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Class Information
Number: 438/18
Name: Semiconductor device manufacturing: process > With measuring or testing > Electrical characteristic sensed > Utilizing integral test element
Description: Process wherein the electrical property is sensed utilizing a specific test structure integral to the semiconductor substrate and which has no other function in the completed device.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Patent Number Title Of Patent Date Issued
8709833 Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations Apr. 29, 2014
8704224 Semiconductor test structures Apr. 22, 2014
8691601 Semiconductor device and penetrating electrode testing method Apr. 8, 2014
8692246 Leakage measurement structure having through silicon vias Apr. 8, 2014
8680883 Time dependent dielectric breakdown (TDDB) test structure of semiconductor device and method of performing TDDB test using the same Mar. 25, 2014
8673655 Semiconductor package repair process Mar. 18, 2014
8674355 Integrated circuit test units with integrated physical and electrical test regions Mar. 18, 2014
8673668 Test structure for controlling the incorporation of semiconductor alloys in transistors comprising high-k metal gate electrode structures Mar. 18, 2014
8669124 Apparatus and method for molecule detection using nanopores Mar. 11, 2014
8645096 Deflection measuring system and method Feb. 4, 2014
8637894 Organic light-emitting display apparatus that prevents a thick organic insulating layer from lifting Jan. 28, 2014
8633039 Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Jan. 21, 2014
8623772 Method of forming patterns of semiconductor device Jan. 7, 2014
8623673 Structure and method for detecting defects in BEOL processing Jan. 7, 2014
8618826 Method and apparatus for de-embedding Dec. 31, 2013
8618827 Measurement of electrical and mechanical characteristics of low-K dielectric in a semiconductor device Dec. 31, 2013
8614589 Method of fabricating semiconductor device Dec. 24, 2013
8603840 Manufacturing method of semiconductor device Dec. 10, 2013
8604814 Tester and test apparatus including the same Dec. 10, 2013
8598579 Test structure for ILD void testing and contact resistance measurement in a semiconductor device Dec. 3, 2013
8593167 Semiconductor device test method and apparatus, and semiconductor device Nov. 26, 2013
8587037 Test structure to monitor the in-situ channel temperature of field effect transistors Nov. 19, 2013
8586981 Silicon-on-insulator ("SOI") transistor test structure for measuring body-effect Nov. 19, 2013
8586983 Semiconductor chip embedded with a test circuit Nov. 19, 2013
8581615 Method for checking alignment accuracy of thin film transistor including performing a close/open circuit test Nov. 12, 2013
8578305 Semiconductor devices having tensile and/or compressive strain and methods of manufacturing and design structure Nov. 5, 2013
8546154 Apparatus and method to inspect defect of semiconductor device Oct. 1, 2013
8546168 Method and apparatus for detecting nucleotides Oct. 1, 2013
8546904 Integrated circuit with temperature increasing element and electronic system having the same Oct. 1, 2013
8546854 Semiconductor device and method for manufacturing the same Oct. 1, 2013
8546802 Pick-and-place tool for packaging process Oct. 1, 2013
8532156 Semiconductor laser with test pads Sep. 10, 2013
8524513 Measuring floating body voltage in silicon-on-insulator (SOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) Sep. 3, 2013
8518721 Dopant marker for precise recess control Aug. 27, 2013
8507908 Probe and probe card Aug. 13, 2013
8502553 Semiconductor package test apparatus Aug. 6, 2013
8501505 Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Aug. 6, 2013
8501501 Measurement of a sample using multiple models Aug. 6, 2013
8497695 Semiconductor device with fault detection function Jul. 30, 2013
8481346 Method of analyzing iron concentration of boron-doped P-type silicon wafer and method of manufacturing silicon wafer Jul. 9, 2013
8476630 Methods of adding pads and one or more interconnect layers to the passivated topside of a wafer including connections to at least a portion of the integrated circuit pads thereon Jul. 2, 2013
8461022 Methods and apparatus for aligning a substrate in a process chamber Jun. 11, 2013
8455270 3D multiple die stacking Jun. 4, 2013
8450126 Semiconductor test pad structures May. 28, 2013
8450125 Methods of evaluating epitaxial growth and methods of forming an epitaxial layer May. 28, 2013
8445295 Semiconductor device and method for manufacturing the same May. 21, 2013
8445297 Method of fabricating a chip May. 21, 2013
8440475 Alignment calculation May. 14, 2013
8426232 Ultra-fast nucleic acid sequencing device and a method for making and using the same Apr. 23, 2013
8420411 Method for aligning wafer stack Apr. 16, 2013

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