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Class Information
Number: 438/249
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Including doping of trench surfaces > Doping by outdiffusion from a dopant source layer (e.g., doped oxide, etc.)
Description: Process wherein doping the trench surfaces is via diffusion from an adjacent dopant source layer formed thereupon.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8704326 Thin-film photoelectric conversion device and method for production thereof Apr. 22, 2014
8586444 Creating deep trenches on underlying substrate Nov. 19, 2013
8512581 Methods for liquid transfer coating of three-dimensional substrates Aug. 20, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8284017 Structure having substantially parallel resistor material lengths Oct. 9, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8053344 Methods of forming integrated circuits Nov. 8, 2011
7955927 Semiconductor device and fabricating method thereof Jun. 7, 2011
7955928 Structure and method of fabricating FinFET Jun. 7, 2011
7898014 Semiconductor device structures with self-aligned doped regions and methods for forming such semiconductor device structures Mar. 1, 2011
7803701 Method for fabricating a semiconductor device Sep. 28, 2010
7767520 Printed dopant layers Aug. 3, 2010
7745312 Selective germanium deposition for pillar devices Jun. 29, 2010
7727845 Ultra shallow junction formation by solid phase diffusion Jun. 1, 2010
7667258 Double-sided container capacitors using a sacrificial layer Feb. 23, 2010
7648873 Methods of forming capacitors Jan. 19, 2010
7605034 Integrated circuit memory cells and methods of forming Oct. 20, 2009
7473596 Methods of forming memory cells Jan. 6, 2009
7429509 Method for forming a semiconductor device Sep. 30, 2008
7419872 Method for preparing a trench capacitor structure Sep. 2, 2008
7410862 Trench capacitor and method for fabricating the same Aug. 12, 2008
7375034 Recessing trench to target depth using feed forward data May. 20, 2008
7301185 High-voltage transistor device having an interlayer dielectric etch stop layer for preventing leakage and improving breakdown voltage Nov. 27, 2007
7294543 DRAM (Dynamic Random Access Memory) cells Nov. 13, 2007
7268037 Method for fabricating microchips using metal oxide masks Sep. 11, 2007
7232718 Method for forming a deep trench capacitor buried plate Jun. 19, 2007
7223653 Process for forming a buried plate May. 29, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7145196 Asymmetric field effect transistor Dec. 5, 2006
7102184 Image device and photodiode structure Sep. 5, 2006
7098100 Trench capacitor and method for preparing the same Aug. 29, 2006
7094659 Method of forming deep trench capacitors Aug. 22, 2006
7084029 Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor Aug. 1, 2006
7078242 Manufacturing method of semiconducter device Jul. 18, 2006
7078291 Method for fabricating a deep trench capacitor Jul. 18, 2006
6969648 Method for forming buried plate of trench capacitor Nov. 29, 2005
6962847 Method for forming a self-aligned buried strap in a vertical memory cell Nov. 8, 2005
6946345 Self-aligned buried strap process using doped HDP oxide Sep. 20, 2005
6946344 Method for forming trench capacitor Sep. 20, 2005
6929998 Method for forming bottle-shaped trench Aug. 16, 2005
6927123 Method for forming a self-aligned buried strap in a vertical memory cell Aug. 9, 2005
6921691 Transistor with dopant-bearing metal in source and drain Jul. 26, 2005
6919245 Dynamic random access memory cell layout and fabrication method thereof Jul. 19, 2005
6916703 Method for forming uniform bottom electrode in trench of trench capacitor Jul. 12, 2005
6902982 Trench capacitor and process for preventing parasitic leakage Jun. 7, 2005
6884720 Forming copper interconnects with Sn coatings Apr. 26, 2005
6881620 Method of fabricating deep trench capacitor Apr. 19, 2005
6872621 Method for removal of hemispherical grained silicon in a deep trench Mar. 29, 2005
6861312 Method for fabricating a trench structure Mar. 1, 2005
6852590 Deep trench capacitor and method of fabricating the same Feb. 8, 2005

1 2 3 4

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