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Class Information
Number: 438/244
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor > Utilizing stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.)
Description: Process wherein the trench capacitor contains a number of capacitor plate regions aligned vertically above each other or wherein the capacitor and the insulated gate field effect transistor are located such that one overlies the other.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626257 |
Semiconductor devices and methods of manufacture thereof |
Dec. 1, 2009 |
| 7621041 |
Methods for forming multilayer structures |
Nov. 24, 2009 |
| 7608881 |
Thin-film device and method of manufacturing same |
Oct. 27, 2009 |
| 7595250 |
Semiconductor device and method of manufacturing the same |
Sep. 29, 2009 |
| 7592657 |
Semiconductor device and method of manufacturing the same |
Sep. 22, 2009 |
| 7585723 |
Method for fabricating capacitor |
Sep. 8, 2009 |
| 7582525 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon |
Sep. 1, 2009 |
| 7575971 |
Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same |
Aug. 18, 2009 |
| 7572710 |
Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
Aug. 11, 2009 |
| 7563667 |
Method for fabricating semiconductor device |
Jul. 21, 2009 |
| 7563672 |
Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors |
Jul. 21, 2009 |
| 7560795 |
Semiconductor device with a capacitor |
Jul. 14, 2009 |
| 7541656 |
Semiconductor devices with enlarged recessed gate electrodes |
Jun. 2, 2009 |
| 7535046 |
Dielectric memory and manufacturing method thereof |
May. 19, 2009 |
| 7524724 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same |
Apr. 28, 2009 |
| 7525143 |
Dram device having capacitor |
Apr. 28, 2009 |
| 7514290 |
Chip-to-wafer integration technology for three-dimensional chip stacking |
Apr. 7, 2009 |
| 7510930 |
Method for fabricating recessed gate MOS transistor device |
Mar. 31, 2009 |
| 7504299 |
Folded node trench capacitor |
Mar. 17, 2009 |
| 7494871 |
Semiconductor memory devices and methods for forming the same |
Feb. 24, 2009 |
| 7488641 |
Trench DRAM cell with vertical device and buried word lines |
Feb. 10, 2009 |
| 7485909 |
Semiconductor device and method of manufacturing the same |
Feb. 3, 2009 |
| 7473598 |
Method for forming stack capacitor |
Jan. 6, 2009 |
| 7470585 |
Integrated circuit and fabrication process |
Dec. 30, 2008 |
| 7468323 |
Method of forming high aspect ratio structures |
Dec. 23, 2008 |
| 7449382 |
Memory device and fabrication method thereof |
Nov. 11, 2008 |
| 7449391 |
Methods of forming plurality of capacitor devices |
Nov. 11, 2008 |
| 7445987 |
Offset vertical device |
Nov. 4, 2008 |
| 7442602 |
Methods of fabricating phase change memory cells having a cell diode and a bottom electrode self-aligned with each other |
Oct. 28, 2008 |
| 7439130 |
Semiconductor device with capacitor and method for fabricating the same |
Oct. 21, 2008 |
| 7429509 |
Method for forming a semiconductor device |
Sep. 30, 2008 |
| 7410863 |
Methods of forming and using memory cell structures |
Aug. 12, 2008 |
| 7410864 |
Trench and a trench capacitor and method for forming the same |
Aug. 12, 2008 |
| 7405133 |
Semiconductor device and method for manufacturing the same |
Jul. 29, 2008 |
| 7402486 |
Cylinder-type capacitor and storage device, and method(s) for fabricating the same |
Jul. 22, 2008 |
| 7393741 |
Methods of forming pluralities of capacitors |
Jul. 1, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7390730 |
Method of fabricating a body capacitor for SOI memory |
Jun. 24, 2008 |
| 7390717 |
Trench power MOSFET fabrication using inside/outside spacers |
Jun. 24, 2008 |
| 7384852 |
Sub-lithographic gate length transistor using self-assembling polymers |
Jun. 10, 2008 |
| 7371589 |
Ferroelectric random access memory capacitor and method for manufacturing the same |
May. 13, 2008 |
| 7371645 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device |
May. 13, 2008 |
| 7354823 |
Methods of forming integrated circuit devices having carbon nanotube electrodes therein |
Apr. 8, 2008 |
| 7354822 |
Method of forming a MOSFET with dual work function materials |
Apr. 8, 2008 |
| 7354821 |
Methods of fabricating trench capacitors with insulating layer collars in undercut regions |
Apr. 8, 2008 |
| 7335554 |
Method for fabricating semiconductor |
Feb. 26, 2008 |
| 7332390 |
Semiconductor memory device and fabrication thereof |
Feb. 19, 2008 |
| 7332396 |
Semiconductor device with recessed trench and method of fabricating the same |
Feb. 19, 2008 |
| 7326613 |
Methods of manufacturing semiconductor devices having elongated contact plugs |
Feb. 5, 2008 |
| 7320912 |
Trench capacitors with buried isolation layer formed by an oxidation process and methods for manufacturing the same |
Jan. 22, 2008 |
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