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Class Information
Number: 438/143
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Gettering of semiconductor substrate
Description: Process including a step of gettering the semiconductor substrate.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8546928 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof Oct. 1, 2013
8502284 Semiconductor device and method of manufacturing semiconductor device Aug. 6, 2013
8399280 Method for protecting an integrated circuit chip against laser attacks Mar. 19, 2013
8382894 Process for the preparation of silicon wafer with reduced slip and warpage Feb. 26, 2013
8343853 Semiconductor wafer, semiconductor device using the same, and method and apparatus for producing the same Jan. 1, 2013
8329563 Semiconductor device including a gettering layer and manufacturing method therefor Dec. 11, 2012
8309436 Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate Nov. 13, 2012
8306495 Semiconductor device Nov. 6, 2012
8293613 Gettering structures and methods and their application Oct. 23, 2012
8265582 Semiconductor device Sep. 11, 2012
8227299 Removal of impurities from semiconductor device layers Jul. 24, 2012
8216951 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jul. 10, 2012
8207048 Method for producing ordered nanostructures Jun. 26, 2012
8164096 Organic light emitting diode flat panel display device having uniform electrical characteristics and method of manufacturing the same Apr. 24, 2012
8138066 Dislocation engineering using a scanned laser Mar. 20, 2012
8133769 Methods for gettering in semiconductor substrate Mar. 13, 2012
8119461 Reducing the creation of charge traps at gate dielectrics in MOS transistors by performing a hydrogen treatment Feb. 21, 2012
8110451 Method for manufacturing light emitting device Feb. 7, 2012
8093089 Methods of manufacturing image sensors including gettering regions Jan. 10, 2012
8080449 Method for manufacturing thin-film transistors Dec. 20, 2011
7993987 Surface cleaning using sacrificial getter layer Aug. 9, 2011
7943414 Method for manufacturing SOI substrate May. 17, 2011
7939432 Method of improving intrinsic gettering ability of wafer May. 10, 2011
7923353 Gettering method and a wafer using the same Apr. 12, 2011
7888712 Semiconductor device and method for manufacturing same Feb. 15, 2011
7808091 Wafer structure with discrete gettering material Oct. 5, 2010
7776723 Method of manufacturing an epitaxial semiconductor substrate and method of manufacturing a semiconductor device Aug. 17, 2010
7763500 Method for manufacturing semiconductor storage device comprising a slow cooling step Jul. 27, 2010
7745244 Pin substrate and package Jun. 29, 2010
7732303 Method for recycling of ion implantation monitor wafers Jun. 8, 2010
7732902 Semiconductor package with getter formed over an irregular structure Jun. 8, 2010
7691724 Method for manufacturing SOI substrate Apr. 6, 2010
7566957 Support device with discrete getter material microelectronic devices Jul. 28, 2009
7494851 Thin film transistor array substrate and method for manufacturing the same Feb. 24, 2009
7462506 Carbon dioxide gettering method for a chip module assembly Dec. 9, 2008
7452742 Solid-state imaging device, camera and method of producing the solid-state imaging device Nov. 18, 2008
7359042 Inspection system for limited access spaces Apr. 15, 2008
7327019 Semiconductor device of a charge storage type Feb. 5, 2008
7326597 Gettering using voids formed by surface transformation Feb. 5, 2008
7319378 Anti-theft system for a vehicle with real-time notification feature Jan. 15, 2008
7297927 Fabrication of low leakage-current backside illuminated photodiodes Nov. 20, 2007
7297630 Methods of fabricating via hole and trench Nov. 20, 2007
7192813 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same Mar. 20, 2007
7166505 Method for making a semiconductor device having a high-k gate dielectric Jan. 23, 2007
7135351 Method for controlling of thermal donor formation in high resistivity CZ silicon Nov. 14, 2006
7126194 Method for removing impurities of a semiconductor wafer, semiconductor wafer assembly, and semiconductor device Oct. 24, 2006
7084048 Process for metallic contamination reduction in silicon wafers Aug. 1, 2006
6958264 Scribe lane for gettering of contaminants on SOI wafers and gettering method Oct. 25, 2005
6929984 Gettering using voids formed by surface transformation Aug. 16, 2005
6897084 Control of oxygen precipitate formation in high resistivity CZ silicon May. 24, 2005

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