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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6232156 |
Method of manufacturing a semiconductor device |
May. 15, 2001 |
| 6232158 |
Thin film transistor and a fabricating method thereof |
May. 15, 2001 |
| 6228693 |
Selected site, metal-induced, continuous crystallization method |
May. 8, 2001 |
| 6230068 |
Visualizing methods for dispatch and diagnosis of finite machines for semiconductor's manufacturing |
May. 8, 2001 |
| 6225152 |
Semiconductor device and fabrication method thereof |
May. 1, 2001 |
| 6221701 |
Insulated gate field effect transistor and its manufacturing method |
Apr. 24, 2001 |
| 6221702 |
Method of fabricating thin film transistor |
Apr. 24, 2001 |
| 6217357 |
Method of manufacturing two-power supply voltage compatible CMOS semiconductor device |
Apr. 17, 2001 |
| 6214652 |
Thin film transistors and method of forming thin film transistors |
Apr. 10, 2001 |
| 6210991 |
Metal contact scheme using selective silicon growth |
Apr. 3, 2001 |
| 6210996 |
Laser illumination system |
Apr. 3, 2001 |
| 6210997 |
Semiconductor device and method for manufacturing the same |
Apr. 3, 2001 |
| 6207481 |
Thin film transistor having a crystallization seed layer and a method for manufacturing thereof |
Mar. 27, 2001 |
| 6204101 |
Method of manufacturing semiconductor device |
Mar. 20, 2001 |
| 6204154 |
Semiconductor device and fabrication method thereof |
Mar. 20, 2001 |
| 6200837 |
Method of manufacturing thin film transistor |
Mar. 13, 2001 |
| 6197626 |
Method for fabricating semiconductor device |
Mar. 6, 2001 |
| 6194254 |
Semiconductor device and method for manufacturing the same |
Feb. 27, 2001 |
| 6194255 |
Method for manufacturing thin-film transistors |
Feb. 27, 2001 |
| 6190949 |
Silicon thin film, group of silicon single crystal grains and formation process thereof, and semiconductor device, flash memory cell and fabrication process thereof |
Feb. 20, 2001 |
| 6187616 |
Method for fabricating semiconductor device and heat treatment apparatus |
Feb. 13, 2001 |
| 6184068 |
Process for fabricating semiconductor device |
Feb. 6, 2001 |
| 6180439 |
Method for fabricating a semiconductor device |
Jan. 30, 2001 |
| 6177301 |
Method of fabricating thin film transistors for a liquid crystal display |
Jan. 23, 2001 |
| 6177302 |
Method of manufacturing a thin film transistor using multiple sputtering chambers |
Jan. 23, 2001 |
| 6174755 |
Methods of forming SOI insulator layers and methods of forming transistor devices |
Jan. 16, 2001 |
| 6174757 |
Method for producing semiconductor device |
Jan. 16, 2001 |
| 6171890 |
Method for manufacturing a semiconductor device |
Jan. 9, 2001 |
| 6168980 |
Semiconductor device and method for forming the same |
Jan. 2, 2001 |
| 6169014 |
Laser crystallization of thin films |
Jan. 2, 2001 |
| 6165810 |
Method of manufacturing semiconductor device and display device |
Dec. 26, 2000 |
| 6165824 |
Method of manufacturing a semiconductor device |
Dec. 26, 2000 |
| 6165876 |
Method of doping crystalline silicon film |
Dec. 26, 2000 |
| 6162667 |
Method for fabricating thin film transistors |
Dec. 19, 2000 |
| 6162704 |
Method of making semiconductor device |
Dec. 19, 2000 |
| 6160827 |
Laser irradiating device and laser irradiating method |
Dec. 12, 2000 |
| 6156590 |
Method for producing semiconductor device |
Dec. 5, 2000 |
| 6156627 |
Method of promoting crystallization of an amorphous semiconductor film using organic metal CVD |
Dec. 5, 2000 |
| 6156628 |
Semiconductor device and method of manufacturing the same |
Dec. 5, 2000 |
| 6153445 |
Method of manufacturing semiconductor device |
Nov. 28, 2000 |
| 6150191 |
Method of making an organic thin film transistor and article made by the method |
Nov. 21, 2000 |
| 6146929 |
Method for manufacturing semiconductor device using multiple steps continuously without exposing substrate to the atmosphere |
Nov. 14, 2000 |
| 6143591 |
Methods of forming SOI insulator layers, methods of forming transistor devices, and semiconductor devices and assemblies |
Nov. 7, 2000 |
| 6140165 |
Semiconductor device forming method |
Oct. 31, 2000 |
| 6140166 |
Method for manufacturing semiconductor and method for manufacturing semiconductor device |
Oct. 31, 2000 |
| 6140668 |
Silicon structures having an absorption layer |
Oct. 31, 2000 |
| 6136632 |
Active matrix substrate, method of producing an active matrix substrate, liquid crystal display device, and electronic equipment |
Oct. 24, 2000 |
| 6133073 |
Thin film semiconductor and method for manufacturing the same, semiconductor device and method for manufacturing the same |
Oct. 17, 2000 |
| 6133075 |
Semiconductor device and method of fabricating the same |
Oct. 17, 2000 |
| 6133076 |
Manufacturing method of semiconductor |
Oct. 17, 2000 |
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