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Class Information
Number: 438/242
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > And additional field effect transistor (e.g., sense or access transistor, etc.) > Including transistor formed on trench sidewalls
Description: Process wherein the additional diverse field effect transistor is formed on the side-walls of a groove formed in the semiconductor substrate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8658498 Single mask spacer technique for semiconductor device features Feb. 25, 2014
8652901 Single-mask spacer technique for semiconductor device features Feb. 18, 2014
8653596 Integrated circuit including DRAM and SRAM/logic Feb. 18, 2014
8637355 Actuating transistor including single layer reentrant profile Jan. 28, 2014
8623725 Methods of forming capacitors Jan. 7, 2014
8609492 Vertical memory cell Dec. 17, 2013
8592883 Semiconductor structure and method for making same Nov. 26, 2013
8580637 Method of patterning a semiconductor device having improved spacing and shape control and a semiconductor device Nov. 12, 2013
8569164 Through substrate structure, device package having the same, and methods for manufacturing the same Oct. 29, 2013
8557656 Cross-hair cell based floating body device Oct. 15, 2013
8546215 Methods of fabricating a memory device Oct. 1, 2013
8518791 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) with simultaneous formation of sidewall ferroelectric capacitors Aug. 27, 2013
8518792 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) having a ferroelectric capacitor aligned with a three dimensional transistor structure Aug. 27, 2013
8501559 Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same Aug. 6, 2013
8501561 Method for producing a semiconductor component arrangement comprising a trench transistor Aug. 6, 2013
8493709 Method of forming capacitor structure Jul. 23, 2013
8481385 Methods of fabricating a memory device Jul. 9, 2013
8409948 Methods of forming transistors, and methods of forming memory arrays Apr. 2, 2013
8405089 Semiconductor memory device and manufacturing method thereof Mar. 26, 2013
8383477 Semiconductor device including vertical transistor and method for manufacturing the same Feb. 26, 2013
8361856 Memory cells, arrays of memory cells, and methods of forming memory cells Jan. 29, 2013
8299515 Method of forming deep trench capacitor Oct. 30, 2012
8298889 Process of forming an electronic device including a trench and a conductive structure therein Oct. 30, 2012
8288224 Method for manufacturing capacitor lower electrodes of semiconductor memory Oct. 16, 2012
8283715 Method and apparatus for buried word line formation Oct. 9, 2012
8278703 Cross-hair cell based floating body device Oct. 2, 2012
8258054 Method for fabricating semiconductor device Sep. 4, 2012
8232171 Structure with isotropic silicon recess profile in nanoscale dimensions Jul. 31, 2012
8222105 Methods of fabricating a memory device Jul. 17, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8207032 Methods of forming pluralities of vertical transistors, and methods of forming memory arrays Jun. 26, 2012
8174065 Semiconductor device having vertical transistor and method of fabricating the same May. 8, 2012
8164133 Vertical transistor and method of enabling a vertical transistor to generate an alternating current output Apr. 24, 2012
8158476 Integrated circuit fabrication Apr. 17, 2012
8148796 Solar cell and manufacturing method thereof Apr. 3, 2012
8143135 Embedded series deep trench capacitors and methods of manufacture Mar. 27, 2012
8124494 Method for reshaping silicon surfaces with shallow trench isolation Feb. 28, 2012
8084316 Method of fabricating single transistor floating-body DRAM devices having vertical channel transistor structures Dec. 27, 2011
8084322 Method of manufacturing devices having vertical junction edge Dec. 27, 2011
8076712 Semiconductor memory comprising dual charge storage nodes and methods for its fabrication Dec. 13, 2011
8053307 Method of fabricating semiconductor device with cell epitaxial layers partially overlap buried cell gate electrode Nov. 8, 2011
8034682 Power device with trenches having wider upper portion than lower portion Oct. 11, 2011
8030636 Enhanced memory density resistance variable memory cells, arrays, devices and systems including the same, and methods of fabrication Oct. 4, 2011
8003457 Fabricating method of vertical transistor Aug. 23, 2011
7932167 Phase change memory cell with vertical transistor Apr. 26, 2011
7923363 SONOS memory device with optimized shallow trench isolation Apr. 12, 2011
7910435 Method of manufacturing a semiconductor device having a channel extending vertically Mar. 22, 2011
7902057 Methods of fabricating dual fin structures Mar. 8, 2011
7879679 Electronic component manufacturing method Feb. 1, 2011
7846790 Method of fabricating semiconductor device having multiple gate dielectric layers and semiconductor device fabricated thereby Dec. 7, 2010

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