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Class Information
Number: 438/16
Name: Semiconductor device manufacturing: process > With measuring or testing > Optical characteristic sensed
Description: Process wherein the sensed condition is an optical characteristic of the process or of the device made thereby.

Patents under this class:

Patent Number Title Of Patent Date Issued
8712571 Method and apparatus for wireless transmission of diagnostic information Apr. 29, 2014
8704238 Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes Apr. 22, 2014
8679865 Resin application apparatus, optical property correction apparatus and method, and method for manufacturing LED package Mar. 25, 2014
8673793 Method for automatic offset calculation for deposition of an aligned metal pattern onto selective emitter pattern and subsequent monitoring of alignment Mar. 18, 2014
8673659 Method of fabricating semiconductor device including process monitoring pattern having overlapping input/output pad array area Mar. 18, 2014
8673656 Method and device for measuring temperature during deposition of semiconductor Mar. 18, 2014
8669617 Multi-gate transistors Mar. 11, 2014
8660336 Defect inspection system Feb. 25, 2014
8658438 Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices Feb. 25, 2014
8654191 Defect inspection device and defect inspection method for silicon wafer Feb. 18, 2014
8652971 Cavity process etch undercut monitor Feb. 18, 2014
8652859 Method for manufacturing light-emitting device and manufacturing apparatus of light-emitting device Feb. 18, 2014
8647893 Method for post decomposition density balancing in integrated circuit layouts, related system and program product Feb. 11, 2014
8647892 Inline process control structures Feb. 11, 2014
8628993 Method for using laser ablation process for forming solar cell components Jan. 14, 2014
8628982 Method of depositing and inspecting an organic light emitting display panel Jan. 14, 2014
8624362 IC wafer having electromagnetic shielding effects and method for making the same Jan. 7, 2014
8624266 Silicon carbide substrate, semiconductor device, method of manufacturing silicon carbide substrate and method of manufacturing semiconductor device Jan. 7, 2014
8617912 Method for manufacturing semiconductor laser Dec. 31, 2013
8610284 Semiconductor device and electronic device Dec. 17, 2013
8609473 Method for fabricating a neo-layer using stud bumped bare die Dec. 17, 2013
8609443 Semiconductor device manufacturing method Dec. 17, 2013
8609442 Vapor deposition method, vapor deposition device and organic EL display device Dec. 17, 2013
8604337 Method to evaluate effectiveness of substrate cleanness and quantity of pin holes in an antireflective coating of a solar cell Dec. 10, 2013
8603839 In-line metrology system Dec. 10, 2013
8594826 Method and system for evaluating a machine tool operating characteristics Nov. 26, 2013
8592287 Overlay alignment mark and method of detecting overlay alignment error using the mark Nov. 26, 2013
8592229 Method for forming dual damascene structure Nov. 26, 2013
8592222 Method for analysing molecular pollution of a fluid, application device and application to the analysis of pollution in a natural medium and in a controlled environment Nov. 26, 2013
8574933 Fabrication method of semiconductor device Nov. 5, 2013
8565510 Methods for reading a feature pattern from a packaged die Oct. 22, 2013
8563335 Method of controlling polishing using in-situ optical monitoring and fourier transform Oct. 22, 2013
8559001 Inspection guided overlay metrology Oct. 15, 2013
8557614 Method for manufacturing lighting device Oct. 15, 2013
8549937 Method for determining COP generation factors for single-crystal silicon wafer Oct. 8, 2013
8546904 Integrated circuit with temperature increasing element and electronic system having the same Oct. 1, 2013
8546155 Via chains for defect localization Oct. 1, 2013
8519260 Method to evaluate effectiveness of substrate cleanness and quantity of pin holes in an antireflective coating of a solar cell Aug. 27, 2013
8518721 Dopant marker for precise recess control Aug. 27, 2013
8515567 Enhanced state estimation based upon information credibility Aug. 20, 2013
8513822 Thin overlay mark for imaging based metrology Aug. 20, 2013
8513759 Photodiode array Aug. 20, 2013
8507297 Packaging and testing of multiple MEMS devices on a wafer Aug. 13, 2013
8505481 Apparatus for growth of dilute-nitride materials using an isotope for enhancing the sensitivity of resonant nuclear reaction analysis Aug. 13, 2013
8502553 Semiconductor package test apparatus Aug. 6, 2013
8501503 Methods of inspecting and manufacturing semiconductor wafers Aug. 6, 2013
8497150 Method for defect isolation of thin-film solar cell Jul. 30, 2013
8497142 Methods of forming conductive layer patterns using gas phase cleaning process and methods of manufacturing semiconductor devices Jul. 30, 2013
8492178 Method of monitoring fabrication processing including edge bead removal processing Jul. 23, 2013
8492177 Methods for quantitative measurement of a plasma immersion process Jul. 23, 2013

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