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Class Information
Number: 438/160
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > On insulating substrate or layer (e.g., tft, etc.) > Having insulated gate > Inverted transistor structure > Utilizing backside irradiation
Description: Process wherein single or multiple layers formed over the gate are patterned by irradiating a photoresist layer with a radiation source located on the opposite side of the substrate from which the gate is formed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615422 |
Evaluation method of semiconductor device, manufacturing method of the semiconductor device, design management system of device comprising the semiconductor device, dose amount control program |
Nov. 10, 2009 |
| 7608494 |
Thin film transistor array panel and a method for manufacturing the same |
Oct. 27, 2009 |
| 7585712 |
Methods of fabricating thin film transistor array substrate and forming metal layer of thin film transistor array substrate |
Sep. 8, 2009 |
| 7585713 |
Method for exposing photo-sensitive SAM film and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7569435 |
Transistor manufacture |
Aug. 4, 2009 |
| 7553712 |
Method for manufacturing a bottom substrate of a liquid crystal display |
Jun. 30, 2009 |
| 7504290 |
Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same |
Mar. 17, 2009 |
| 7494909 |
Method of manufacturing a chip |
Feb. 24, 2009 |
| 7485511 |
Integrated circuit device and method for manufacturing integrated circuit device |
Feb. 3, 2009 |
| 7410882 |
Method of manufacturing and structure of polycrystalline semiconductor thin-film heterostructures on dissimilar substrates |
Aug. 12, 2008 |
| 7407824 |
Guard ring for improved matching |
Aug. 5, 2008 |
| 7393770 |
Backside method for fabricating semiconductor components with conductive interconnects |
Jul. 1, 2008 |
| 7381598 |
Insulated gate semiconductor device and process for fabricating the same |
Jun. 3, 2008 |
| 7351617 |
Semiconductor device and a method of manufacturing the same |
Apr. 1, 2008 |
| 7344928 |
Patterned-print thin-film transistors with top gate geometry |
Mar. 18, 2008 |
| 7303978 |
Board for mounting BGA semiconductor chip thereon, semiconductor device, and methods of fabricating such board and semiconductor device |
Dec. 4, 2007 |
| 7253012 |
Guard ring for improved matching |
Aug. 7, 2007 |
| 7238556 |
Thin film transistor structure and method of manufacturing the same |
Jul. 3, 2007 |
| 7217605 |
Laser irradiation method and method of manufacturing a semiconductor device |
May. 15, 2007 |
| 7176068 |
Semiconductor device and manufacturing method thereof |
Feb. 13, 2007 |
| 7148091 |
Method of manufacturing thin film transistor |
Dec. 12, 2006 |
| 7011994 |
Method of forming wiring and method of manufacturing image display system by using the same |
Mar. 14, 2006 |
| 6984542 |
Method of forming wiring |
Jan. 10, 2006 |
| 6972219 |
Thin film transistor self-aligned to a light-shield layer |
Dec. 6, 2005 |
| RE38901 |
Manufacturing methods of liquid crystal displays |
Nov. 29, 2005 |
| 6933568 |
Deposition method of insulating layers having low dielectric constant of semiconductor device, a thin film transistor substrate using the same and a method of manufacturing the same |
Aug. 23, 2005 |
| 6921685 |
Method of fabricating thin film transistor |
Jul. 26, 2005 |
| 6887742 |
Method for manufacturing a thin film transistor array panel for a liquid crystal display |
May. 3, 2005 |
| 6887746 |
Insulated gate field effect transistor and method for forming the same |
May. 3, 2005 |
| 6875645 |
Pixel structure and fabricating method thereof |
Apr. 5, 2005 |
| 6867075 |
Manufacturing method of thin film transistor in which a total film thickness of silicon oxide films is defined |
Mar. 15, 2005 |
| 6864127 |
Semiconductor device and method of fabricating the same |
Mar. 8, 2005 |
| 6844249 |
Method for manufacturing a semiconductor device using laser light |
Jan. 18, 2005 |
| 6808968 |
Method of manufacturing a semiconductor device |
Oct. 26, 2004 |
| 6794231 |
Method for manufacturing a liquid crystal display panel having a gate line with at least one opening |
Sep. 21, 2004 |
| 6756258 |
Method of manufacturing a semiconductor device |
Jun. 29, 2004 |
| RE38466 |
Manufacturing method of active matrix substrate, active matrix substrate and liquid crystal display device |
Mar. 16, 2004 |
| 6673640 |
Method of manufacturing semiconductor device for evaluation capable of evaluating crystal defect using in-line test by avoiding using preferential etching process |
Jan. 6, 2004 |
| 6670224 |
Method for manufacturing thin film transistors |
Dec. 30, 2003 |
| 6653177 |
Patterning method, thin film transistor matrix substrate manufacturing method, and exposure mask |
Nov. 25, 2003 |
| 6627470 |
Array substrate for use in LCD device and method of fabricating same |
Sep. 30, 2003 |
| 6624013 |
Method for manufacturing a semiconductor device |
Sep. 23, 2003 |
| 6605494 |
Method of fabricating thin film transistor |
Aug. 12, 2003 |
| 6599791 |
Semiconductor integrated circuit |
Jul. 29, 2003 |
| 6569724 |
Insulated gate field effect transistor and method for forming the same |
May. 27, 2003 |
| 6562645 |
Method of fabricating fringe field switching mode liquid crystal display |
May. 13, 2003 |
| 6562671 |
Semiconductor display device and manufacturing method thereof |
May. 13, 2003 |
| 6562670 |
Poly-silicon thin film transistor and method for fabricating thereof |
May. 13, 2003 |
| 6558992 |
Method to fabricate flat panel display |
May. 6, 2003 |
| 6555419 |
Thin film transistor and manufacturing method of thin film transistor |
Apr. 29, 2003 |
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