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Class Information
Number: 438/245
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > With epitaxial layer formed over the trench
Description: Process including a step of forming an epitaxial semiconductive layer over the trench region.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8664061 Pulse method of oxidizing sidewall dielectrics for high capacitance applications Mar. 4, 2014
8592883 Semiconductor structure and method for making same Nov. 26, 2013
8557657 Retrograde substrate for deep trench capacitors Oct. 15, 2013
RE44236 Method for manufacturing semiconductor device May. 21, 2013
8399340 Method of manufacturing super-junction semiconductor device Mar. 19, 2013
8372710 Vertical transistors Feb. 12, 2013
8313995 Method for manufacturing a semiconductor device Nov. 20, 2012
8253191 Vertically-oriented semiconductor selection device for cross-point array memory Aug. 28, 2012
8207033 Methods of fabricating different thickness silicon-germanium layers on semiconductor integrated circuit devices and semiconductor integrated circuit devices fabricated thereby Jun. 26, 2012
8148796 Solar cell and manufacturing method thereof Apr. 3, 2012
8143659 Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor Mar. 27, 2012
7993985 Method for forming a semiconductor device with a single-sided buried strap Aug. 9, 2011
7968384 Stacked transistors and process Jun. 28, 2011
7947569 Method for producing a semiconductor including a foreign material layer May. 24, 2011
7892935 Semiconductor process Feb. 22, 2011
7863130 Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit Jan. 4, 2011
7811907 Method for manufacturing semiconductor device and epitaxial growth equipment Oct. 12, 2010
7811880 Fabrication of recordable electrical memory Oct. 12, 2010
7759190 Memory device and fabrication method thereof Jul. 20, 2010
7713814 Hybrid orientation substrate compatible deep trench capacitor embedded DRAM May. 11, 2010
7638828 Embedded capacitor Dec. 29, 2009
7632742 Substrate for growing Pendeo epitaxy and method of forming the same Dec. 15, 2009
7601603 Method for manufacturing semiconductor device Oct. 13, 2009
7585705 Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop Sep. 8, 2009
7572699 Process of forming an electronic device including fins and discontinuous storage elements Aug. 11, 2009
7563669 Integrated circuit with a trench capacitor structure and method of manufacture Jul. 21, 2009
7491603 Transistors of semiconductor device having channel region in a channel-portion hole and methods of forming the same Feb. 17, 2009
7488642 Process for forming a buried plate Feb. 10, 2009
7470585 Integrated circuit and fabrication process Dec. 30, 2008
7410864 Trench and a trench capacitor and method for forming the same Aug. 12, 2008
7402487 Process for fabricating a semiconductor device having deep trench structures Jul. 22, 2008
7390717 Trench power MOSFET fabrication using inside/outside spacers Jun. 24, 2008
7320912 Trench capacitors with buried isolation layer formed by an oxidation process and methods for manufacturing the same Jan. 22, 2008
7271052 Long retention time single transistor vertical memory gain cell Sep. 18, 2007
7241659 Volatile memory devices and methods for forming same Jul. 10, 2007
7229877 Trench capacitor with hybrid surface orientation substrate Jun. 12, 2007
7223651 Dram memory cell with a trench capacitor and method for production thereof May. 29, 2007
7220640 Method of fabricating recess transistor in integrated circuit device and recess transistor in integrated circuit device fabricated by the same May. 22, 2007
7205193 Semiconductor device and method for fabricating the same Apr. 17, 2007
7157328 Selective etching to increase trench surface area Jan. 2, 2007
7157329 Trench capacitor with buried strap Jan. 2, 2007
7148103 Multilevel poly-Si tiling for semiconductor circuit manufacture Dec. 12, 2006
7144770 Memory cell and method for fabricating it Dec. 5, 2006
7122439 Method of fabricating a bottle trench and a bottle trench capacitor Oct. 17, 2006
7101768 Self-aligned selective hemispherical grain deposition process and structure for enhanced capacitance trench capacitor Sep. 5, 2006
7098100 Trench capacitor and method for preparing the same Aug. 29, 2006
7094659 Method of forming deep trench capacitors Aug. 22, 2006
7084028 Semiconductor device and method of manufacturing a semiconductor device Aug. 1, 2006
7084029 Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor Aug. 1, 2006
7067372 Method for fabricating a memory cell having a trench Jun. 27, 2006

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