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Class Information
Number: 438/246
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Including doping of trench surfaces
Description: Process having a step of introducing electrically active dopant species into the surfaces of the groove in which the capacitor is located.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622351 |
Method of manufacturing semiconductor device and semiconductor device |
Nov. 24, 2009 |
| 7601596 |
Semiconductor device with trench transistors and method for manufacturing such a device |
Oct. 13, 2009 |
| 7575970 |
Deep trench capacitor through SOI substrate and methods of forming |
Aug. 18, 2009 |
| 7553722 |
Semiconductor device and method for manufacturing the same |
Jun. 30, 2009 |
| 7553723 |
Manufacturing method of a memory device |
Jun. 30, 2009 |
| 7504299 |
Folded node trench capacitor |
Mar. 17, 2009 |
| 7494865 |
Fabrication method of metal oxide semiconductor transistor |
Feb. 24, 2009 |
| 7485525 |
Method of manufacturing a multiple port memory having a plurality of parallel connected trench capacitors in a cell |
Feb. 3, 2009 |
| 7435628 |
Method of forming a vertical MOS transistor |
Oct. 14, 2008 |
| 7429509 |
Method for forming a semiconductor device |
Sep. 30, 2008 |
| 7427545 |
Trench memory cells with buried isolation collars, and methods of fabricating same |
Sep. 23, 2008 |
| 7410862 |
Trench capacitor and method for fabricating the same |
Aug. 12, 2008 |
| 7390713 |
Method for forming trench memory cell structures for DRAMS |
Jun. 24, 2008 |
| 7390717 |
Trench power MOSFET fabrication using inside/outside spacers |
Jun. 24, 2008 |
| 7387931 |
Semiconductor memory device with vertical channel transistor and method of fabricating the same |
Jun. 17, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7332394 |
Method to reduce a capacitor depletion phenomena |
Feb. 19, 2008 |
| 7326612 |
Method for fabricating a semiconductor structure |
Feb. 5, 2008 |
| 7294543 |
DRAM (Dynamic Random Access Memory) cells |
Nov. 13, 2007 |
| 7271052 |
Long retention time single transistor vertical memory gain cell |
Sep. 18, 2007 |
| 7241659 |
Volatile memory devices and methods for forming same |
Jul. 10, 2007 |
| 7232718 |
Method for forming a deep trench capacitor buried plate |
Jun. 19, 2007 |
| 7229878 |
Phototransistor of CMOS image sensor and method for fabricating the same |
Jun. 12, 2007 |
| 7223651 |
Dram memory cell with a trench capacitor and method for production thereof |
May. 29, 2007 |
| 7223653 |
Process for forming a buried plate |
May. 29, 2007 |
| 7157328 |
Selective etching to increase trench surface area |
Jan. 2, 2007 |
| 7157329 |
Trench capacitor with buried strap |
Jan. 2, 2007 |
| 7153737 |
Self-aligned, silicided, trench-based, DRAM/EDRAM processes with improved retention |
Dec. 26, 2006 |
| 7148103 |
Multilevel poly-Si tiling for semiconductor circuit manufacture |
Dec. 12, 2006 |
| 7144770 |
Memory cell and method for fabricating it |
Dec. 5, 2006 |
| 7122439 |
Method of fabricating a bottle trench and a bottle trench capacitor |
Oct. 17, 2006 |
| 7122423 |
Method for fabricating a memory cell |
Oct. 17, 2006 |
| 7118956 |
Trench capacitor and a method for manufacturing the same |
Oct. 10, 2006 |
| 7098100 |
Trench capacitor and method for preparing the same |
Aug. 29, 2006 |
| 7098102 |
Shallow trench isolation structure and dynamic random access memory, and fabricating methods thereof |
Aug. 29, 2006 |
| 7084028 |
Semiconductor device and method of manufacturing a semiconductor device |
Aug. 1, 2006 |
| 7084029 |
Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor |
Aug. 1, 2006 |
| 7052955 |
Semiconductor memory device and manufacturing method thereof |
May. 30, 2006 |
| 7037776 |
Single polysilicon process for DRAM |
May. 2, 2006 |
| 7034353 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity |
Apr. 25, 2006 |
| 7026209 |
Dynamic random access memory cell and fabrication thereof |
Apr. 11, 2006 |
| 6987044 |
Volatile memory structure and method for forming the same |
Jan. 17, 2006 |
| 6979613 |
Method for fabricating a trench capacitor of DRAM |
Dec. 27, 2005 |
| 6969648 |
Method for forming buried plate of trench capacitor |
Nov. 29, 2005 |
| 6967137 |
Forming collar structures in deep trench capacitors with thermally stable filler material |
Nov. 22, 2005 |
| 6960503 |
Method for fabricating a trench capacitor |
Nov. 1, 2005 |
| 6958275 |
MOSFET power transistors and methods |
Oct. 25, 2005 |
| 6946344 |
Method for forming trench capacitor |
Sep. 20, 2005 |
| 6946345 |
Self-aligned buried strap process using doped HDP oxide |
Sep. 20, 2005 |
| 6930012 |
Semiconductor memory with trench capacitor and method of manufacturing the same |
Aug. 16, 2005 |
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