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Class Information
Number: 438/14
Name: Semiconductor device manufacturing: process > With measuring or testing
Description: Process having combined therewith a step of measuring or testing a condition of the process or of the device made thereby.

Sub-classes under this class:

Class Number Class Name Patents
438/17 Electrical characteristic sensed 1,370
438/16 Optical characteristic sensed 1,266
438/15 Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor 1,101

Patents under this class:

Patent Number Title Of Patent Date Issued
8712569 System for determining potential lot consolidation during manufacturing Apr. 29, 2014
8710489 Epitaxial substrate for electronic device, in which current flows in lateral direction and method of producing the same Apr. 29, 2014
8709833 Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations Apr. 29, 2014
8709832 Chip on film (COF) package having test line for testing electrical function of chip and method for manufacturing same Apr. 29, 2014
8704224 Semiconductor test structures Apr. 22, 2014
8703507 Method and apparatus to improve reliability of vias Apr. 22, 2014
8692367 Wafer-level packaged device having self-assembled resilient leads Apr. 8, 2014
8692222 Nonvolatile memory element and method of manufacturing the nonvolatile memory element Apr. 8, 2014
8691600 Method for testing through-silicon-via (TSV) structures Apr. 8, 2014
8691599 Parameter extraction method for semiconductor device Apr. 8, 2014
8689436 Two abutting sections of an align fixture together floatingly engaging an electronic component Apr. 8, 2014
8685760 Contact resistance test structure and method suitable for three-dimensional integrated circuits Apr. 1, 2014
8685759 E-chuck with automated clamped force adjustment and calibration Apr. 1, 2014
8683406 Method of defining shape and position of dummy active region by processing data using a patterning apparatus Mar. 25, 2014
8680881 Test method and interposer used therefor Mar. 25, 2014
8679975 Method for forming trenches in a semiconductor component Mar. 25, 2014
8679864 Method and system for determining semiconductor characteristics Mar. 25, 2014
8679861 Semiconductor chip repair by stacking of a base semiconductor chip and a repair semiconductor chip Mar. 25, 2014
8676538 Adjusting weighting of a parameter relating to fault detection based on a detected fault Mar. 18, 2014
8674355 Integrated circuit test units with integrated physical and electrical test regions Mar. 18, 2014
8673658 Fabricating method of semiconductor device Mar. 18, 2014
8673657 Semiconductor device including a circuit area and a monitor area having a plurality of monitor layers and method for manufacturing the same Mar. 18, 2014
8673656 Method and device for measuring temperature during deposition of semiconductor Mar. 18, 2014
8664013 Continuous processing system, continuous processing method, and program Mar. 4, 2014
8658438 Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices Feb. 25, 2014
8653629 Semiconductor device and wafer Feb. 18, 2014
8652859 Method for manufacturing light-emitting device and manufacturing apparatus of light-emitting device Feb. 18, 2014
8652857 Test apparatus, test method and manufacturing method for testing a device under test packaged in a test package Feb. 18, 2014
8652856 Method for use in making electronic devices having thin-film magnetic components Feb. 18, 2014
8647893 Method for post decomposition density balancing in integrated circuit layouts, related system and program product Feb. 11, 2014
8647466 Combinatorial evaluation of dry semiconductor processes Feb. 11, 2014
8642359 Electromagnetic coupling device of an electromagnetic radiation detector Feb. 4, 2014
RE44712 Lamp for rapid thermal processing chamber Jan. 21, 2014
8633039 Methods of combinatorial processing for screening multiple samples on a semiconductor substrate Jan. 21, 2014
8633038 Manufacturing method of semiconductor integrated circuit device Jan. 21, 2014
8633037 Semiconductor device Jan. 21, 2014
8627243 Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing Jan. 7, 2014
8624241 Semiconductor chip, stack-type semiconductor package Jan. 7, 2014
8623672 Prediction and scheduling server Jan. 7, 2014
8617908 Method for producing a substrate including a step of thinning with stop when a porous zone is detected Dec. 31, 2013
8614589 Method of fabricating semiconductor device Dec. 24, 2013
8614116 Germanium photodetector Dec. 24, 2013
8603840 Manufacturing method of semiconductor device Dec. 10, 2013
8603837 High productivity combinatorial workflow for post gate etch clean development Dec. 10, 2013
8601429 Method for connecting flip chip components Dec. 3, 2013
8600539 Substrate processing apparatus Dec. 3, 2013
8598891 Detection and mitigation of particle contaminants in MEMS devices Dec. 3, 2013
8597960 Semiconductor chip stacking for redundancy and yield improvement Dec. 3, 2013
8594963 In-line inspection yield prediction system Nov. 26, 2013
8593818 Network on chip building bricks Nov. 26, 2013

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