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Class Information
Number: 438/181
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having schottky gate (e.g., mesfet, hemt, etc.) > Self-aligned > Doping of semiconductive region
Description: Process wherein a semiconductive region of the substrate is changed in electrical properties by introduction of an electrically active impurity.

Sub-classes under this class:

Class Number Class Name Patents
438/183 Dummy gate 286
438/182 T-gate 157
438/184 Utilizing gate sidewall structure 155

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685806 Silicon-on-insulator substrate with built-in substrate junction Apr. 1, 2014
8481378 Effecting selectivity of silicon or silicon-germanium deposition on a silicon or silicon-germanium substrate by doping Jul. 9, 2013
8481377 Method for manufacturing a semiconductor device with impurity doped oxide semiconductor Jul. 9, 2013
8476154 Method of making a charge trapping non-volatile semiconductor memory device Jul. 2, 2013
8445351 Floating-gate nonvolatile semiconductor memory device and method of making May. 21, 2013
8325516 Semiconductor device with split gate memory cell and fabrication method thereof Dec. 4, 2012
8324014 Process for depositing boron compounds by CVD or PVD Dec. 4, 2012
8211322 Method of forming a metal layer pattern having a nanogap and method of manufacturing a molecule-sized device using the same Jul. 3, 2012
8123964 Image sensor and method for fabricating the same Feb. 28, 2012
8110456 Method for making a self aligning memory device Feb. 7, 2012
8105889 Methods of fabricating transistors including self-aligned gate electrodes and source/drain regions Jan. 31, 2012
8093107 Thyristor semiconductor memory and method of manufacture Jan. 10, 2012
8080452 Effecting selectivity of silicon or silicon-germanium deposition on a silicon or silicon-germanium substrate by doping Dec. 20, 2011
7955918 Robust transistors with fluorine treatment Jun. 7, 2011
7902008 Methods for fabricating a stressed MOS device Mar. 8, 2011
7902013 Method of forming a semiconductor die with reduced RF attenuation Mar. 8, 2011
7875915 Integrated circuit comprising a photodiode of the floating substrate type and corresponding fabrication process Jan. 25, 2011
7799590 Semiconductor device and manufacturing method thereof Sep. 21, 2010
7754551 Method for making very low V.sub.t metal-gate/high-.kappa. CMOSFETs using self-aligned low temperature shallow junctions Jul. 13, 2010
7727827 Method of forming a semiconductor structure Jun. 1, 2010
7645652 CMOS image sensor and method for fabricating the same Jan. 12, 2010
7608192 Image sensor and method for fabricating the same Oct. 27, 2009
7605017 Method of manufacturing a semiconductor device and products made thereby Oct. 20, 2009
7592212 Methods for determining a dose of an impurity implanted in a semiconductor substrate Sep. 22, 2009
7585714 Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus Sep. 8, 2009
7550358 MEMS device including a laterally movable portion with piezo-resistive sensing elements and electrostatic actuating elements on trench side walls, and methods for producing the same Jun. 23, 2009
7537971 Method for fabricating CMOS image sensor May. 26, 2009
7528410 Semiconductor device and method for manufacturing the same May. 5, 2009
7501317 Method of manufacturing semiconductor device Mar. 10, 2009
7432144 Method for forming a transistor for reducing a channel length Oct. 7, 2008
7348227 Semiconductor device and manufacturing method thereof Mar. 25, 2008
7244642 Method to obtain fully silicided gate electrodes Jul. 17, 2007
7238577 Method of manufacturing self-aligned n and p type stripes for a superjunction device Jul. 3, 2007
7226824 Nitrogen controlled growth of dislocation loop in stress enhanced transistor Jun. 5, 2007
7198967 Active matrix type semiconductor display device Apr. 3, 2007
7160762 Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus Jan. 9, 2007
7157321 Semiconductor device and method for manufacturing the same Jan. 2, 2007
7122408 Photodiode with ultra-shallow junction for high quantum efficiency CMOS image sensor and method of formation Oct. 17, 2006
7063991 Methods of determining characteristics of doped regions on device wafers, and system for accomplishing same Jun. 20, 2006
6960498 Doping method, doping apparatus, and control system for doping apparatus Nov. 1, 2005
6881616 System for forming a semiconductor device and method thereof including implanting through a L shaped spacer to form source and drain regions Apr. 19, 2005
6872604 Method of fabricating a light emitting device Mar. 29, 2005
6861320 Method of making starting material for chip fabrication comprising a buried silicon nitride layer Mar. 1, 2005
6773972 Memory cell with transistors having relatively high threshold voltages in response to selective gate doping Aug. 10, 2004
6638801 Semiconductor device and its manufacturing method Oct. 28, 2003
6613621 Methods of forming self-aligned contact pads using a damascene gate process Sep. 2, 2003
6593194 Metal-insulator-semiconductor field effect transistor having an oxidized aluminum nitride gate insulator formed on a gallium nitride or silicon substrate, and method of making the same Jul. 15, 2003
6562671 Semiconductor display device and manufacturing method thereof May. 13, 2003
6558995 Holographic, laser-induced fabrication of indium nitride quantum wires and quantum dots May. 6, 2003
6555844 Semiconductor device with minimal short-channel effects and low bit-line resistance Apr. 29, 2003

1 2 3

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