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Class Information
Number: 438/165
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Semiconductor islands formed upon insulating substrate or layer (e.g., mesa formation, etc.) > Including differential oxidation
Description: Process in which the patterning of the semiconductive layer includes a step of oxidizing the semiconductive layer to form regions of differing oxide thickness.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8647935 Buried oxidation for enhanced mobility Feb. 11, 2014
8603878 Vertical-type semiconductor devices and methods of manufacturing the same Dec. 10, 2013
8574972 Method for fabricating semiconductor device and plasma doping apparatus Nov. 5, 2013
8569868 Device having and method for forming fins with multiple widths Oct. 29, 2013
8460985 Method of manufacturing semiconductor for transistor and method of manufacturing the transistor Jun. 11, 2013
8372733 Method for fabricating a locally passivated germanium-on-insulator substrate Feb. 12, 2013
8329524 Surface emitting laser, method for producing surface emitting laser, and image forming apparatus Dec. 11, 2012
8324036 Device having and method for forming fins with multiple widths for an integrated circuit Dec. 4, 2012
8324685 Semiconductor device having a fin-type semiconductor region Dec. 4, 2012
8211786 CMOS structure including non-planar hybrid orientation substrate with planar gate electrodes and method for fabrication Jul. 3, 2012
8101512 Method of enhancing lithography capabilities during gate formation in semiconductors having a pronounced surface topography Jan. 24, 2012
7932138 Method for manufacturing thin film transistor Apr. 26, 2011
7834398 Method of manufacturing a semiconductor device Nov. 16, 2010
7834417 Antifuse elements Nov. 16, 2010
7816736 Method of manufacturing a semiconductor device Oct. 19, 2010
7776669 Thin film transistor and method of fabricating the same Aug. 17, 2010
7736963 Method of forming a gate structure for a semiconductor device and method of forming a cell gate structure for a non-volatile memory device Jun. 15, 2010
7622338 Method for manufacturing semiconductor device Nov. 24, 2009
7605039 Multiple-gate MOS transistor using Si substrate and method of manufacturing the same Oct. 20, 2009
7510919 Anchoring, by lateral oxidizing, of patterns of a thin film to prevent the dewetting phenomenon Mar. 31, 2009
7510927 LOCOS isolation for fully-depleted SOI devices Mar. 31, 2009
7504291 MOS transistor on an SOI substrate with a body contact and a gate insulating film with variable thickness Mar. 17, 2009
7462519 Semiconductor device, method of fabricating same, and, electrooptical device Dec. 9, 2008
7425480 Semiconductor device and method of manufacture thereof Sep. 16, 2008
7381631 Use of expanding material oxides for nano-fabrication Jun. 3, 2008
7344930 Semiconductor device and manufacturing method thereof Mar. 18, 2008
7303946 Method of manufacturing a semiconductor device using an oxidation process Dec. 4, 2007
7288447 Semiconductor device having trench isolation for differential stress and method therefor Oct. 30, 2007
7214555 Method for producing display device May. 8, 2007
7196383 Thin film oxide interface Mar. 27, 2007
7183147 Light emitting device, method for manufacturing thereof and electronic appliance Feb. 27, 2007
7183143 Method for forming nitrided tunnel oxide layer Feb. 27, 2007
7141459 Silicon-on-insulator ULSI devices with multiple silicon film thicknesses Nov. 28, 2006
7064018 Methods for fabricating three dimensional integrated circuits Jun. 20, 2006
7061029 High-voltage device structure Jun. 13, 2006
7023015 Thin-film semiconductor device and liquid crystal display Apr. 4, 2006
6955955 STI liner for SOI structure Oct. 18, 2005
6902960 Oxide interface and a method for fabricating oxide thin films Jun. 7, 2005
6867074 Method of fabricating a polysilicon layer Mar. 15, 2005
6864127 Semiconductor device and method of fabricating the same Mar. 8, 2005
6844225 Self-aligned mask formed utilizing differential oxidation rates of materials Jan. 18, 2005
6812077 Method for patterning narrow gate lines Nov. 2, 2004
6709908 Methods for making semiconductor devices Mar. 23, 2004
6667197 Method for differential oxidation rate reduction for n-type and p-type materials Dec. 23, 2003
6664146 Integration of fully depleted and partially depleted field effect transistors formed in SOI technology Dec. 16, 2003
6656778 Passivation structure for flash memory and method for fabricating same Dec. 2, 2003
6599791 Semiconductor integrated circuit Jul. 29, 2003
6551867 Non-volatile semiconductor memory device and method for manufacturing the same Apr. 22, 2003
6537927 Apparatus and method for heat-treating semiconductor substrate Mar. 25, 2003
6524883 Quantum dot of single electron memory device and method for fabricating thereof Feb. 25, 2003

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