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Class Information
Number: 438/232
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Self-aligned > Plural doping steps
Description: Process including multiple steps of introducing electrically active dopant species into semiconductor regions of the substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611947 |
Method of manufacturing semiconductor device |
Nov. 3, 2009 |
| 7611943 |
Transistors, integrated circuits, systems, and processes of manufacture with improved work function modulation |
Nov. 3, 2009 |
| 7595234 |
Fabricating method for a metal oxide semiconductor transistor |
Sep. 29, 2009 |
| 7592222 |
Method of fabricating flash memory device |
Sep. 22, 2009 |
| 7582502 |
Method for manufacturing back side illumination image sensor |
Sep. 1, 2009 |
| 7569457 |
Method of fabricating semiconductor device |
Aug. 4, 2009 |
| 7563663 |
Method of manufacturing semiconductor device with offset sidewall structure |
Jul. 21, 2009 |
| 7550357 |
Semiconductor device and fabricating method thereof |
Jun. 23, 2009 |
| 7550351 |
Structure and method for creation of a transistor |
Jun. 23, 2009 |
| 7547592 |
PMOS depletable drain extension made from NMOS dual depletable drain extensions |
Jun. 16, 2009 |
| 7544561 |
Electron mobility enhancement for MOS devices with nitrided polysilicon re-oxidation |
Jun. 9, 2009 |
| 7534677 |
Method of fabricating a dual gate oxide |
May. 19, 2009 |
| 7504295 |
Methods for fabricating dynamic random access memory cells having laterally offset storage nodes |
Mar. 17, 2009 |
| 7473595 |
Method for decreasing PN junction leakage current of dynamic random access memory |
Jan. 6, 2009 |
| 7465623 |
Methods for fabricating a semiconductor device on an SOI substrate |
Dec. 16, 2008 |
| 7432144 |
Method for forming a transistor for reducing a channel length |
Oct. 7, 2008 |
| 7419863 |
Fabrication of semiconductor structure in which complementary field-effect transistors each have hypoabrupt body dopant distribution below at least one source/drain zone |
Sep. 2, 2008 |
| 7419867 |
CMOS gate structure comprising predoped semiconductor gate material with improved uniformity of dopant distribution and method of forming the structure |
Sep. 2, 2008 |
| 7402485 |
Method of forming a semiconductor device |
Jul. 22, 2008 |
| 7399670 |
Methods of forming different gate structures in NMOS and PMOS regions and gate structures so formed |
Jul. 15, 2008 |
| 7396717 |
Method of forming a MOS transistor |
Jul. 8, 2008 |
| 7390719 |
Method of manufacturing a semiconductor device having a dual gate structure |
Jun. 24, 2008 |
| 7364972 |
Semiconductor device |
Apr. 29, 2008 |
| 7358131 |
Methods of forming SRAM constructions |
Apr. 15, 2008 |
| 7332389 |
Selective polysilicon stud growth |
Feb. 19, 2008 |
| 7329570 |
Method for manufacturing a semiconductor device |
Feb. 12, 2008 |
| 7314805 |
Method for fabricating semiconductor device |
Jan. 1, 2008 |
| 7285449 |
Semiconductor device manufacture method including process of implanting impurity into gate electrode independently from source /drain and semiconductor device manufactured by the method |
Oct. 23, 2007 |
| 7282403 |
Temperature stable metal nitride gate electrode |
Oct. 16, 2007 |
| 7276407 |
Method for fabricating semiconductor device |
Oct. 2, 2007 |
| 7265011 |
Method of manufacturing a transistor |
Sep. 4, 2007 |
| 7259054 |
Method of manufacturing a semiconductor device that includes a process for forming a high breakdown voltage field effect transistor |
Aug. 21, 2007 |
| 7253050 |
Transistor device and method of manufacture thereof |
Aug. 7, 2007 |
| 7229870 |
Methods of fabricating semiconductor devices |
Jun. 12, 2007 |
| 7220637 |
Method of manufacturing semiconductor device with offset sidewall structure |
May. 22, 2007 |
| 7221009 |
Semiconductor device |
May. 22, 2007 |
| 7144767 |
NFETs using gate induced stress modulation |
Dec. 5, 2006 |
| 7132340 |
Application of post-pattern resist trim for reducing pocket-shadowing in SRAMs |
Nov. 7, 2006 |
| 7112480 |
Method and structure for a low voltage CMOS integrated circuit incorporating higher-voltage devices |
Sep. 26, 2006 |
| 7098146 |
Semiconductor device having patterned SOI structure and method for fabricating the same |
Aug. 29, 2006 |
| 7098099 |
Semiconductor device having optimized shallow junction geometries and method for fabrication thereof |
Aug. 29, 2006 |
| 7078303 |
Method for manufacturing semiconductor device having thick insulating layer under gate side walls |
Jul. 18, 2006 |
| 7067370 |
Method of manufacturing a MOS transistor of a semiconductor device |
Jun. 27, 2006 |
| 7063991 |
Methods of determining characteristics of doped regions on device wafers, and system for accomplishing same |
Jun. 20, 2006 |
| 7064026 |
Semiconductor device having shared contact and fabrication method thereof |
Jun. 20, 2006 |
| 7056798 |
Semiconductor device, method for manufacturing the same, and liquid jet apparatus |
Jun. 6, 2006 |
| 7045427 |
Polysilicon gate doping level variation for reduced leakage current |
May. 16, 2006 |
| 7045412 |
Field-effect type semiconductor device for power amplifier |
May. 16, 2006 |
| 7041549 |
Method for manufacturing semiconductor device |
May. 9, 2006 |
| 6953732 |
Method of manufacturing a semiconductor device including a mosfet with nitride sidewalls |
Oct. 11, 2005 |
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