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Class Information
Number: 438/221
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Including isolation structure > Dielectric isolation formed by grooving and refilling with dielectric material
Description: Process for making complementary insulated gate field effect transistors wherein lateral isolation means is provided by forming a recess into the semiconductor substrate and refilling the recess at least in part with electrically insulative material.










Sub-classes under this class:

Class Number Class Name Patents
438/223 Having well structure of opposite conductivity type 187
438/222 With epitaxial semiconductor layer formation 218


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8710569 Semiconductor device and manufacturing method thereof Apr. 29, 2014
8692266 Circuit substrate structure Apr. 8, 2014
8685799 RRAM structure at STI with Si-based selector Apr. 1, 2014
8685830 Method of filling shallow trenches Apr. 1, 2014
8679938 Shallow trench isolation for device including deep trench capacitors Mar. 25, 2014
8673724 Methods of fabricating semiconductor devices Mar. 18, 2014
8647935 Buried oxidation for enhanced mobility Feb. 11, 2014
8637935 Semiconductor device including embedded isolation regions and method for forming the same Jan. 28, 2014
8637370 Integration of trench MOS with low voltage integrated circuits Jan. 28, 2014
8618626 Trench Schottky rectifier device and method for manufacturing the same Dec. 31, 2013
8609510 Replacement metal gate diffusion break formation Dec. 17, 2013
8586429 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Nov. 19, 2013
8569839 Semiconductor device and manufacturing method thereof Oct. 29, 2013
8557667 Spacer for a gate electrode having tensile stress and a method of forming the same Oct. 15, 2013
8552524 Semiconductor component with trench insulation and corresponding production method Oct. 8, 2013
8546268 Manufacturing integrated circuit components having multiple gate oxidations Oct. 1, 2013
8546212 Semiconductor device and fabricating method thereof Oct. 1, 2013
8536019 Semiconductor devices having encapsulated isolation regions and related fabrication methods Sep. 17, 2013
8530286 Low power semiconductor transistor structure and method of fabrication thereof Sep. 10, 2013
8497175 Method of fabricating FinFET devices Jul. 30, 2013
8492251 Method of forming a thin layer structure Jul. 23, 2013
8486810 Method for fabricating a substrate provided with two active areas with different semiconductor materials Jul. 16, 2013
8486818 Semiconductor devices including buried gate electrodes and isolation layers and methods of forming semiconductor devices including buried gate electrodes and isolation layers using self aligne Jul. 16, 2013
8466496 Selective partial gate stack for improved device isolation Jun. 18, 2013
8460992 Semiconductor device and method of manufacturing the same Jun. 11, 2013
8450170 Semiconductor memory device and method of forming the same May. 28, 2013
8450180 Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices May. 28, 2013
8440533 Self-aligned contact for replacement metal gate and silicide last processes May. 14, 2013
8431454 Fabricating process of circuit substrate and circuit substrate structure Apr. 30, 2013
8415214 STI silicon nitride cap for flat FEOL topology Apr. 9, 2013
8409946 Methods of forming field effect transistors, pluralities of field effect transistors, and DRAM circuitry comprising a plurality of individual memory cells Apr. 2, 2013
8404537 Method of manufacturing semiconductor device Mar. 26, 2013
8394689 Semiconductor memory device with stacked gate including charge storage layer and control gate and method of manufacturing the same Mar. 12, 2013
8389353 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming Mar. 5, 2013
8384188 Semiconductor device and fabrication method thereof Feb. 26, 2013
8362558 Low on-resistance lateral double-diffused MOS device Jan. 29, 2013
8349699 Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry Jan. 8, 2013
8318583 Method of forming isolation structure of semiconductor device Nov. 27, 2012
8299546 Semiconductor devices with vertical extensions for lateral scaling Oct. 30, 2012
8288752 Phase change memory device capable of reducing disturbance and method of manufacturing the same Oct. 16, 2012
8273620 Semiconductor integrated circuit device and related fabrication method Sep. 25, 2012
8247279 Method of fabricating semiconductor device using epitaxial growth inhibiting layers Aug. 21, 2012
8242564 Semiconductor device with photonics Aug. 14, 2012
8241984 Semiconductor device and method for manufacturing the same Aug. 14, 2012
8236638 Shallow trench isolation for SOI structures combining sidewall spacer and bottom liner Aug. 7, 2012
8236640 Method of fabricating a semiconductor device having gate finger elements extended over a plurality of isolation regions formed in the source and drain regions Aug. 7, 2012
8222068 Method for manufacturing image sensor Jul. 17, 2012
8222101 Method of fabricating a MOS transistor having a gate insulation layer with a lateral portion and a vertical portion Jul. 17, 2012
8222102 Methods of forming field effect transistors, pluralities of field effect transistors, and DRAM circuitry comprising a plurality of individual memory cells Jul. 17, 2012
8222147 Semiconductor device with stop layers and fabrication method using ceria slurry Jul. 17, 2012

1 2 3 4 5 6 7 8 9 10 11










 
 
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