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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).










Patents under this class:

Patent Number Title Of Patent Date Issued
6303411 Spatially resolved temperature measurement and irradiance control Oct. 16, 2001
6303415 Semiconductor device and method of fabricating same Oct. 16, 2001
6303416 Method to reduce plasma etch fluting Oct. 16, 2001
6300174 Liquid crystal panel having a thin film transistor for driver circuit and a method for fabricating thereof Oct. 9, 2001
6300175 Method for fabricating thin film transistor Oct. 9, 2001
6300176 Laser processing method Oct. 9, 2001
6294441 Method of manufacturing a semiconductor device Sep. 25, 2001
6291275 Thin film semiconductor and method for manufacturing the same, semiconductor device and method for manufacturing the same Sep. 18, 2001
6291345 Controlled-stress stable metallization for electronic and electromechanical devices Sep. 18, 2001
6287898 Thin film transistor manufacturing method Sep. 11, 2001
6287899 Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same Sep. 11, 2001
6287944 Polycrystalline semiconductor device and its manufacture method Sep. 11, 2001
6284577 MIS semiconductor device having an LDD structure and a manufacturing method therefor Sep. 4, 2001
6281057 Method of manufacturing a semiconductor device Aug. 28, 2001
6277680 Methods of forming SOI insulator layers, methods of forming transistor devices, and semiconductor devices and assemblies Aug. 21, 2001
6274414 Laser anneal method of a semiconductor layer Aug. 14, 2001
6271066 Semiconductor material and method for forming the same and thin film transistor Aug. 7, 2001
6271549 Process for fabricating a metal silicide layer of a semiconductor and apparatus Aug. 7, 2001
6265290 Method for fabricating a thin film transistor and a substrate and thin film transistor manufactured using the same Jul. 24, 2001
6261856 Method and system of laser processing Jul. 17, 2001
6261875 Transistor and process for fabricating the same Jul. 17, 2001
6255148 Polycrystal thin film forming method and forming system Jul. 3, 2001
6248606 Method of manufacturing semiconductor chips for display Jun. 19, 2001
6248675 Fabrication of field effect transistors having dual gates with gate dielectrics of high dielectric constant using lowered temperatures Jun. 19, 2001
6246070 Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same Jun. 12, 2001
6241817 Method for crystallizing amorphous layer Jun. 5, 2001
6242292 Method of producing a semiconductor device with overlapped scanned linear lasers Jun. 5, 2001
6239452 Self-aligned silicide gate technology for advanced deep submicron MOS device May. 29, 2001
6235563 Semiconductor device and method of manufacturing the same May. 22, 2001
6235614 Methods of crystallizing amorphous silicon layer and fabricating thin film transistor using the same May. 22, 2001
6232156 Method of manufacturing a semiconductor device May. 15, 2001
6232158 Thin film transistor and a fabricating method thereof May. 15, 2001
6228693 Selected site, metal-induced, continuous crystallization method May. 8, 2001
6230068 Visualizing methods for dispatch and diagnosis of finite machines for semiconductor's manufacturing May. 8, 2001
6225152 Semiconductor device and fabrication method thereof May. 1, 2001
6221701 Insulated gate field effect transistor and its manufacturing method Apr. 24, 2001
6221702 Method of fabricating thin film transistor Apr. 24, 2001
6217357 Method of manufacturing two-power supply voltage compatible CMOS semiconductor device Apr. 17, 2001
6214652 Thin film transistors and method of forming thin film transistors Apr. 10, 2001
6210991 Metal contact scheme using selective silicon growth Apr. 3, 2001
6210996 Laser illumination system Apr. 3, 2001
6210997 Semiconductor device and method for manufacturing the same Apr. 3, 2001
6207481 Thin film transistor having a crystallization seed layer and a method for manufacturing thereof Mar. 27, 2001
6204101 Method of manufacturing semiconductor device Mar. 20, 2001
6204154 Semiconductor device and fabrication method thereof Mar. 20, 2001
6200837 Method of manufacturing thin film transistor Mar. 13, 2001
6197626 Method for fabricating semiconductor device Mar. 6, 2001
6194254 Semiconductor device and method for manufacturing the same Feb. 27, 2001
6194255 Method for manufacturing thin-film transistors Feb. 27, 2001
6190949 Silicon thin film, group of silicon single crystal grains and formation process thereof, and semiconductor device, flash memory cell and fabrication process thereof Feb. 20, 2001











 
 
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