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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).










Patents under this class:
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Patent Number Title Of Patent Date Issued
6638797 High performance poly-SiGe thin film transistor and a method of fabricating such a thin film transistor Oct. 28, 2003
6638800 Laser processing apparatus and laser processing process Oct. 28, 2003
6635505 Method of manufacturing an active matrix type semiconductor display device Oct. 21, 2003
6635589 Methods of heat treatment and heat treatment apparatus for silicon oxide films Oct. 21, 2003
6632708 Semiconductor device and method of manufacturing the same Oct. 14, 2003
6632711 Process for producing thin film semiconductor device and laser irradiation apparatus Oct. 14, 2003
RE38266 Method for fabricating semiconductor thin film Oct. 7, 2003
6627486 Method for manufacturing semiconductor and method for manufacturing semiconductor device Sep. 30, 2003
6627487 Semiconductor device and manufacturing method thereof Sep. 30, 2003
6627489 Method of producing CMOS transistors and related devices Sep. 30, 2003
6624009 Forming a crystalline semiconductor film on a glass substrate Sep. 23, 2003
6624037 XE preamorphizing implantation Sep. 23, 2003
6620661 Single crystal TFT from continuous transition metal delivery method Sep. 16, 2003
6620711 Method of manufacturing a semiconductor device Sep. 16, 2003
6621123 Semiconductor device, and semiconductor integrated device Sep. 16, 2003
6613619 Semiconductor device and method for producing the same Sep. 2, 2003
6613620 Semiconductor device and method of manufacturing the same Sep. 2, 2003
6610563 Surface mounting optoelectronic component and method for producing same Aug. 26, 2003
6607949 Method for fabricating polysilicon thin film transistor with improved electrical characteristics Aug. 19, 2003
6605496 Method of fabricating a bottom-gate-type thin film transistor using a heat relaxation layer during laser crystallization Aug. 12, 2003
6605497 Method of manufacturing semiconductor device over glass substrate having heat resistance Aug. 12, 2003
6602742 Supercapacitor and a method of manufacturing such a supercapacitor Aug. 5, 2003
6602744 Process for fabricating thin film semiconductor device Aug. 5, 2003
6602765 Fabrication method of thin-film semiconductor device Aug. 5, 2003
6599783 Method of fabricating a thin film including a protective layer as a mask Jul. 29, 2003
6599790 Laser-irradiation method and laser-irradiation device Jul. 29, 2003
6599791 Semiconductor integrated circuit Jul. 29, 2003
6599818 Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method Jul. 29, 2003
6596572 Method of fabricating a thin-film transistor having a plurality of island-like regions Jul. 22, 2003
6596573 Thin film transistor including polycrystalline active layer and method for fabricating the same Jul. 22, 2003
6597015 Method of fabricating thin-film transistor Jul. 22, 2003
6593216 Method for producing semiconductor device Jul. 15, 2003
6589824 Process for fabricating semiconductor device Jul. 8, 2003
6589829 Semiconductor device and method for forming the same Jul. 8, 2003
6586287 Method for fabricating thin film transistor including crystalline silicon active layer Jul. 1, 2003
6582996 Semiconductor thin film forming method Jun. 24, 2003
6576502 Method for forming LDD/offset structure of thin film transistor Jun. 10, 2003
6576503 Laser diodes and manufacturing methods Jun. 10, 2003
6573163 Method of optimizing channel characteristics using multiple masks to form laterally crystallized ELA poly-Si films Jun. 3, 2003
6573531 Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures Jun. 3, 2003
6569716 Method of manufacturing a polycrystalline silicon film and thin film transistor using lamp and laser anneal May. 27, 2003
6569724 Insulated gate field effect transistor and method for forming the same May. 27, 2003
6566179 Method of manufacturing a transistor May. 20, 2003
6566180 Thin film transistor and fabrication method thereof May. 20, 2003
6566754 Polycrystalline semiconductor device and its manufacture method May. 20, 2003
6562667 TFT for LCD device and fabrication method thereof May. 13, 2003
6562668 Method of fabricating thin film transistor using buffer layer and the thin film transistor May. 13, 2003
6562672 Semiconductor material and method for forming the same and thin film transistor May. 13, 2003
6558986 Method of crystallizing amorphous silicon thin film and method of fabricating polysilicon thin film transistor using the crystallization method May. 6, 2003
6558989 Method for crystallizing silicon film and thin film transistor and fabricating method using the same May. 6, 2003

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