing the same Dec. 30, 2003
6664198 Method of forming a silicon nitride dielectric layer Dec. 16, 2003
6638816 Integrated circuit device with MIM capacitance circuit and method of manufacturing the same Oct. 28, 2003
6621111 Capacitor structure of semiconductor device and method for forming the same Sep. 16, 2003
6569728 Method for manufacturing a capacitor for use in a semiconductor device May. 27, 2003
6541336 Method of fabricating a bipolar transistor having a realigned emitter Apr. 1, 2003
6509246 Production of semiconductor integrated circuit Jan. 21, 2003
6495416 Semiconductor integrated circuit device with MOS transistor and MOS capacitor and method for manufacturing the same Dec. 17, 2002
6495426 Method for simultaneous formation of integrated capacitor and fuse Dec. 17, 2002
6475855 Method of forming integrated circuitry, method of forming a capacitor and method of forming DRAM integrated circuitry Nov. 5, 2002
6451645 Method for manufacturing semiconductor device with power semiconductor element and diode Sep. 17, 2002
6451664 Method of making a MIM capacitor with self-passivating plates Sep. 17, 2002
6432776 Method of manufacturing semiconductor device Aug. 13, 2002
6429066 Method for producing a polysilicon circuit element Aug. 6, 2002
6358794 Capacitor of semiconductor device and method of fabricating the same Mar. 19, 2002
6352874 Method of manufacturing a sensor Mar. 5, 2002
6329703 Contact between a monocrystalline silicon region and a polycrystalline silicon structure and method for producing such a contact Dec. 11, 2001
6323083 Method for forming lower electrode structure of capacitor of semiconductor device Nov. 27, 2001
6316339 Semiconductor device and production method thereof Nov. 13, 2001
6312988 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions Nov. 6, 2001
6303432 Method of manufacturing a semiconductor device Oct. 16, 2001
6284592 Method for fabricating a semiconductor device Sep. 4, 2001
6281066 Method of manufacturing a capacitor in a memory device Aug. 28, 2001
6277681 Process to produce ultrathin crystalline silicon nitride on Si(111) for advanced gate dielectrics Aug. 21, 2001

1 2 3


 
 
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