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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618904 |
Method of manufacturing a semiconductor device |
Nov. 17, 2009 |
| 7618882 |
Method for manufacturing semiconductor device and laser irradiation apparatus |
Nov. 17, 2009 |
| 7618852 |
Phase transition method of amorphous material using cap layer |
Nov. 17, 2009 |
| 7615502 |
Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
Nov. 10, 2009 |
| 7615424 |
Laser irradiation apparatus and method for manufacturing semiconductor device using the laser irradiation apparatus |
Nov. 10, 2009 |
| 7615384 |
Semiconductor display device and method of manufacturing the same |
Nov. 10, 2009 |
| 7612379 |
Multi-gate thin film transistor having recrystallized channel regions with different grain sizes |
Nov. 3, 2009 |
| 7611933 |
Process for manufacturing a thin-film transistor (TFT) device and TFT device manufactured by the process |
Nov. 3, 2009 |
| 7611932 |
Method of manufacturing a thin film transistor |
Nov. 3, 2009 |
| 7611807 |
Method for forming poly-silicon film |
Nov. 3, 2009 |
| 7608869 |
Thin film transistor and method of fabricating the same |
Oct. 27, 2009 |
| 7608527 |
Laser irradiation method and method for manufacturing crystalline semiconductor film |
Oct. 27, 2009 |
| 7606064 |
Method for reducing a reset current for resetting a portion of a phase change material in a memory cell of a phase change memory device and the phase change memory device |
Oct. 20, 2009 |
| 7605029 |
Method of manufacturing semiconductor device |
Oct. 20, 2009 |
| 7601984 |
Field effect transistor with amorphous oxide active layer containing microcrystals and gate electrode opposed to active layer through gate insulator |
Oct. 13, 2009 |
| 7601565 |
Thin film transistor and method of fabricating the same |
Oct. 13, 2009 |
| 7588976 |
Display device, method of production of the same, and projection type display device |
Sep. 15, 2009 |
| 7585715 |
Semiconductor device and process for fabricating the same |
Sep. 8, 2009 |
| 7585709 |
Display panels and fabrication methods thereof |
Sep. 8, 2009 |
| 7575985 |
Method of fabricating semiconductor device |
Aug. 18, 2009 |
| 7569441 |
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |
Aug. 4, 2009 |
| 7569440 |
Method of manufacturing a semiconductor device and manufacturing system thereof |
Aug. 4, 2009 |
| 7569439 |
Thin film semiconductor device, production process and information displays |
Aug. 4, 2009 |
| 7569307 |
Laser mask and crystallization method using the same |
Aug. 4, 2009 |
| 7566625 |
Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method |
Jul. 28, 2009 |
| 7566602 |
Methods of forming single crystalline layers and methods of manufacturing semiconductor devices having such layers |
Jul. 28, 2009 |
| 7563661 |
Crystallization method for semiconductor film, manufacturing method for semiconductor device, and laser irradiation apparatus |
Jul. 21, 2009 |
| 7563660 |
Silicon film, crystalline film and method for manufacturing the same |
Jul. 21, 2009 |
| 7563659 |
Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same |
Jul. 21, 2009 |
| 7563658 |
Method for manufacturing semiconductor device |
Jul. 21, 2009 |
| 7560365 |
Method of semiconductor thin film crystallization and semiconductor device fabrication |
Jul. 14, 2009 |
| 7560321 |
Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device |
Jul. 14, 2009 |
| 7557412 |
Semiconductor device and method of manufacturing the same |
Jul. 7, 2009 |
| 7557375 |
Method for fabricating crystalline silicon |
Jul. 7, 2009 |
| 7557020 |
Method for fabricating thin film transistor using metal catalyst layer |
Jul. 7, 2009 |
| 7556993 |
Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus |
Jul. 7, 2009 |
| 7553716 |
Method for manufacturing a semiconductor thin film |
Jun. 30, 2009 |
| 7553715 |
Crystallization method and apparatus thereof |
Jun. 30, 2009 |
| 7553714 |
Method of manufacturing thin film transistor having polycrystalline silicon layer, thin film transistor manufactured using the method and flat panel display comprising the thin film transistor |
Jun. 30, 2009 |
| 7547914 |
Single-crystal layer on a dielectric layer |
Jun. 16, 2009 |
| 7547593 |
Method of fabricating semiconductor device |
Jun. 16, 2009 |
| 7544584 |
Localized compressive strained semiconductor |
Jun. 9, 2009 |
| 7544572 |
Multi-operational mode transistor with multiple-channel device structure |
Jun. 9, 2009 |
| 7544550 |
Method of fabricating semiconductor device and semiconductor fabricated by the same method |
Jun. 9, 2009 |
| 7544549 |
Method for manufacturing semiconductor device and MOS field effect transistor |
Jun. 9, 2009 |
| 7541615 |
Display device including thin film transistors |
Jun. 2, 2009 |
| 7541230 |
Method and apparatus for crystallizing semiconductor with laser beams |
Jun. 2, 2009 |
| 7541228 |
Semiconductor device, method of manufacturing the same, and method of designing the same |
Jun. 2, 2009 |
| 7534670 |
Semiconductor device and manufacturing method of the same |
May. 19, 2009 |
| 7528057 |
Laser annealing method and laser annealing device |
May. 5, 2009 |
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