 |
|
 |
| |
 |
|
Class Information
Number: 438/14
Name: Semiconductor device manufacturing: process > With measuring or testing
Description: Process having combined therewith a step of measuring or testing a condition of the process or of the device made thereby.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619428 |
Wafer level burn-in and electrical test system and method |
Nov. 17, 2009 |
| 7618833 |
Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer |
Nov. 17, 2009 |
| 7618830 |
Rapid thermal processing apparatus and methods |
Nov. 17, 2009 |
| 7615422 |
Evaluation method of semiconductor device, manufacturing method of the semiconductor device, design management system of device comprising the semiconductor device, dose amount control program |
Nov. 10, 2009 |
| 7612491 |
Lamp for rapid thermal processing chamber |
Nov. 3, 2009 |
| 7608542 |
Large-size glass substrate for photomask and making method, computer-readable recording medium, and mother glass exposure method |
Oct. 27, 2009 |
| 7608469 |
Method of fabricating a chip |
Oct. 27, 2009 |
| 7605014 |
Method of fabricating resistive probe having self-aligned metal shield |
Oct. 20, 2009 |
| 7603598 |
Semiconductor device for testing semiconductor process and method thereof |
Oct. 13, 2009 |
| 7603194 |
Fabrication system and fabrication method |
Oct. 13, 2009 |
| 7602202 |
Semiconductor probe with high resolution resistive tip having doping control layer and method of fabricating the same |
Oct. 13, 2009 |
| 7601559 |
Apparatus and method for identifying proper orientation and electrical conductivity between a semiconductor device and a socket or contactor |
Oct. 13, 2009 |
| 7601549 |
Method of processing semiconductor wafers |
Oct. 13, 2009 |
| 7598730 |
Semiconductor wafer examination method and semiconductor chip manufacturing method |
Oct. 6, 2009 |
| 7598100 |
Manufacturing method of semiconductor integrated circuit device |
Oct. 6, 2009 |
| 7598099 |
Method of controlling a fabrication process using an iso-dense bias |
Oct. 6, 2009 |
| 7595205 |
Using reverse arrangement for trend test in statistical process control for manufacture of semiconductor integrated circuits |
Sep. 29, 2009 |
| 7595204 |
Methods and systems for determining trapped charge density in films |
Sep. 29, 2009 |
| 7588947 |
Method of evaluating semiconductor device and method of manufacturing semiconductor device |
Sep. 15, 2009 |
| 7587298 |
Diagnostic method for root-cause analysis of FET performance variation |
Sep. 8, 2009 |
| 7586608 |
Wafer-level testing of optical and optoelectronic chips |
Sep. 8, 2009 |
| 7586322 |
Test structure and method for measuring mismatch and well proximity effects |
Sep. 8, 2009 |
| 7585685 |
Method of determining wafer voltage in a plasma reactor from applied bias voltage and current and a pair of constants |
Sep. 8, 2009 |
| 7585684 |
Method and apparatus for detecting backside particles during wafer processing |
Sep. 8, 2009 |
| 7582542 |
Die attaching method |
Sep. 1, 2009 |
| 7582494 |
Device structures for reducing device mismatch due to shallow trench isolation induced oxides stresses |
Sep. 1, 2009 |
| 7582491 |
Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium |
Sep. 1, 2009 |
| 7579689 |
Integrated circuit package, and a method for producing an integrated circuit package having two dies with input and output terminals of integrated circuits of the dies directly addressable for |
Aug. 25, 2009 |
| 7579590 |
Method of measuring thin layers using SIMS |
Aug. 25, 2009 |
| 7579269 |
Microelectronic spring contact elements |
Aug. 25, 2009 |
| 7573256 |
Semiconductor wafer examination method and semiconductor chip manufacturing method |
Aug. 11, 2009 |
| 7572698 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean |
Aug. 11, 2009 |
| 7572649 |
Device transferring system, device transferring method, and display manufacturing method |
Aug. 11, 2009 |
| 7569403 |
Pattern evaluation method, manufacturing method of semiconductor device, correction method of mask pattern and manufacturing method of exposure mask |
Aug. 4, 2009 |
| 7568379 |
Method of measuring porosity by means of ellipsometry and device for implementing one such method |
Aug. 4, 2009 |
| 7564068 |
COG-typed organic electroluminescent cell |
Jul. 21, 2009 |
| 7562333 |
Method and process for generating an optical proximity correction model based on layout density |
Jul. 14, 2009 |
| 7560946 |
Method of acceptance for semiconductor devices |
Jul. 14, 2009 |
| 7560801 |
Rewiring substrate strip with several semiconductor component positions |
Jul. 14, 2009 |
| 7560292 |
Voltage contrast monitor for integrated circuit defects |
Jul. 14, 2009 |
| 7557596 |
Test assembly including a test die for testing a semiconductor product die |
Jul. 7, 2009 |
| 7556973 |
Manufacturing method for semiconductor device |
Jul. 7, 2009 |
| 7556972 |
Detection and characterization of SiCOH-based dielectric materials during device fabrication |
Jul. 7, 2009 |
| 7556971 |
Testing electromigration at multiple points of a single node |
Jul. 7, 2009 |
| 7553679 |
Method of determining plasma ion density, wafer voltage, etch rate and wafer current from applied bias voltage and current |
Jun. 30, 2009 |
| 7553678 |
Method for detecting semiconductor manufacturing conditions |
Jun. 30, 2009 |
| 7547561 |
Advanced process control model incorporating a target offset term |
Jun. 16, 2009 |
| 7547560 |
Defect identification system and method for repairing killer defects in semiconductor devices |
Jun. 16, 2009 |
| 7544617 |
Die scale control of chemical mechanical polishing |
Jun. 9, 2009 |
| 7544589 |
Wafer dividing method |
Jun. 9, 2009 |
|
|
|
 |
|
 |
|
| |
Randomly Featured Patents |
|
