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Class Information
Number: 438/244
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Utilizing stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other or wherein the capacitor and the insulated gate field effect transistor are located such that one overlies the other.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709890 Method and structure for forming ETSOI capacitors, diodes, resistors and back gate contacts Apr. 29, 2014
8710567 Semiconductor device and manufacturing method thereof Apr. 29, 2014
8691656 Methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM Apr. 8, 2014
8680599 Semiconductor device and method of manufacturing the same Mar. 25, 2014
8673719 DRAM with a nanowire access transistor Mar. 18, 2014
8658494 Dual contact metallization including electroless plating in a semiconductor device Feb. 25, 2014
8652920 Substrate with embedded patterned capacitance Feb. 18, 2014
8633036 Manufacturing method of ferroelectric capacitor Jan. 21, 2014
8623725 Methods of forming capacitors Jan. 7, 2014
8617949 Capacitor and method for making same Dec. 31, 2013
8592979 Semiconductor device conductive pattern structures and methods of manufacturing the same Nov. 26, 2013
8586444 Creating deep trenches on underlying substrate Nov. 19, 2013
8587047 Capacitor formation for a pumping circuit Nov. 19, 2013
8530312 Vertical devices and methods of forming Sep. 10, 2013
8530330 Method for manufacturing a semiconductor device capable of preventing the decrease of the width of an active region Sep. 10, 2013
8492816 Deep trench decoupling capacitor Jul. 23, 2013
8492819 FET eDRAM trench self-aligned to buried strap Jul. 23, 2013
8486800 Trench capacitor and method for producing the same Jul. 16, 2013
8486784 Vertical semiconductor device and method of manufacturing the same Jul. 16, 2013
8470668 Method for forming pillar type capacitor of semiconductor device Jun. 25, 2013
8470680 Substrate with embedded patterned capacitance Jun. 25, 2013
8455360 Method for fabricating storage node of semiconductor device Jun. 4, 2013
8445367 Methods of manufacturing semiconductor devices May. 21, 2013
8431981 Semiconductor memory device having vertical transistor and buried bit line and method for fabricating the same Apr. 30, 2013
8410536 Substrate with embedded patterned capacitance Apr. 2, 2013
8399304 Thin film capacitor and method of fabrication thereof Mar. 19, 2013
8394696 Semiconductor device with reduced capacitance tolerance value Mar. 12, 2013
8372710 Vertical transistors Feb. 12, 2013
8368132 Ferroelectric memory and manufacturing method thereof Feb. 5, 2013
8367497 Method to reduce trench capacitor leakage for random access memory device Feb. 5, 2013
8368136 Integrating a capacitor in a metal gate last process Feb. 5, 2013
8350311 Semiconductor device Jan. 8, 2013
8343844 Method for manufacturing capacitor of semiconductor device and capacitor of semiconductor device manufactured thereby Jan. 1, 2013
8329533 Stacked capacitor for double-poly flash memory Dec. 11, 2012
8304829 Trench-based power semiconductor devices with increased breakdown voltage characteristics Nov. 6, 2012
8273621 MOS-FET having a channel connection, and method for the production of a MOS-FET having a channel connection Sep. 25, 2012
8247304 Method of manufacturing semiconductor device having capacitor under bit line structure Aug. 21, 2012
8236643 Method of manufacturing semiconductor device including ferroelectric capacitor Aug. 7, 2012
8232163 Lateral epitaxial grown SOI in deep trench structures and methods of manufacture Jul. 31, 2012
8212298 Semiconductor storage device and methods of producing it Jul. 3, 2012
8188527 Embedded capacitor in semiconductor device and method for fabricating the same May. 29, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8148223 1T MIM memory for embedded ram application in soc Apr. 3, 2012
8133779 Method of fabricating a semiconductor device Mar. 13, 2012
8129239 Semiconductor device having an expanded storage node contact and method for fabricating the same Mar. 6, 2012
8124545 Methods of etching oxide, reducing roughness, and forming capacitor constructions Feb. 28, 2012
8110475 Method for forming a memory device with C-shaped deep trench capacitors Feb. 7, 2012
8088658 Thin film capacitor and method of fabrication thereof Jan. 3, 2012
8082672 Mechanical patterning of thin film photovoltaic materials and structure Dec. 27, 2011
8030168 Methods of forming DRAM memory cells Oct. 4, 2011

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