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Class Information
Number: 438/218
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Including isolation structure
Description: Process for making complementary field effect transistors having a structure serving to at least partially electrically isolate the semiconductive region in which one transistor is formed from laterally adjacent semiconductive regions.


Sub-classes under this class:

Class Number Class Name Patents
438/221 Dielectric isolation formed by grooving and refilling with dielectric material 356
438/220 Isolation by pn junction only 100
438/225 Recessed oxide formed by localized oxidation (i.e., locos) 167
438/219 Total dielectric isolation 91


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
7625776 Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon Dec. 1, 2009
7626242 Shallow trench isolation process utilizing differential liners Dec. 1, 2009
7598142 CMOS device with dual-epi channels and self-aligned contacts Oct. 6, 2009
7585723 Method for fabricating capacitor Sep. 8, 2009
7575969 Buried layer and method Aug. 18, 2009
7576405 Semiconductor integrated circuit for reducing leak current through MOS transistors Aug. 18, 2009
7569445 Semiconductor device with constricted current passage Aug. 4, 2009
7560328 Strained Si on multiple materials for bulk or SOI substrates Jul. 14, 2009
7556997 Method of manufacturing semiconductor device having impurity region under isolation region Jul. 7, 2009
7553721 Flash memory devices and methods of fabricating the same Jun. 30, 2009
7553741 Manufacturing method of semiconductor device Jun. 30, 2009
7547641 Super hybrid SOI CMOS devices Jun. 16, 2009
7537989 Method for manufacturing SOI substrate May. 26, 2009
7514749 Semiconductor device and a method of manufacturing the same Apr. 7, 2009
7514313 Process of forming an electronic device including a seed layer and a semiconductor layer selectively formed over the seed layer Apr. 7, 2009
7514312 Method of manufacturing semiconductor device Apr. 7, 2009
7510943 Semiconductor devices and methods of manufacture thereof Mar. 31, 2009
7485909 Semiconductor device and method of manufacturing the same Feb. 3, 2009
7485524 MOSFETs comprising source/drain regions with slanted upper surfaces, and method for fabricating the same Feb. 3, 2009
7485521 Self-aligned dual stressed layers for NFET and PFET Feb. 3, 2009
7476581 Method of manufacturing semiconductor device having dual gate electrode Jan. 13, 2009
7470582 Method of manufacturing semiconductor device having impurity region under isolation region Dec. 30, 2008
7465623 Methods for fabricating a semiconductor device on an SOI substrate Dec. 16, 2008
7445979 Method of fabricating isolated semiconductor devices in epi-less substrate Nov. 4, 2008
7442630 Method for fabricating forward and reverse blocking devices Oct. 28, 2008
7442601 Stress enhanced CMOS circuits and methods for their fabrication Oct. 28, 2008
7439122 Method of manufacturing semiconductor device having improved RESURF Trench isolation and method of evaluating manufacturing method Oct. 21, 2008
7439131 Flash memory device having resistivity measurement pattern and method of forming the same Oct. 21, 2008
7432148 Shallow trench isolation by atomic-level silicon reconstruction Oct. 7, 2008
7419864 Semiconductor device and method of manufacturing the same Sep. 2, 2008
7396715 Semiconductor device and manufacturing method of the same Jul. 8, 2008
7390710 Protection of tunnel dielectric using epitaxial silicon Jun. 24, 2008
7390719 Method of manufacturing a semiconductor device having a dual gate structure Jun. 24, 2008
7381609 Method and structure for controlling stress in a transistor channel Jun. 3, 2008
7371632 Semiconductor device having high-voltage transistor and PIP capacitor and method for fabricating the same May. 13, 2008
7364957 Method and apparatus for semiconductor device with improved source/drain junctions Apr. 29, 2008
7364962 Shallow trench isolation process utilizing differential liners Apr. 29, 2008
7361540 Method of reducing noise disturbing a signal in an electronic device Apr. 22, 2008
7354812 Multiple-depth STI trenches in integrated circuit fabrication Apr. 8, 2008
7341904 Capacitorless 1-transistor DRAM cell and fabrication method Mar. 11, 2008
7326608 Fin field effect transistor and method of manufacturing the same Feb. 5, 2008
7323392 High performance transistor with a highly stressed channel Jan. 29, 2008
7320910 Semiconductor device Jan. 22, 2008
7316957 Semiconductor device and method for manufacturing the same Jan. 8, 2008
7312124 Method of manufacturing a semiconductor device Dec. 25, 2007
7309636 High-voltage metal-oxide-semiconductor device and method of manufacturing the same Dec. 18, 2007
7303938 Gated isolation structure for imagers Dec. 4, 2007
7297585 Method of manufacturing semiconductor device having impurity region under isolation region Nov. 20, 2007
7291527 Work function control of metals Nov. 6, 2007
7285453 Triple well structure and method for manufacturing the same Oct. 23, 2007

1 2 3 4 5


 
 
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