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Class Information
Number: 438/246
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Including doping of trench surfaces
Description: Process having a step of introducing electrically active dopant species into the surfaces of the groove in which the capacitor is located.

Sub-classes under this class:

Class Number Class Name Patents
438/249 Doping by outdiffusion from a dopant source layer (e.g., doped oxide, etc.) 158
438/248 Including isolation means formed in trench 278
438/247 Multiple doping steps 89

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8642423 Polysilicon/metal contact resistance in deep trench Feb. 4, 2014
8592883 Semiconductor structure and method for making same Nov. 26, 2013
8563446 Technique to create a buried plate in embedded dynamic random access memory device Oct. 22, 2013
8557657 Retrograde substrate for deep trench capacitors Oct. 15, 2013
8557656 Cross-hair cell based floating body device Oct. 15, 2013
8546234 Semiconductor process Oct. 1, 2013
8502294 Semiconductor process and semiconductor structure for memory array with buried digit lines (BDL) Aug. 6, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8324014 Process for depositing boron compounds by CVD or PVD Dec. 4, 2012
8299515 Method of forming deep trench capacitor Oct. 30, 2012
8278703 Cross-hair cell based floating body device Oct. 2, 2012
8236710 Technique to create a buried plate in embedded dynamic random access memory device Aug. 7, 2012
8232162 Forming implanted plates for high aspect ratio trenches using staged sacrificial layer removal Jul. 31, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
8084322 Method of manufacturing devices having vertical junction edge Dec. 27, 2011
7955927 Semiconductor device and fabricating method thereof Jun. 7, 2011
7951666 Deep trench capacitor and method May. 31, 2011
7915162 Method of forming damascene filament wires Mar. 29, 2011
7910486 Method for forming nanotube semiconductor devices Mar. 22, 2011
7883984 Method of manufacturing flash memory device Feb. 8, 2011
7879672 eDRAM memory cell structure and method of fabricating Feb. 1, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7859026 Vertical semiconductor device Dec. 28, 2010
7808029 Mask structure for manufacture of trench type semiconductor device Oct. 5, 2010
7803701 Method for fabricating a semiconductor device Sep. 28, 2010
7785959 Method of multi-port memory fabrication with parallel connected trench capacitors in a cell Aug. 31, 2010
7759191 Vertical SOI transistor memory cell and method of forming the same Jul. 20, 2010
7741178 Method for fabricating vertical channel transistor in semiconductor device Jun. 22, 2010
7713814 Hybrid orientation substrate compatible deep trench capacitor embedded DRAM May. 11, 2010
7709346 Semiconductor device with trench gate type transistor and method of manufacturing the same May. 4, 2010
7700434 Trench widening without merging Apr. 20, 2010
7651933 Method of fabricating semiconductor device Jan. 26, 2010
7642892 Negative voltage coefficient resistor and method of manufacture Jan. 5, 2010
7638391 Semiconductor memory device and fabrication method thereof Dec. 29, 2009
7622351 Method of manufacturing semiconductor device and semiconductor device Nov. 24, 2009
7601596 Semiconductor device with trench transistors and method for manufacturing such a device Oct. 13, 2009
7575970 Deep trench capacitor through SOI substrate and methods of forming Aug. 18, 2009
7553722 Semiconductor device and method for manufacturing the same Jun. 30, 2009
7553723 Manufacturing method of a memory device Jun. 30, 2009
7504299 Folded node trench capacitor Mar. 17, 2009
7494865 Fabrication method of metal oxide semiconductor transistor Feb. 24, 2009
7485525 Method of manufacturing a multiple port memory having a plurality of parallel connected trench capacitors in a cell Feb. 3, 2009
7435628 Method of forming a vertical MOS transistor Oct. 14, 2008
7429509 Method for forming a semiconductor device Sep. 30, 2008
7427545 Trench memory cells with buried isolation collars, and methods of fabricating same Sep. 23, 2008
7410862 Trench capacitor and method for fabricating the same Aug. 12, 2008
7390717 Trench power MOSFET fabrication using inside/outside spacers Jun. 24, 2008
7390713 Method for forming trench memory cell structures for DRAMS Jun. 24, 2008
7387931 Semiconductor memory device with vertical channel transistor and method of fabricating the same Jun. 17, 2008

1 2 3 4 5

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