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Class Information
Number: 438/216
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Gate insulator structure constructed of diverse dielectrics (e.g., mnos, etc.) or of nonsilicon compound
Description: Process for making complementary insulated gate field effect transistors wherein the gate dielectric insulator of at least one of the transistors is constructed of plural diverse dielectrics (e.g., nitride and oxide layers, etc.) or of a nonsilicon containing dielectric compound.

Patents under this class:
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Patent Number Title Of Patent Date Issued
7462532 Method of fabricating high voltage metal oxide semiconductor device Dec. 9, 2008
7452767 Selective implementation of barrier layers to achieve threshold voltage control in CMOS device fabrication with high k dielectrics Nov. 18, 2008
7435640 Method of fabricating gate structure Oct. 14, 2008
7436036 PMOS transistor of semiconductor device, semiconductor device comprising the same, and method for manufacturing the same Oct. 14, 2008
7432216 Semiconductor device and manufacturing method thereof Oct. 7, 2008
7432147 Method of manufacturing semiconductor device Oct. 7, 2008
7432139 Methods for forming dielectrics and metal electrodes Oct. 7, 2008
7429506 Process of making a III-V compound semiconductor heterostructure MOSFET Sep. 30, 2008
7427537 Semiconductor integrated circuit device and method for manufacturing the same Sep. 23, 2008
7422944 Semiconductor device Sep. 9, 2008
7416933 Methods of enabling polysilicon gate electrodes for high-k gate dielectrics Aug. 26, 2008
7411305 Interconnect structure encased with high and low k interlevel dielectrics Aug. 12, 2008
7410857 Semiconductor memory device and manufacturing method thereof Aug. 12, 2008
7407850 N+ poly on high-k dielectric for semiconductor devices Aug. 5, 2008
7405119 Structure and method for a sidewall SONOS memory device Jul. 29, 2008
7405120 Method of forming a gate insulator and thin film transistor incorporating the same Jul. 29, 2008
7402490 Charge-trapping memory device and methods for operating and manufacturing the cell Jul. 22, 2008
7399668 Method for making electronic devices having a dielectric layer surface treatment Jul. 15, 2008
7396748 Semiconductor device includes gate insulating film having a high dielectric constant Jul. 8, 2008
7390719 Method of manufacturing a semiconductor device having a dual gate structure Jun. 24, 2008
7387927 Reducing oxidation under a high K gate dielectric Jun. 17, 2008
7381608 Method for making a semiconductor device with a high-k gate dielectric and a metal gate electrode Jun. 3, 2008
7381619 Dual work-function metal gates Jun. 3, 2008
7374998 Selective incorporation of charge for transistor channels May. 20, 2008
7374991 SONOS memory device having side gate stacks and method of manufacturing the same May. 20, 2008
7374635 Forming method and forming system for insulation film May. 20, 2008
7371633 Dielectric layer for semiconductor device and method of manufacturing the same May. 13, 2008
7364972 Semiconductor device Apr. 29, 2008
7365403 Semiconductor topography including a thin oxide-nitride stack and method for making the same Apr. 29, 2008
7351626 Method for controlling defects in gate dielectrics Apr. 1, 2008
7351632 Semiconductor CMOS devices and methods with NMOS high-k dielectric formed prior to core PMOS silicon oxynitride dielectric formation using direct nitridation of silicon Apr. 1, 2008
7352000 Organic thin film transistor with polymeric interface Apr. 1, 2008
7348240 Method for forming metal line in flash memory device Mar. 25, 2008
7348644 Semiconductor device and method of manufacturing semiconductor device Mar. 25, 2008
7335548 Method of manufacturing metal-oxide-semiconductor transistor Feb. 26, 2008
7323381 Semiconductor device and manufacturing method thereof Jan. 29, 2008
7312494 Lanthanide oxide / hafnium oxide dielectric layers Dec. 25, 2007
7312499 Semiconductor storage device and manufacturing method therefor, semiconductor device, portable electronic equipment and IC card Dec. 25, 2007
7309629 Method for fabricating semiconductor device Dec. 18, 2007
7306998 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect Dec. 11, 2007
7306985 Method for manufacturing semiconductor device including heat treating with a flash lamp Dec. 11, 2007
7300838 Semiconductor device and method of manufacturing semiconductor device Nov. 27, 2007
7297586 Gate dielectric and metal gate integration Nov. 20, 2007
7297587 Composite gate structure in an integrated circuit Nov. 20, 2007
7268047 Semiconductor device and method for manufacturing the same Sep. 11, 2007
7259066 One-transistor composite-gate memory Aug. 21, 2007
7259433 Non-volatile semiconductor memory device and method for producing same Aug. 21, 2007
7256087 Techniques for improving negative bias temperature instability (NBTI) lifetime of field effect transistors Aug. 14, 2007
7253061 Method of forming a gate insulator in group III-V nitride semiconductor devices Aug. 7, 2007
7253046 Semiconductor memory device and manufacturing method thereof Aug. 7, 2007

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