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Class Information
Number: 438/143
Name: Semiconductor device manufacturing: process > Making field effect device having pair of active regions separated by gate structure by formation or alteration of semiconductive active regions > Gettering of semiconductor substrate
Description: Process including a step of gettering the semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7566957 |
Support device with discrete getter material microelectronic devices |
Jul. 28, 2009 |
| 7494851 |
Thin film transistor array substrate and method for manufacturing the same |
Feb. 24, 2009 |
| 7462506 |
Carbon dioxide gettering method for a chip module assembly |
Dec. 9, 2008 |
| 7452742 |
Solid-state imaging device, camera and method of producing the solid-state imaging device |
Nov. 18, 2008 |
| 7359042 |
Inspection system for limited access spaces |
Apr. 15, 2008 |
| 7326597 |
Gettering using voids formed by surface transformation |
Feb. 5, 2008 |
| 7327019 |
Semiconductor device of a charge storage type |
Feb. 5, 2008 |
| 7319378 |
Anti-theft system for a vehicle with real-time notification feature |
Jan. 15, 2008 |
| 7297927 |
Fabrication of low leakage-current backside illuminated photodiodes |
Nov. 20, 2007 |
| 7297630 |
Methods of fabricating via hole and trench |
Nov. 20, 2007 |
| 7192813 |
Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same |
Mar. 20, 2007 |
| 7166505 |
Method for making a semiconductor device having a high-k gate dielectric |
Jan. 23, 2007 |
| 7135351 |
Method for controlling of thermal donor formation in high resistivity CZ silicon |
Nov. 14, 2006 |
| 7126194 |
Method for removing impurities of a semiconductor wafer, semiconductor wafer assembly, and semiconductor device |
Oct. 24, 2006 |
| 7084048 |
Process for metallic contamination reduction in silicon wafers |
Aug. 1, 2006 |
| 6958264 |
Scribe lane for gettering of contaminants on SOI wafers and gettering method |
Oct. 25, 2005 |
| 6929984 |
Gettering using voids formed by surface transformation |
Aug. 16, 2005 |
| 6897084 |
Control of oxygen precipitate formation in high resistivity CZ silicon |
May. 24, 2005 |
| 6878579 |
Semiconductor device and method of manufacturing the same |
Apr. 12, 2005 |
| 6838321 |
SEMICONDUCTOR SUBSTRATE WITH DEFECTS REDUCED OR REMOVED AND METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE CAPABLE OF BIDIRECTIONALLY RETAINING BREAKDOWN VOLTAGE AND METHOD OF MANU |
Jan. 4, 2005 |
| 6777272 |
Method of manufacturing an active matrix display |
Aug. 17, 2004 |
| 6713323 |
Semiconductor device and method of manufacturing the same |
Mar. 30, 2004 |
| 6689645 |
Method of surface treatment on the improvement of electrical properties for doped silicon oxides (SiO2) films |
Feb. 10, 2004 |
| 6673640 |
Method of manufacturing semiconductor device for evaluation capable of evaluating crystal defect using in-line test by avoiding using preferential etching process |
Jan. 6, 2004 |
| 6670259 |
Inert atom implantation method for SOI gettering |
Dec. 30, 2003 |
| 6670258 |
Fabrication of low leakage-current backside illuminated photodiodes |
Dec. 30, 2003 |
| 6670225 |
Method of manufacturing a semiconductor device |
Dec. 30, 2003 |
| 6664144 |
Method of forming a semiconductor device using a group XV element for gettering by means of infrared light |
Dec. 16, 2003 |
| 6660606 |
Semiconductor-on-insulator annealing method |
Dec. 9, 2003 |
| 6635517 |
Use of disposable spacer to introduce gettering in SOI layer |
Oct. 21, 2003 |
| 6635516 |
Substrate dropping prevention mechanism and substrate inspection device provided therewith |
Oct. 21, 2003 |
| 6599816 |
Method of manufacturing silicon epitaxial wafer |
Jul. 29, 2003 |
| 6582995 |
Method for fabricating a shallow ion implanted microelectronic structure |
Jun. 24, 2003 |
| 6576501 |
Double side polished wafers having external gettering sites, and method of producing same |
Jun. 10, 2003 |
| 6551907 |
Metal-gettering method used in the manufacture of crystalline-Si TFT |
Apr. 22, 2003 |
| 6551866 |
Method of manufacturing a semiconductor memory device |
Apr. 22, 2003 |
| 6518102 |
Method for manufacturing transistor semiconductor devices with step of annealing to getter metal with phosphorous |
Feb. 11, 2003 |
| 6495891 |
Transistor having impurity concentration distribution capable of improving short channel effect |
Dec. 17, 2002 |
| 6468872 |
Method of fabricating a thin film transistor |
Oct. 22, 2002 |
| 6468841 |
Process for producing crystalline silicon thin film |
Oct. 22, 2002 |
| 6465873 |
Semiconductor gettering structures |
Oct. 15, 2002 |
| 6465288 |
Method of manufacturing a semiconductor device using a crystalline semiconductor film |
Oct. 15, 2002 |
| 6461943 |
Method of making semiconductor device |
Oct. 8, 2002 |
| 6391738 |
Semiconductor processing method and trench isolation method |
May. 21, 2002 |
| 6383848 |
Method of isolating a SRAM cell |
May. 7, 2002 |
| 6344092 |
Epitaxial semiconductor substrate, manufacturing method thereof, manufacturing method of semiconductor device and manufacturing method of solid-state imaging device |
Feb. 5, 2002 |
| 6339011 |
Method of forming semiconductive active area having a proximity gettering region therein and method of processing a monocrystalline silicon substrate to have a proximity gettering region |
Jan. 15, 2002 |
| 6337260 |
Use of knocked-on oxygen atoms for reduction of transient enhanced diffusion |
Jan. 8, 2002 |
| 6306733 |
Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor |
Oct. 23, 2001 |
| 6258635 |
Removal of metal contaminants from the surface of a silicon substrate by diffusion into the bulk |
Jul. 10, 2001 |
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