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Class Information
Number: 438/219
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Including isolation structure > Total dielectric isolation
Description: Process for making complementary insulated gate field effect transistors in which at least one of the insulated gate complementary field effect transistors is fully electrically isolated by dielectric insulative material from laterally adjacent semiconductive regions.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7625811 Method for producing distinct first and second active semi-conducting zones and use thereof for fabricating C-MOS structures Dec. 1, 2009
7553741 Manufacturing method of semiconductor device Jun. 30, 2009
7510926 Technique for providing stress sources in MOS transistors in close proximity to a channel region Mar. 31, 2009
7485521 Self-aligned dual stressed layers for NFET and PFET Feb. 3, 2009
7396715 Semiconductor device and manufacturing method of the same Jul. 8, 2008
7279769 Semiconductor device and manufacturing method thereof Oct. 9, 2007
7262486 SOI substrate and method for manufacturing the same Aug. 28, 2007
7253068 Dual SOI film thickness for body resistance control Aug. 7, 2007
7247543 Decoupling capacitor Jul. 24, 2007
7235460 Method of forming active and isolation areas with split active patterning Jun. 26, 2007
7205190 Semiconductor device fabrication method Apr. 17, 2007
7202125 Low-voltage, multiple thin-gate oxide and low-resistance gate electrode Apr. 10, 2007
7189606 Method of forming fully-depleted (FD) SOI MOSFET access transistor Mar. 13, 2007
7172914 Method of making uniform oxide layer Feb. 6, 2007
7135365 Method of manufacturing MOS transistors Nov. 14, 2006
7115463 Patterning SOI with silicon mask to create box at different depths Oct. 3, 2006
7075149 Semiconductor device and its manufacturing method Jul. 11, 2006
7060549 SRAM devices utilizing tensile-stressed strain films and methods for fabricating the same Jun. 13, 2006
7052948 Film or layer made of semi-conductive material and method for producing said film or layer May. 30, 2006
7053451 Semiconductor device having impurity region under isolation region May. 30, 2006
7049677 Low cost dielectric isolation method for integration of vertical power MOSFET and lateral driver devices May. 23, 2006
7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit Apr. 4, 2006
7005342 Method to fabricate surface p-channel CMOS Feb. 28, 2006
6977204 Method for forming contact plug having double doping distribution in semiconductor device Dec. 20, 2005
6964883 Bi-directional silicon controlled rectifier for electrostatic discharge protection Nov. 15, 2005
6958266 Semiconductor device, method of manufacturing same and method of designing same Oct. 25, 2005
6955957 Method of forming a floating gate in a flash memory device Oct. 18, 2005
6921688 Method of and apparatus for integrating flash EPROM and SRAM cells on a common substrate Jul. 26, 2005
6900108 High temperature sensors utilizing doping controlled, dielectrically isolated beta silicon carbide (SiC) sensing elements on a specifically selected high temperature force collecting membrane May. 31, 2005
6887772 Structures of high voltage device and low voltage device, and method of manufacturing the same May. 3, 2005
6876054 Integrable DC/AC voltage transformer/isolator and ultra-large-scale circuit incorporating the same Apr. 5, 2005
6867086 Multi-step deposition and etch back gap fill process Mar. 15, 2005
6830977 METHODS OF FORMING AN ISOLATION TRENCH IN A SEMICONDUCTOR, METHODS OF FORMING AN ISOLATION TRENCH IN A SURFACE OF A SILICON WAFER, METHODS OF FORMING AN ISOLATION TRENCH-ISOLATED TRANSISTOR, T Dec. 14, 2004
6809014 Method to fabricate surface p-channel CMOS Oct. 26, 2004
6777770 Films deposited at glancing incidence for multilevel metallization Aug. 17, 2004
6777772 Semiconductor device having improved trench structure Aug. 17, 2004
6767781 Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask Jul. 27, 2004
6764921 Semiconductor device and method for fabricating the same Jul. 20, 2004
6764892 Device and method of low voltage SCR protection for high voltage failsafe ESD applications Jul. 20, 2004
6750116 Method for fabricating asymmetric inner structure in contacts or trenches Jun. 15, 2004
6734524 Electronic component and method of manufacturing same May. 11, 2004
6716691 Self-aligned shallow trench isolation process having improved polysilicon gate thickness control Apr. 6, 2004
6706580 Semiconductor memory of good retention and its manufacture Mar. 16, 2004
6639296 Semiconductor device and method of manufacturing the same Oct. 28, 2003
6633073 Method and apparatus for isolating circuits using deep substrate n-well Oct. 14, 2003
6603174 Semiconductor device and manufacturing method thereof Aug. 5, 2003
6576959 Device and method of low voltage SCR protection for high voltage failsafe ESD applications Jun. 10, 2003
6569729 Method of fabricating three dimensional CMOSFET devices for an embedded DRAM application May. 27, 2003
6566223 High voltage integrated switching devices on a bonded and trenched silicon substrate May. 20, 2003
6562694 Method of manufacturing a semiconductor device comprising semiconductor elements formed in a toplayer of a silicon wafer situated on a buried insulating layer May. 13, 2003

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