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Class Information
Number: 438/248
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Including doping of trench surfaces > Including isolation means formed in trench
Description: Process including forming a structure functioning as electrical isolation means at the groove bottom.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8685830 Method of filling shallow trenches Apr. 1, 2014
8679938 Shallow trench isolation for device including deep trench capacitors Mar. 25, 2014
8652925 Method of fabricating isolated capacitors and structure thereof Feb. 18, 2014
8647945 Method of forming substrate contact for semiconductor on insulator (SOI) substrate Feb. 11, 2014
8642423 Polysilicon/metal contact resistance in deep trench Feb. 4, 2014
8637378 Semiconductor component and methods for producing a semiconductor component Jan. 28, 2014
8592883 Semiconductor structure and method for making same Nov. 26, 2013
8564025 Nanowire FET having induced radial strain Oct. 22, 2013
8557657 Retrograde substrate for deep trench capacitors Oct. 15, 2013
8519484 Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same Aug. 27, 2013
8507979 Semiconductor integrated circuit with metal gate Aug. 13, 2013
8501562 Fabricating a gate oxide Aug. 6, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8493709 Method of forming capacitor structure Jul. 23, 2013
8486818 Semiconductor devices including buried gate electrodes and isolation layers and methods of forming semiconductor devices including buried gate electrodes and isolation layers using self aligne Jul. 16, 2013
8415214 STI silicon nitride cap for flat FEOL topology Apr. 9, 2013
8404542 Semiconductor device having transistor with vertical gate electrode and method of fabricating the same Mar. 26, 2013
8404583 Conformality of oxide layers along sidewalls of deep vias Mar. 26, 2013
8372710 Vertical transistors Feb. 12, 2013
8367497 Method to reduce trench capacitor leakage for random access memory device Feb. 5, 2013
8313990 Nanowire FET having induced radial strain Nov. 20, 2012
8309991 Nanowire FET having induced radial strain Nov. 13, 2012
8298952 Isolation structure and formation method thereof Oct. 30, 2012
8247305 Method and resulting structure for deep trench polysilicon hard mask removal Aug. 21, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8129238 Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same Mar. 6, 2012
8129239 Semiconductor device having an expanded storage node contact and method for fabricating the same Mar. 6, 2012
8120140 Isolation structure and formation method thereof Feb. 21, 2012
8100706 Back plug-in connector device Jan. 24, 2012
8071440 Method of fabricating a dynamic random access memory Dec. 6, 2011
8048739 Method of manufacturing flash memory device Nov. 1, 2011
8030157 Liner protection in deep trench etching Oct. 4, 2011
8017494 Termination trench structure for mosgated device and process for its manufacture Sep. 13, 2011
7985647 Method of manufacturing nonvolatile memory device Jul. 26, 2011
7982284 Semiconductor component including an isolation structure and a contact to the substrate Jul. 19, 2011
7951661 Semiconductor device and method of fabricating the same May. 31, 2011
7923363 SONOS memory device with optimized shallow trench isolation Apr. 12, 2011
7897473 Method of manufacturing a dual contact trench capacitor Mar. 1, 2011
7897479 Managing integrated circuit stress using dummy diffusion regions Mar. 1, 2011
7872313 Semiconductor device having an expanded storage node contact and method for fabricating the same Jan. 18, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7846792 Method for manufacturing semiconductor device and semiconductor device manufacturing system Dec. 7, 2010
7846791 Structure for a trench capacitor Dec. 7, 2010
7811881 Methods for forming semiconductor structures with buried isolation collars and semiconductor structures formed by these methods Oct. 12, 2010
7799632 Method of forming an isolation structure by performing multiple high-density plasma depositions Sep. 21, 2010
7759189 Method of manufacturing a dual contact trench capacitor Jul. 20, 2010
7736992 Isolation trench geometry for image sensors Jun. 15, 2010
7713814 Hybrid orientation substrate compatible deep trench capacitor embedded DRAM May. 11, 2010
7713809 Image sensor for reduced dark current May. 11, 2010
7709346 Semiconductor device with trench gate type transistor and method of manufacturing the same May. 4, 2010

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