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Class Information
Number: 438/180
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Having schottky gate (e.g., mesfet, hemt, etc.) > Self-aligned
Description: Process for making a Schottky gate field effect transistor wherein a previously formed device feature is utilized to make device regions in the desired registration to the previously formed feature.

Sub-classes under this class:

Class Number Class Name Patents
438/181 Doping of semiconductive region 136

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
8647936 Junction field effect transistor with an epitaxially grown gate structure Feb. 11, 2014
8368128 Compact field effect transistor with counter-electrode and fabrication method Feb. 5, 2013
8168485 Semiconductor device making method May. 1, 2012
8110456 Method for making a self aligning memory device Feb. 7, 2012
8043906 Method of forming a III-nitride selective current carrying device including a contact in a recess Oct. 25, 2011
7737476 Metal-semiconductor field effect transistors (MESFETs) having self-aligned structures Jun. 15, 2010
7659155 Method of forming a transistor having gate and body in direct self-aligned contact Feb. 9, 2010
7638430 Method of forming contact plug of semiconductor device Dec. 29, 2009
7601569 Partially depleted SOI field effect transistor having a metallized source side halo region Oct. 13, 2009
7585706 Method of fabricating a semiconductor device Sep. 8, 2009
7432144 Method for forming a transistor for reducing a channel length Oct. 7, 2008
7419892 Semiconductor devices including implanted regions and protective layers and methods of forming the same Sep. 2, 2008
7285806 Semiconductor device having an active region formed from group III nitride Oct. 23, 2007
7247531 Field-effect-transistor multiplexing/demultiplexing architectures and methods of forming the same Jul. 24, 2007
7183150 Resist protect oxide structure of sub-micron salicide process Feb. 27, 2007
7157345 Source side injection storage device and method therefor Jan. 2, 2007
7141464 Method of fabricating T-type gate Nov. 28, 2006
7138313 Method for creating a self-aligned SOI diode by removing a polysilicon gate during processing Nov. 21, 2006
7101744 Method for forming self-aligned, dual silicon nitride liner for CMOS devices Sep. 5, 2006
7022562 Field-effect transistor with horizontal self-aligned gates and the production method therefor Apr. 4, 2006
6967129 Semiconductor device and fabrication method thereof Nov. 22, 2005
6939768 Method of forming self-aligned contacts Sep. 6, 2005
6872604 Method of fabricating a light emitting device Mar. 29, 2005
6849484 Method of manufacturing semiconductor device Feb. 1, 2005
6844225 Self-aligned mask formed utilizing differential oxidation rates of materials Jan. 18, 2005
6815274 Resist protect oxide structure of sub-micron salicide process Nov. 9, 2004
6777278 Methods of fabricating aluminum gallium nitride/gallium nitride high electron mobility transistors having a gate contact on a gallium nitride based cap segment Aug. 17, 2004
6773970 Method of producing a semiconductor device having improved gate structure Aug. 10, 2004
6770531 Adhesive material for programmable device Aug. 3, 2004
6689664 Transistor fabrication method Feb. 10, 2004
6613621 Methods of forming self-aligned contact pads using a damascene gate process Sep. 2, 2003
6602759 Shallow trench isolation for thin silicon/silicon-on-insulator substrates by utilizing polysilicon Aug. 5, 2003
6596554 Body-tied-to-source partially depleted SOI MOSFET Jul. 22, 2003
6469769 Manufacturing method of a liquid crystal display Oct. 22, 2002
6448120 Totally self-aligned transistor with tungsten gate Sep. 10, 2002
6440786 Boron-carbide and boron rich rhobohedral based transistors and tunnel diodes Aug. 27, 2002
6407434 Hexagonal architecture Jun. 18, 2002
6391696 Field effect transistor and method of manufacturing thereof May. 21, 2002
6358785 Method for forming shallow trench isolation structures Mar. 19, 2002
6344378 Field effect transistors, field emission apparatuses, thin film transistors, and methods of forming field effect transistors Feb. 5, 2002
6317174 TFT array substrate, liquid crystal display using TFT array substrate, and manufacturing method thereof Nov. 13, 2001
6274469 Process using a plug as a mask for a gate Aug. 14, 2001
6242293 Process for fabricating double recess pseudomorphic high electron mobility transistor structures Jun. 5, 2001
6200839 Methods of forming thin film transistors Mar. 13, 2001
6197668 Ferroelectric-enhanced tantalum pentoxide for dielectric material applications in CMOS devices Mar. 6, 2001
6198128 Method of manufacturing a semiconductor device, and semiconductor device Mar. 6, 2001
6140191 Method of making high performance MOSFET with integrated simultaneous formation of source/drain and gate regions Oct. 31, 2000
6117713 Method of producing a MESFET semiconductor device having a recessed gate structure Sep. 12, 2000
6114195 Manufacturing method of compound semiconductor field effect transistor Sep. 5, 2000
6093588 Process for fabricating a high voltage MOSFET Jul. 25, 2000

1 2

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