 |
|
 |
| |
 |
|
Class Information
Number: 438/16
Name: Semiconductor device manufacturing: process > With measuring or testing > Optical characteristic sensed
Description: Process wherein the sensed condition is an optical characteristic of the process or of the device made thereby.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625769 |
Electroluminescent device and fabrication method thereof |
Dec. 1, 2009 |
| 7622311 |
Inspection of underfill in integrated circuit package |
Nov. 24, 2009 |
| 7623978 |
Damage assessment of a wafer using optical metrology |
Nov. 24, 2009 |
| 7618831 |
Method of monitoring the manufacture of interferometric modulators |
Nov. 17, 2009 |
| 7618834 |
Method of manufacturing image sensor |
Nov. 17, 2009 |
| 7615422 |
Evaluation method of semiconductor device, manufacturing method of the semiconductor device, design management system of device comprising the semiconductor device, dose amount control program |
Nov. 10, 2009 |
| 7612895 |
Apparatus and method for in-situ monitoring of wafer bonding time |
Nov. 3, 2009 |
| 7608468 |
Apparatus and methods for determining overlay and uses of same |
Oct. 27, 2009 |
| 7608469 |
Method of fabricating a chip |
Oct. 27, 2009 |
| 7601559 |
Apparatus and method for identifying proper orientation and electrical conductivity between a semiconductor device and a socket or contactor |
Oct. 13, 2009 |
| 7598098 |
Monitoring the reduction in thickness as material is removed from a wafer composite and test structure for monitoring removal of material |
Oct. 6, 2009 |
| 7598099 |
Method of controlling a fabrication process using an iso-dense bias |
Oct. 6, 2009 |
| 7595631 |
Wafer level assemble chip multi-site testing solution |
Sep. 29, 2009 |
| 7588948 |
Test structure for electrically verifying the depths of trench-etching in an SOI wafer, and associated working methods |
Sep. 15, 2009 |
| 7588949 |
Optical metrology model optimization based on goals |
Sep. 15, 2009 |
| 7588946 |
Controlling system for gate formation of semiconductor devices |
Sep. 15, 2009 |
| 7585686 |
Method and apparatus for processing a wafer |
Sep. 8, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7582492 |
Method of doping impurities, and electronic element using the same |
Sep. 1, 2009 |
| 7582884 |
Charged particle beam exposure method and charged particle beam exposure device |
Sep. 1, 2009 |
| 7576851 |
Creating a library for measuring a damaged structure formed on a wafer using optical metrology |
Aug. 18, 2009 |
| 7571074 |
Method of using a wafer-thickness-dependant profile library |
Aug. 4, 2009 |
| 7568379 |
Method of measuring porosity by means of ellipsometry and device for implementing one such method |
Aug. 4, 2009 |
| 7566665 |
Semiconductor device manufacturing method and manufacturing line thereof |
Jul. 28, 2009 |
| 7564068 |
COG-typed organic electroluminescent cell |
Jul. 21, 2009 |
| 7561258 |
Wafer tilt detection apparatus and method |
Jul. 14, 2009 |
| 7556973 |
Manufacturing method for semiconductor device |
Jul. 7, 2009 |
| 7553678 |
Method for detecting semiconductor manufacturing conditions |
Jun. 30, 2009 |
| 7548643 |
Methods, objects and apparatus employing machine readable data |
Jun. 16, 2009 |
| 7544529 |
Image sensor packaging structure and method of manufacturing the same |
Jun. 9, 2009 |
| 7544522 |
Fabrication method of semiconductor integrated circuit device |
Jun. 9, 2009 |
| 7541201 |
Apparatus and methods for determining overlay of structures having rotational or mirror symmetry |
Jun. 2, 2009 |
| 7539583 |
Method and system for defect detection |
May. 26, 2009 |
| 7534631 |
Apparatus for measuring semiconductor physical characteristics |
May. 19, 2009 |
| 7524684 |
Semiconductor device with electrode pad having probe mark |
Apr. 28, 2009 |
| 7524685 |
Manufacturing method of a display device |
Apr. 28, 2009 |
| 7525650 |
Substrate processing apparatus for performing photolithography |
Apr. 28, 2009 |
| 7525673 |
Optimizing selected variables of an optical metrology system |
Apr. 28, 2009 |
| 7522762 |
Detection, resolution, and identification of arrayed elements |
Apr. 21, 2009 |
| 7521265 |
Method for measuring an amount of strain of a bonded strained wafer |
Apr. 21, 2009 |
| 7519447 |
Method and apparatus for integrating multiple sample plans |
Apr. 14, 2009 |
| 7514277 |
Etching method and apparatus |
Apr. 7, 2009 |
| 7514273 |
Method for applying rewiring to a panel while compensating for position errors of semiconductor chips in component positions of the panel |
Apr. 7, 2009 |
| 7505153 |
Model and parameter selection for optical metrology |
Mar. 17, 2009 |
| 7501292 |
Method for managing UV irradiation for curing semiconductor substrate |
Mar. 10, 2009 |
| 7497026 |
Method and system for detection of wafer centering in a track lithography tool |
Mar. 3, 2009 |
| 7498181 |
Method of preparing an integrated circuit die for imaging |
Mar. 3, 2009 |
| 7498224 |
Strained silicon forming method with reduction of threading dislocation density |
Mar. 3, 2009 |
| 7494828 |
Substrate holder and device manufacturing method |
Feb. 24, 2009 |
| 7494830 |
Method and device for wafer backside alignment overlay accuracy |
Feb. 24, 2009 |
|
|
|
 |
|
 |
|
| |
Randomly Featured Patents |
|
