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Class Information
Number: 438/240
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Including passive device (e.g., resistor, capacitor, etc.) > Capacitor > Having high dielectric constant insulator (e.g., ta2o5, etc.)
Description: Process wherein the capacitor dielectric is constructed of a material having a dielectric constant of greater than 7.5, the dielectric constant of Si3
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618859 |
Thin film capacitor and fabrication method thereof |
Nov. 17, 2009 |
| 7615441 |
Forming high-k dielectric layers on smooth substrates |
Nov. 10, 2009 |
| 7615440 |
Capacitor and method of manufacturing a capacitor |
Nov. 10, 2009 |
| 7615438 |
Lanthanide yttrium aluminum oxide dielectric films |
Nov. 10, 2009 |
| 7611913 |
Ferroelectric rare-earth manganese-titanium oxides |
Nov. 3, 2009 |
| 7608502 |
Method for manufacturing semiconductor device |
Oct. 27, 2009 |
| 7601649 |
Zirconium-doped tantalum oxide films |
Oct. 13, 2009 |
| 7601548 |
Methods of fabricating ferroelectric capacitors having oxidation barrier conductive layers and lower electrodes disposed in trenches defined by supporting insulating layers |
Oct. 13, 2009 |
| 7598095 |
Ferroelectric memory and ferroelectric capacitor with Ir-alloy electrode or Ru-alloy electrode and method of manufacturing same |
Oct. 6, 2009 |
| 7595250 |
Semiconductor device and method of manufacturing the same |
Sep. 29, 2009 |
| 7592272 |
Manufacturing method of semiconductor integrated circuit |
Sep. 22, 2009 |
| 7592217 |
Capacitor with zirconium oxide and method for fabricating the same |
Sep. 22, 2009 |
| 7579643 |
Capacitor having high electrostatic capacity, integrated circuit device including the capacitor and method of fabricating the same |
Aug. 25, 2009 |
| 7572695 |
Hafnium titanium oxide films |
Aug. 11, 2009 |
| 7563729 |
Method of forming a dielectric film |
Jul. 21, 2009 |
| 7560333 |
Capacitor in semiconductor device and method of manufacturing the same |
Jul. 14, 2009 |
| 7550346 |
Method for forming a gate dielectric of a semiconductor device |
Jun. 23, 2009 |
| 7550345 |
Methods of forming hafnium-containing materials |
Jun. 23, 2009 |
| 7548408 |
Capacitor and its manufacturing method |
Jun. 16, 2009 |
| 7544987 |
High-k dielectric materials and processes for manufacturing them |
Jun. 9, 2009 |
| 7531417 |
High performance system-on-chip passive device using post passivation process |
May. 12, 2009 |
| 7531408 |
Method of manufacturing a semiconductor device containing a Pb.sub.xSr.sub.(1-x)[Zr,Ti].sub.xRu.sub.(1-x)O.sub.3 film in a capacitor |
May. 12, 2009 |
| 7531405 |
Method of manufacturing a dielectric layer and corresponding semiconductor device |
May. 12, 2009 |
| 7528434 |
Production process for a semiconductor component with a praseodymium oxide dielectric |
May. 5, 2009 |
| 7528034 |
Method for forming ferroelectric capacitor, ferroelectric capacitor and electronic device |
May. 5, 2009 |
| 7524723 |
Semiconductor device and method for manufacturing same |
Apr. 28, 2009 |
| 7521263 |
Method of forming an insulating film, method of manufacturing a semiconductor device, and semiconductor device |
Apr. 21, 2009 |
| 7517751 |
Substrate treating method |
Apr. 14, 2009 |
| 7514316 |
Semiconductor device and method of manufacturing the same |
Apr. 7, 2009 |
| 7514315 |
Methods of forming capacitor structures having aluminum oxide diffusion barriers |
Apr. 7, 2009 |
| 7514272 |
Method of manufacturing ferroelectric memory device |
Apr. 7, 2009 |
| 7510943 |
Semiconductor devices and methods of manufacture thereof |
Mar. 31, 2009 |
| 7507644 |
Method of forming dielectric layer of flash memory device |
Mar. 24, 2009 |
| 7507621 |
Method of manufacturing semiconductor device |
Mar. 24, 2009 |
| 7504684 |
Semiconductor device and manufacturing method therefor |
Mar. 17, 2009 |
| 7504680 |
Semiconductor device and mask pattern |
Mar. 17, 2009 |
| 7501320 |
Semiconductor device with dielectric structure and method for fabricating the same |
Mar. 10, 2009 |
| 7501191 |
Amorphous dielectric thin film and manufacturing method thereof |
Mar. 10, 2009 |
| 7491606 |
Semiconductor device and method for fabricating the same |
Feb. 17, 2009 |
| 7488673 |
Trench MOS Schottky barrier rectifier with high k gate dielectric and reduced mask process for the manufacture thereof |
Feb. 10, 2009 |
| 7488628 |
Methods for fabricating ferroelectric memory devices with improved ferroelectric properties |
Feb. 10, 2009 |
| 7482286 |
Method for forming dielectric or metallic films |
Jan. 27, 2009 |
| 7473597 |
Method of forming via structures and method of fabricating phase change memory devices incorporating such via structures |
Jan. 6, 2009 |
| 7470991 |
Integrated high voltage capacitor having capacitance uniformity structures and a method of manufacture therefor |
Dec. 30, 2008 |
| 7470584 |
TEOS deposition method |
Dec. 30, 2008 |
| 7470551 |
Spin transistor and manufacturing method thereof |
Dec. 30, 2008 |
| 7465657 |
Method of manufacturing a semiconductor device having a capacitor |
Dec. 16, 2008 |
| 7465627 |
Methods of forming capacitors |
Dec. 16, 2008 |
| 7465626 |
Method for forming a high-k dielectric stack |
Dec. 16, 2008 |
| 7462901 |
Field effect transistor |
Dec. 9, 2008 |
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