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Class Information
Number: 438/248
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Including doping of trench surfaces > Including isolation means formed in trench
Description: Process including forming a structure functioning as electrical isolation means at the groove bottom.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608878 |
Semiconductor device manufactured with a double shallow trench isolation process |
Oct. 27, 2009 |
| 7605034 |
Integrated circuit memory cells and methods of forming |
Oct. 20, 2009 |
| 7592218 |
Methods of forming vertical transistors |
Sep. 22, 2009 |
| 7557415 |
Trench isolation type semiconductor device and related method of manufacture |
Jul. 7, 2009 |
| 7553723 |
Manufacturing method of a memory device |
Jun. 30, 2009 |
| 7514317 |
Strained semiconductor device and method of making same |
Apr. 7, 2009 |
| 7498217 |
Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers |
Mar. 3, 2009 |
| 7491604 |
Trench memory with monolithic conducting material and methods for forming same |
Feb. 17, 2009 |
| 7488642 |
Process for forming a buried plate |
Feb. 10, 2009 |
| 7473596 |
Methods of forming memory cells |
Jan. 6, 2009 |
| 7445986 |
Memory cells with vertical transistor and capacitor and fabrication methods thereof |
Nov. 4, 2008 |
| 7429509 |
Method for forming a semiconductor device |
Sep. 30, 2008 |
| 7429512 |
Method for fabricating flash memory device |
Sep. 30, 2008 |
| 7425486 |
Method for forming a trench capacitor |
Sep. 16, 2008 |
| 7416937 |
Semiconductor device and method for fabricating the same |
Aug. 26, 2008 |
| 7407852 |
Trench capacitor of a DRAM and fabricating method thereof |
Aug. 5, 2008 |
| 7393750 |
Method for manufacturing a semiconductor device |
Jul. 1, 2008 |
| 7390717 |
Trench power MOSFET fabrication using inside/outside spacers |
Jun. 24, 2008 |
| 7364962 |
Shallow trench isolation process utilizing differential liners |
Apr. 29, 2008 |
| 7361546 |
Method of forming conductive stud on vertical memory device |
Apr. 22, 2008 |
| 7354812 |
Multiple-depth STI trenches in integrated circuit fabrication |
Apr. 8, 2008 |
| 7351634 |
Trench-capacitor DRAM device and manufacture method thereof |
Apr. 1, 2008 |
| 7348235 |
Semiconductor device and method of manufacturing the same |
Mar. 25, 2008 |
| 7344953 |
Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition |
Mar. 18, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7332396 |
Semiconductor device with recessed trench and method of fabricating the same |
Feb. 19, 2008 |
| 7316951 |
Fabrication method for a trench capacitor having an insulation collar |
Jan. 8, 2008 |
| 7303953 |
Production of an integrated capacitor |
Dec. 4, 2007 |
| 7279393 |
Trench isolation structure and method of manufacture therefor |
Oct. 9, 2007 |
| 7279381 |
Method for fabricating cell transistor of flash memory |
Oct. 9, 2007 |
| 7262090 |
Random access memory (RAM) capacitor in shallow trench isolation with improved electrical isolation to overlying gate electrodes |
Aug. 28, 2007 |
| 7247534 |
Silicon device on Si:C-OI and SGOI and method of manufacture |
Jul. 24, 2007 |
| 7223651 |
Dram memory cell with a trench capacitor and method for production thereof |
May. 29, 2007 |
| 7208812 |
Semiconductor device having STI without divot and its manufacture |
Apr. 24, 2007 |
| 7205193 |
Semiconductor device and method for fabricating the same |
Apr. 17, 2007 |
| 7202125 |
Low-voltage, multiple thin-gate oxide and low-resistance gate electrode |
Apr. 10, 2007 |
| 7199006 |
Planarization method of manufacturing a superjunction device |
Apr. 3, 2007 |
| 7196396 |
Semiconductor device having STI without divot and its manufacture |
Mar. 27, 2007 |
| 7189619 |
Process for manufacturing vertically insulated structural components on SOI material of various thickness |
Mar. 13, 2007 |
| 7183156 |
Transistor structure, memory cell, DRAM, and method for fabricating a transistor structure in a semiconductor substrate |
Feb. 27, 2007 |
| 7163857 |
Buried strap contact for a storage capacitor and method for fabricating it |
Jan. 16, 2007 |
| 7157328 |
Selective etching to increase trench surface area |
Jan. 2, 2007 |
| 7153738 |
Method for making a trench memory cell |
Dec. 26, 2006 |
| 7153781 |
Method to etch poly Si gate stacks with raised STI structure |
Dec. 26, 2006 |
| 7141506 |
Method for evaluating dependence of properties of semiconductor substrate on plane orientation and semiconductor device using the same |
Nov. 28, 2006 |
| 7132325 |
Test structure and methodology for semiconductor stress-induced defects and antifuse based on same test structure |
Nov. 7, 2006 |
| 7122439 |
Method of fabricating a bottle trench and a bottle trench capacitor |
Oct. 17, 2006 |
| 7101755 |
Gate conductor isolation and method for manufacturing same |
Sep. 5, 2006 |
| 7102184 |
Image device and photodiode structure |
Sep. 5, 2006 |
| 7098100 |
Trench capacitor and method for preparing the same |
Aug. 29, 2006 |
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