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Class Information
Number: 438/243
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Trench capacitor
Description: Process for making an insulated gate field effect transistor combined with a capacitor which is located in a groove in the semiconductor substrate.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615443 |
Method of forming finFET device |
Nov. 10, 2009 |
| 7611931 |
Semiconductor structures with body contacts and fabrication methods thereof |
Nov. 3, 2009 |
| 7608881 |
Thin-film device and method of manufacturing same |
Oct. 27, 2009 |
| 7598138 |
Semiconductor device manufacturing method |
Oct. 6, 2009 |
| 7595236 |
Method for production of semiconductor device having a hole extending through a first insulating film, a second insulating film and a third insulating film |
Sep. 29, 2009 |
| 7592216 |
Fabrication process of a semiconductor device having a capacitor |
Sep. 22, 2009 |
| 7586142 |
Semiconductor device having metal-insulator-metal capacitor and method of fabricating the same |
Sep. 8, 2009 |
| 7582525 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon |
Sep. 1, 2009 |
| 7579234 |
Method for fabricating memory device with recess channel MOS transistor |
Aug. 25, 2009 |
| 7575971 |
Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same |
Aug. 18, 2009 |
| 7572699 |
Process of forming an electronic device including fins and discontinuous storage elements |
Aug. 11, 2009 |
| 7572710 |
Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
Aug. 11, 2009 |
| 7569451 |
Method of fabricating an isolation shallow trench |
Aug. 4, 2009 |
| 7569450 |
Semiconductor capacitors in hot (hybrid orientation technology) substrates |
Aug. 4, 2009 |
| 7566614 |
Capacitor of semiconductor device and method of fabricating the same |
Jul. 28, 2009 |
| 7564114 |
Semiconductor devices and methods of manufacture thereof |
Jul. 21, 2009 |
| 7564086 |
Self-aligned, silicided, trench-based DRAM/eDRAM processes with improved retention |
Jul. 21, 2009 |
| 7563672 |
Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors |
Jul. 21, 2009 |
| 7563671 |
Method for forming trench capacitor and memory cell |
Jul. 21, 2009 |
| 7563670 |
Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same |
Jul. 21, 2009 |
| 7563669 |
Integrated circuit with a trench capacitor structure and method of manufacture |
Jul. 21, 2009 |
| 7560336 |
DRAM layout with vertical FETs and method of formation |
Jul. 14, 2009 |
| 7557002 |
Methods of forming transistor devices |
Jul. 7, 2009 |
| 7550359 |
Methods involving silicon-on-insulator trench memory with implanted plate |
Jun. 23, 2009 |
| 7547598 |
Method for fabricating capacitor in semiconductor device |
Jun. 16, 2009 |
| 7541656 |
Semiconductor devices with enlarged recessed gate electrodes |
Jun. 2, 2009 |
| 7535046 |
Dielectric memory and manufacturing method thereof |
May. 19, 2009 |
| 7531406 |
Method for fabricating an electrical component |
May. 12, 2009 |
| 7528035 |
Vertical trench memory cell with insulating ring |
May. 5, 2009 |
| 7525142 |
Semiconductor device including a conductive layer buried in an opening and method of manufacturing the same |
Apr. 28, 2009 |
| 7510930 |
Method for fabricating recessed gate MOS transistor device |
Mar. 31, 2009 |
| 7494891 |
Trench capacitor with void-free conductor fill |
Feb. 24, 2009 |
| 7488641 |
Trench DRAM cell with vertical device and buried word lines |
Feb. 10, 2009 |
| 7488642 |
Process for forming a buried plate |
Feb. 10, 2009 |
| 7485921 |
Trench gate type MOS transistor semiconductor device |
Feb. 3, 2009 |
| 7479424 |
Method for fabricating an integrated circuit comprising a three-dimensional capacitor |
Jan. 20, 2009 |
| 7470585 |
Integrated circuit and fabrication process |
Dec. 30, 2008 |
| 7468323 |
Method of forming high aspect ratio structures |
Dec. 23, 2008 |
| 7459365 |
Method for fabricating a semiconductor component |
Dec. 2, 2008 |
| 7449741 |
SRAM cell structure and manufacturing method thereof |
Nov. 11, 2008 |
| 7449375 |
Fin semiconductor device and method for fabricating the same |
Nov. 11, 2008 |
| 7449382 |
Memory device and fabrication method thereof |
Nov. 11, 2008 |
| 7445985 |
DRAM memory and method for fabricating a DRAM memory cell |
Nov. 4, 2008 |
| 7445987 |
Offset vertical device |
Nov. 4, 2008 |
| 7445988 |
Trench memory |
Nov. 4, 2008 |
| 7439112 |
Semiconductor device using partial SOI substrate and manufacturing method thereof |
Oct. 21, 2008 |
| 7439130 |
Semiconductor device with capacitor and method for fabricating the same |
Oct. 21, 2008 |
| 7439128 |
Method of creating deep trench capacitor using a P+ metal electrode |
Oct. 21, 2008 |
| 7435643 |
Fabrication method of a dynamic random access memory |
Oct. 14, 2008 |
| 7432151 |
Semiconductor device and method for fabricating the same |
Oct. 7, 2008 |
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