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Class Information
Number: 438/212
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having insulated gate (e.g., igfet, misfet, mosfet, etc.) > Complementary insulated gate field effect transistors (i.e., cmos) > Vertical channel
Description: Process for making complementary insulated gate field effect transistors wherein the active channel region of at least one of the transistors is configured to provide, at least in part, a vertically conductive pathway between source and drain regions.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618865 |
Method in the fabrication of a monolithically integrated vertical device on an SOI substrate |
Nov. 17, 2009 |
| 7611936 |
Method to control uniformity/composition of metal electrodes, silicides on topography and devices using this method |
Nov. 3, 2009 |
| 7612431 |
Trench polysilicon diode |
Nov. 3, 2009 |
| 7605034 |
Integrated circuit memory cells and methods of forming |
Oct. 20, 2009 |
| 7588977 |
Method of fabricating a MOS field effect transistor having plurality of channels |
Sep. 15, 2009 |
| 7585705 |
Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop |
Sep. 8, 2009 |
| 7585711 |
Semiconductor-on-insulator (SOI) strained active area transistor |
Sep. 8, 2009 |
| 7582519 |
Method of forming a trench structure having one or more diodes embedded therein adjacent a PN junction |
Sep. 1, 2009 |
| 7569489 |
High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching |
Aug. 4, 2009 |
| 7566619 |
Methods of forming integrated circuit devices having field effect transistors of different types in different device regions |
Jul. 28, 2009 |
| 7563665 |
Semiconductor device and method for manufacturing semiconductor device |
Jul. 21, 2009 |
| 7544545 |
Trench polysilicon diode |
Jun. 9, 2009 |
| 7544570 |
Vertical-type metal insulator semiconductor field effect transistor device, and production method for manufacturing such transistor device |
Jun. 9, 2009 |
| 7541640 |
Vertical field-effect transistor and method of forming the same |
Jun. 2, 2009 |
| 7534686 |
Multi-structured Si-fin and method of manufacture |
May. 19, 2009 |
| 7531395 |
Methods of forming a layer comprising epitaxial silicon, and methods of forming field effect transistors |
May. 12, 2009 |
| 7528016 |
Semiconductor device and manufacturing method thereof |
May. 5, 2009 |
| 7528022 |
Method of forming fin field effect transistor using damascene process |
May. 5, 2009 |
| 7521322 |
Vertical transistors |
Apr. 21, 2009 |
| 7518183 |
Semiconductor device |
Apr. 14, 2009 |
| 7514324 |
Selective epitaxy in vertical integrated circuit |
Apr. 7, 2009 |
| 7482218 |
Low-capacitance input/output and electrostatic discharge circuit for protecting an integrated circuit from electrostatic discharge |
Jan. 27, 2009 |
| 7482285 |
Dual epitaxial layer for high voltage vertical conduction power MOSFET devices |
Jan. 27, 2009 |
| 7482645 |
Method and structure for making a top-side contact to a substrate |
Jan. 27, 2009 |
| 7473946 |
CMOS structure and method including multiple crystallographic planes |
Jan. 6, 2009 |
| 7473596 |
Methods of forming memory cells |
Jan. 6, 2009 |
| 7465622 |
Method for making a raised vertical channel transistor device |
Dec. 16, 2008 |
| 7462532 |
Method of fabricating high voltage metal oxide semiconductor device |
Dec. 9, 2008 |
| 7456439 |
Vertical thyristor-based memory with trench isolation and its method of fabrication |
Nov. 25, 2008 |
| 7436022 |
Enhancing Schottky breakdown voltage (BV) without affecting an integrated MOSFET-Schottky device layout |
Oct. 14, 2008 |
| 7432134 |
Semiconductor device and method of fabricating the same |
Oct. 7, 2008 |
| 7432145 |
Power semiconductor device with a base region and method of manufacturing same |
Oct. 7, 2008 |
| 7429523 |
Method of forming schottky diode with charge balance structure |
Sep. 30, 2008 |
| 7374990 |
Vertical wrap-around-gate field-effect-transistor for high density, low voltage logic and memory array |
May. 20, 2008 |
| 7375408 |
Fabricating method of a high voltage metal oxide semiconductor device |
May. 20, 2008 |
| 7368353 |
Trench power MOSFET with reduced gate resistance |
May. 6, 2008 |
| 7364997 |
Methods of forming integrated circuitry and methods of forming local interconnects |
Apr. 29, 2008 |
| 7352034 |
Semiconductor structures integrating damascene-body FinFET's and planar devices on a common substrate and methods for forming such semiconductor structures |
Apr. 1, 2008 |
| 7341896 |
Method of manufacturing a vertical MOS transistor |
Mar. 11, 2008 |
| 7332386 |
Methods of fabricating fin field transistors |
Feb. 19, 2008 |
| 7323380 |
Single transistor vertical memory gain cell |
Jan. 29, 2008 |
| 7306984 |
Method of manufacture of a semiconductor integrated circuit device including a plurality of columnar laminates having different spacing in different directions |
Dec. 11, 2007 |
| 7291533 |
Method for production of trench DRAM cells and a trench DRAM cell array with fin field-effect transistors with a curved channel (CFET--curved fets) |
Nov. 6, 2007 |
| 7288815 |
Semiconductor device and manufacturing method thereof |
Oct. 30, 2007 |
| 7276742 |
Compound semiconductor light emitting device and its manufacturing method |
Oct. 2, 2007 |
| 7271048 |
Method for manufacturing trench MOSFET |
Sep. 18, 2007 |
| 7268032 |
Termination for trench MIS device having implanted drain-drift region |
Sep. 11, 2007 |
| 7259052 |
Manufacture of a semiconductor integrated circuit device including a pluarality of a columnar laminates having different spacing in different directions |
Aug. 21, 2007 |
| 7256086 |
Trench lateral power MOSFET and a method of manufacturing the same |
Aug. 14, 2007 |
| 7241654 |
Vertical NROM NAND flash memory array |
Jul. 10, 2007 |
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