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Class Information
Number: 438/166
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Including recrystallization step
Description: Process wherein the crystalline structure of the semiconductive layer is altered or modified (e.g., from amorphous to polycrystalline or single crystalline).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7452790 |
Method of fabricating thin film transistor |
Nov. 18, 2008 |
| 7452762 |
Thin film transistor and method of fabricating the same |
Nov. 18, 2008 |
| 7452791 |
Crystalline semiconductor film, method of manufacturing the same, and semiconductor device |
Nov. 18, 2008 |
| 7449374 |
Methods of manufacturing semiconductor devices with rotated substrates |
Nov. 11, 2008 |
| 7449376 |
Method of manufacturing a semiconductor device |
Nov. 11, 2008 |
| 7449377 |
Method of fabricating poly silicon layer |
Nov. 11, 2008 |
| 7445974 |
Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device |
Nov. 4, 2008 |
| 7442594 |
Method for manufacturing a flat panel display with improved white balance |
Oct. 28, 2008 |
| 7442593 |
Method of manufacturing semiconductor device having conductive thin films |
Oct. 28, 2008 |
| 7442592 |
Manufacturing a semiconductor device |
Oct. 28, 2008 |
| 7439107 |
Laser irradiation apparatus, method of irradiating laser light, and method of manufacturing a semiconductor device |
Oct. 21, 2008 |
| 7439114 |
Laser anneal method of a semiconductor layer |
Oct. 21, 2008 |
| 7439115 |
Semiconductor fabricating apparatus |
Oct. 21, 2008 |
| 7439116 |
Apparatus and method for forming polycrystalline silicon thin film |
Oct. 21, 2008 |
| 7435667 |
Method of controlling polysilicon crystallization |
Oct. 14, 2008 |
| 7435635 |
Method for crystallizing semiconductor material |
Oct. 14, 2008 |
| 7432141 |
Large-grain p-doped polysilicon films for use in thin film transistors |
Oct. 7, 2008 |
| 7427539 |
Thin film transistor and method of manufacturing the same |
Sep. 23, 2008 |
| 7422987 |
Method for manufacturing semiconductor device |
Sep. 9, 2008 |
| 7423322 |
Thin film transistor and method of fabricating the same |
Sep. 9, 2008 |
| 7419860 |
Method of fabricating a semiconductor thin film |
Sep. 2, 2008 |
| 7419861 |
Laser irradiation apparatus, laser irradiation method, semiconductor device, and method of manufacturing a semiconductor device |
Sep. 2, 2008 |
| 7416928 |
Manufacturing method of semiconductor device |
Aug. 26, 2008 |
| 7413608 |
Crystallization apparatus, crystallization method, and phase shifter |
Aug. 19, 2008 |
| 7413939 |
Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit |
Aug. 19, 2008 |
| 7410849 |
Semiconductor device and method for manufacturing the same |
Aug. 12, 2008 |
| 7410839 |
Thin film transistor and manufacturing method thereof |
Aug. 12, 2008 |
| 7410847 |
Semiconductor device having semiconductor circuit formed by semiconductor elements and method for manufacturing the same |
Aug. 12, 2008 |
| 7410848 |
Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus |
Aug. 12, 2008 |
| 7410889 |
Method of fabricating a poly-silicon thin film |
Aug. 12, 2008 |
| 7410850 |
Heating treatment device, heating treatment method and fabrication method of semiconductor device |
Aug. 12, 2008 |
| 7407840 |
Display device, method of production of the same, and projection type display device |
Aug. 5, 2008 |
| 7407841 |
Liquid crystal display panel and method of fabricating thereof |
Aug. 5, 2008 |
| 7407848 |
Methods of manufacturing semiconductor thin film, electronic device and liquid crystal display device |
Aug. 5, 2008 |
| 7405115 |
Semiconductor device and manufacturing method thereof |
Jul. 29, 2008 |
| 7405141 |
Processing method, processing apparatus, crystallization method and crystallization apparatus using pulsed laser beam |
Jul. 29, 2008 |
| 7405114 |
Laser irradiation apparatus and method of manufacturing semiconductor device |
Jul. 29, 2008 |
| 7402471 |
Semiconductor device and method for manufacturing the same |
Jul. 22, 2008 |
| 7396712 |
Thin film processing method and thin processing apparatus |
Jul. 8, 2008 |
| 7393734 |
Method of fabricating polysilicon film |
Jul. 1, 2008 |
| 7390704 |
Laser process apparatus, laser irradiation method, and method for manufacturing semiconductor device |
Jun. 24, 2008 |
| 7390705 |
Method for crystallizing amorphous semiconductor thin film by epitaxial growth using non-metal seed and method for fabricating poly-crystalline thin film transistor using the same |
Jun. 24, 2008 |
| 7390706 |
Method of forming channel region of TFT composed of single crystal Si |
Jun. 24, 2008 |
| 7390728 |
Display device and manufacturing method thereof |
Jun. 24, 2008 |
| 7387954 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device |
Jun. 17, 2008 |
| 7387922 |
Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system |
Jun. 17, 2008 |
| 7384810 |
Image display device and method for manufacturing the same |
Jun. 10, 2008 |
| 7384476 |
Method for crystallizing silicon |
Jun. 10, 2008 |
| 7384832 |
Method of manufacturing a semiconductor device |
Jun. 10, 2008 |
| 7384860 |
Method of manufacturing a semiconductor device |
Jun. 10, 2008 |
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