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Class Information
Number: 438/160
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Inverted transistor structure > Utilizing backside irradiation
Description: Process wherein single or multiple layers formed over the gate are patterned by irradiating a photoresist layer with a radiation source located on the opposite side of the substrate from which the gate is formed.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8703560 Methods for manufacturing thin film transistor Apr. 22, 2014
8691639 Manufacture methods of thin film transistor and array substrate and mask Apr. 8, 2014
8647934 Thin film transistor and fabricating method thereof Feb. 11, 2014
8575714 Backside illuminated semiconductor light-receiving device, optical receiver module, and optical transceiver Nov. 5, 2013
8569121 Graphene and nanotube/nanowire transistor with a self-aligned gate structure on transparent substrates and method of making same Oct. 29, 2013
8546179 Method of fabricating a self-aligned top-gate organic transistor Oct. 1, 2013
8501553 Method for manufacturing thin film transistor (TFT) array substrate Aug. 6, 2013
8502221 Semiconductor device with two metal oxide films and an oxide semiconductor film Aug. 6, 2013
8501554 Methods for manufacturing thin film transistor and display device Aug. 6, 2013
8492212 Thin-film transistor producing method Jul. 23, 2013
8492190 Method for manufacturing display panel Jul. 23, 2013
8450160 Flattening method of a substrate May. 28, 2013
8445339 Conductor structure, pixel structure, and methods of forming the same May. 21, 2013
8435823 Solid-state imaging device and method of manufacturing the same May. 7, 2013
8436358 Image display device and manufacturing method thereof May. 7, 2013
8435832 Double self-aligned metal oxide TFT May. 7, 2013
8405086 Pixel structure of display panel and method for manufacturing the same Mar. 26, 2013
8378352 Organic light-emitting display device and manufacturing method of the same Feb. 19, 2013
8349671 Methods for manufacturing thin film transistor and display device Jan. 8, 2013
8309407 Electronic devices including carbon-based films having sidewall liners, and methods of forming such devices Nov. 13, 2012
8273600 Self-aligned metal oxide TFT with reduced number of masks Sep. 25, 2012
8207535 Thin film transistor substrate and fabricating method thereof Jun. 26, 2012
8138087 Method of manufacturing an integrated circuit Mar. 20, 2012
8003451 Method of manufacturing array substrate of liquid crystal display device Aug. 23, 2011
7977176 Flexible display device and fabricating method thereof Jul. 12, 2011
7977151 Double self-aligned metal oxide TFT Jul. 12, 2011
7951702 Methods for fabricating semiconductor components with conductive interconnects having planar surfaces May. 31, 2011
7915102 Methods of fabricating thin film transistor and organic light emitting display device using the same Mar. 29, 2011
7872263 Substrate structure for a thin film transistor Jan. 18, 2011
7839693 Method of fabricating CMOS-compatible non-volatile memory cell with lateral inter-poly programming layer Nov. 23, 2010
7816192 Thin film transistor substrate and fabricating method thereof Oct. 19, 2010
7816193 Method for fabricating a pixel structure of a liquid crystal display Oct. 19, 2010
7790527 High-voltage silicon-on-insulator transistors and methods of manufacturing the same Sep. 7, 2010
7767538 Method for manufacturing semiconductor device Aug. 3, 2010
7767506 Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask Aug. 3, 2010
7767478 Thin film transistor array panel and method for manufacturing the same Aug. 3, 2010
RE41426 Manufacturing methods of liquid crystal displays Jul. 13, 2010
7727872 Methods for fabricating semiconductor components with conductive interconnects Jun. 1, 2010
7682883 Manufacturing method of thin film transistor array substrate and liquid crystal display panel Mar. 23, 2010
7625785 Semiconductor device and manufacturing method thereof Dec. 1, 2009
7615422 Evaluation method of semiconductor device, manufacturing method of the semiconductor device, design management system of device comprising the semiconductor device, dose amount control program Nov. 10, 2009
7608494 Thin film transistor array panel and a method for manufacturing the same Oct. 27, 2009
7585713 Method for exposing photo-sensitive SAM film and method for manufacturing semiconductor device Sep. 8, 2009
7585712 Methods of fabricating thin film transistor array substrate and forming metal layer of thin film transistor array substrate Sep. 8, 2009
7569435 Transistor manufacture Aug. 4, 2009
7553712 Method for manufacturing a bottom substrate of a liquid crystal display Jun. 30, 2009
7504290 Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same Mar. 17, 2009
7494909 Method of manufacturing a chip Feb. 24, 2009
7485511 Integrated circuit device and method for manufacturing integrated circuit device Feb. 3, 2009
7410882 Method of manufacturing and structure of polycrystalline semiconductor thin-film heterostructures on dissimilar substrates Aug. 12, 2008

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