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Class Information
Number: 438/241
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > And additional field effect transistor (e.g., sense or access transistor, etc.)
Description: Process for making an insulated gate field effect transistor having combined therewith a capacitor and an additional field effect transistor.










Sub-classes under this class:

Class Number Class Name Patents
438/242 Including transistor formed on trench sidewalls 303


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Patent Number Title Of Patent Date Issued
6383861 Method of fabricating a dual gate dielectric May. 7, 2002
6383862 Method of forming a contact hole in a semiconductor substrate using oxide spacers on the sidewalls of the contact hole May. 7, 2002
6379978 Memory cell configuration in which an electrical resistance of a memory element represents an information item and can be influenced by a magnetic field, and method for fabricating it Apr. 30, 2002
6380027 Dual tox trench dram structures and process using V-groove Apr. 30, 2002
6380018 Semiconductor device and method for the production thereof Apr. 30, 2002
6372572 Method of planarizing peripheral circuit region of a DRAM Apr. 16, 2002
6372565 Method of manufacturing SRAM cell Apr. 16, 2002
6368906 Method of planarization using selecting curing of SOG layer Apr. 9, 2002
6365928 Semiconductor memory storage electrode and method of making Apr. 2, 2002
6365452 DRAM cell having a vertical transistor and a capacitor formed on the sidewalls of a trench isolation Apr. 2, 2002
6355550 Ultra-late programming ROM and method of manufacture Mar. 12, 2002
6353269 Method for making cost-effective embedded DRAM structures compatible with logic circuit processing Mar. 5, 2002
6352891 Method of manufacturing semiconductor device in which hot carrier resistance can be improved and silicide layer can be formed with high reliability Mar. 5, 2002
6352890 Method of forming a memory cell with self-aligned contacts Mar. 5, 2002
6344388 Method of manufacturing semiconductor device Feb. 5, 2002
6342420 Hexagonally symmetric integrated circuit cell Jan. 29, 2002
6342418 Semiconductor device and manufacturing method thereof Jan. 29, 2002
6337244 Method of forming flash memory Jan. 8, 2002
6337240 Method for fabricating an embedded dynamic random access memory Jan. 8, 2002
6337253 Process of making buried capacitor for silicon-on-insulator structure Jan. 8, 2002
6335236 Manufacturing method of semiconductor device Jan. 1, 2002
6335248 Dual workfunction MOSFETs with borderless diffusion contacts for high-performance embedded DRAM technology Jan. 1, 2002
6335245 Method for fabricating single electron transistor Jan. 1, 2002
6333225 Integrated circuitry and methods of forming circuitry Dec. 25, 2001
6333223 Semiconductor device and method of manufacturing the same Dec. 25, 2001
6333222 Semiconductor device and manufacturing method thereof Dec. 25, 2001
6331462 Manufacturing method of a semiconductor device for desired circuit patterns Dec. 18, 2001
6329240 Non-volatile memory cell and methods of fabricating and operating same Dec. 11, 2001
6329234 Copper process compatible CMOS metal-insulator-metal capacitor structure and its process flow Dec. 11, 2001
6326260 Gate prespacers for high density, high performance DRAMs Dec. 4, 2001
6323083 Method for forming lower electrode structure of capacitor of semiconductor device Nov. 27, 2001
6319773 Construction and application for non-volatile, reprogrammable switches Nov. 20, 2001
6316307 Method of forming a capacitor for a semiconductor memory device Nov. 13, 2001
6303455 Method for manufacturing capacitor Oct. 16, 2001
6303428 Method of making dynamic memory device with increased charge retention capacity Oct. 16, 2001
6303422 Semiconductor memory and manufacturing method thereof Oct. 16, 2001
6294449 Self-aligned contact for closely spaced transistors Sep. 25, 2001
6294422 Semiconductor device with high integration density and improved performance Sep. 25, 2001
6294426 Method of fabricating a capacitor under bit line structure with increased capacitance without increasing the aspect ratio for a dry etched bit line contact hole Sep. 25, 2001
6294424 Method for fabricating a semiconductor device Sep. 25, 2001
6294423 Method for forming and filling isolation trenches Sep. 25, 2001
6291335 Locally folded split level bitline wiring Sep. 18, 2001
6291292 Method for fabricating a semiconductor memory device Sep. 18, 2001
6287912 Method of fabricating semiconductor device Sep. 11, 2001
6287907 Method of manufacturing a flash memory having a select transistor Sep. 11, 2001
6287948 Semiconductor device and method for making pattern data Sep. 11, 2001
6287913 Double polysilicon process for providing single chip high performance logic and compact embedded memory structure Sep. 11, 2001
6287911 Semiconductor device with silicide layers and fabrication method thereof Sep. 11, 2001
6284592 Method for fabricating a semiconductor device Sep. 4, 2001
6284591 Formation method of interconnection in semiconductor device Sep. 4, 2001

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