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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6576502 |
Method for forming LDD/offset structure of thin film transistor |
Jun. 10, 2003 |
| 6576503 |
Laser diodes and manufacturing methods |
Jun. 10, 2003 |
| 6573163 |
Method of optimizing channel characteristics using multiple masks to form laterally crystallized ELA poly-Si films |
Jun. 3, 2003 |
| 6573531 |
Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures |
Jun. 3, 2003 |
| 6569716 |
Method of manufacturing a polycrystalline silicon film and thin film transistor using lamp and laser anneal |
May. 27, 2003 |
| 6569724 |
Insulated gate field effect transistor and method for forming the same |
May. 27, 2003 |
| 6566179 |
Method of manufacturing a transistor |
May. 20, 2003 |
| 6566180 |
Thin film transistor and fabrication method thereof |
May. 20, 2003 |
| 6566754 |
Polycrystalline semiconductor device and its manufacture method |
May. 20, 2003 |
| 6562667 |
TFT for LCD device and fabrication method thereof |
May. 13, 2003 |
| 6562668 |
Method of fabricating thin film transistor using buffer layer and the thin film transistor |
May. 13, 2003 |
| 6562672 |
Semiconductor material and method for forming the same and thin film transistor |
May. 13, 2003 |
| 6558986 |
Method of crystallizing amorphous silicon thin film and method of fabricating polysilicon thin film transistor using the crystallization method |
May. 6, 2003 |
| 6558989 |
Method for crystallizing silicon film and thin film transistor and fabricating method using the same |
May. 6, 2003 |
| 6558991 |
Laser irradiation apparatus and laser irradiation method |
May. 6, 2003 |
| 6559036 |
Semiconductor device and method of manufacturing the same |
May. 6, 2003 |
| 6555420 |
Semiconductor device and process for producing semiconductor device |
Apr. 29, 2003 |
| 6555422 |
Thin film transistor and method of manufacturing the same |
Apr. 29, 2003 |
| 6555423 |
Method of manufacturing a thin film transistor and a method of evaluating a polysilicon film |
Apr. 29, 2003 |
| 6555448 |
Semiconductor manufacturing method |
Apr. 29, 2003 |
| 6551907 |
Metal-gettering method used in the manufacture of crystalline-Si TFT |
Apr. 22, 2003 |
| 6548332 |
Thermal treatment process for forming thin film transistors without the use of plasma treatment to further improve the output property of the thin film transistor |
Apr. 15, 2003 |
| 6544823 |
Method of manufacturing semiconductor device |
Apr. 8, 2003 |
| 6544826 |
Method for producing semiconductor device |
Apr. 8, 2003 |
| 6541795 |
Thin film semiconductor device and production method for the same |
Apr. 1, 2003 |
| 6541313 |
Transistor and process for fabricating the same |
Apr. 1, 2003 |
| 6541316 |
Process for direct integration of a thin-film silicon p-n junction diode with a magnetic tunnel junction |
Apr. 1, 2003 |
| 6541317 |
Polysilicon doped transistor |
Apr. 1, 2003 |
| 6541323 |
Method for fabricating polysilicon thin film transistor |
Apr. 1, 2003 |
| 6537863 |
Laser beam scanning method |
Mar. 25, 2003 |
| 6537864 |
Method of fabricating a thin film transistor using electromagnetic wave heating of an amorphous semiconductor film |
Mar. 25, 2003 |
| 6534350 |
Method for fabricating a low temperature polysilicon thin film transistor incorporating channel passivation step |
Mar. 18, 2003 |
| 6531348 |
Method for crystallizing amorphous silicon and fabricating thin film transistor using crystallized silicon |
Mar. 11, 2003 |
| 6528359 |
Laser annealing method and laser annealing device |
Mar. 4, 2003 |
| 6528361 |
Process for preparing a polycrystalline silicon thin film |
Mar. 4, 2003 |
| 6528397 |
Semiconductor thin film, method of producing the same, apparatus for producing the same, semiconductor device and method of producing the same |
Mar. 4, 2003 |
| 6524896 |
Semiconductor device and method of fabricating the same |
Feb. 25, 2003 |
| 6521473 |
Method of fabricating a liquid crystal display |
Feb. 18, 2003 |
| 6521491 |
Method for fabricating thin film transistor-liquid crystal display |
Feb. 18, 2003 |
| 6521492 |
Thin-film semiconductor device fabrication method |
Feb. 18, 2003 |
| 6518104 |
Method of manufacturing a semiconductor device by thermal oxidation of an impurity doped amorphous semiconductor film |
Feb. 11, 2003 |
| 6514801 |
Method for manufacturing thin-film transistor |
Feb. 4, 2003 |
| 6514803 |
Process for making an amorphous silicon thin film semiconductor device |
Feb. 4, 2003 |
| 6516009 |
Laser irradiating device and laser irradiating method |
Feb. 4, 2003 |
| 6511871 |
Method of fabricating thin film transistor |
Jan. 28, 2003 |
| 6511892 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness |
Jan. 28, 2003 |
| 6509218 |
Front stage process of a fully depleted silicon-on-insulator device |
Jan. 21, 2003 |
| 6506635 |
Semiconductor device, and method of forming the same |
Jan. 14, 2003 |
| 6506636 |
Method of manufacturing a semiconductor device having a crystallized amorphous silicon film |
Jan. 14, 2003 |
| 6506669 |
Method of fabricating a thin film transistor |
Jan. 14, 2003 |
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