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Class Information
Number: 438/13
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Electrical characteristic sensed > Altering electrical property by material removal
Description: Process whereby following or as a result of the electrical sensing step, an electrical property of the semiconductor substrate is altered by a material removal step (e.g., by etching).

Patents under this class:
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Patent Number Title Of Patent Date Issued
8673657 Semiconductor device including a circuit area and a monitor area having a plurality of monitor layers and method for manufacturing the same Mar. 18, 2014
8481342 Method of manufacturing semiconductor device, semiconductor device and semiconductor composite device Jul. 9, 2013
8445906 Method for sorting and acquiring semiconductor element, method for producing semiconductor device, and semiconductor device May. 21, 2013
8338192 High precision semiconductor chip and a method to construct the semiconductor chip Dec. 25, 2012
8236580 Copper contamination detection method and system for monitoring copper contamination Aug. 7, 2012
8137995 Double-sided semiconductor device and method of forming top-side and bottom-side interconnect structures Mar. 20, 2012
8012772 Substrate treating apparatus, substrate treating method, and method for manufacturing high-voltage device Sep. 6, 2011
8000928 Methods and apparatus for data analysis Aug. 16, 2011
7986146 Method and system for detecting existence of an undesirable particle during semiconductor fabrication Jul. 26, 2011
7985671 Structures and methods for improving solder bump connections in semiconductor devices Jul. 26, 2011
7981700 Semiconductor oxidation apparatus and method of producing semiconductor element Jul. 19, 2011
7946499 Method for initializing and/or personalizng a portable data carrier May. 24, 2011
7935549 Seminconductor device May. 3, 2011
7927892 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device Apr. 19, 2011
7910395 LED structure Mar. 22, 2011
7897416 Composition control for photovoltaic thin film manufacturing Mar. 1, 2011
7888142 Copper contamination detection method and system for monitoring copper contamination Feb. 15, 2011
7871843 Method of preparing light emitting device Jan. 18, 2011
7871829 Metal wiring of semiconductor device and method of fabricating the same Jan. 18, 2011
7844857 Writing data processing control apparatus, writing method, and writing apparatus Nov. 30, 2010
7749778 Addressable hierarchical metal wire test methodology Jul. 6, 2010
7736915 Method for neutralizing trapped charge in a charge accumulation layer of a semiconductor structure Jun. 15, 2010
7687298 Microelectromechanical device with integrated conductive shield Mar. 30, 2010
7662672 Manufacturing process of leadframe-based BGA packages Feb. 16, 2010
7625495 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Dec. 1, 2009
7605014 Method of fabricating resistive probe having self-aligned metal shield Oct. 20, 2009
7598161 Method of forming transistor devices with different threshold voltages using halo implant shadowing Oct. 6, 2009
7595257 Process of forming an electronic device including a barrier layer Sep. 29, 2009
7521338 Method for sawing semiconductor wafer Apr. 21, 2009
7465977 Method for producing a packaged integrated circuit Dec. 16, 2008
7456092 Self-releasing spring structures and methods Nov. 25, 2008
7425471 Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset Sep. 16, 2008
7413988 Method and apparatus for detecting planarization of metal films prior to clearing Aug. 19, 2008
7407861 Method and system for high-speed, precise micromachining an array of devices Aug. 5, 2008
7393701 Method of adjusting buried resistor resistance Jul. 1, 2008
7258838 Solid state molecular probe device Aug. 21, 2007
7223615 High emissivity capacitor structure May. 29, 2007
7192846 Methods and systems for processing a device, methods and systems for modeling same and the device Mar. 20, 2007
7125729 Method for opening the plastic housing of an electronic module Oct. 24, 2006
7105877 Conductive line structure Sep. 12, 2006
7070476 In-situ metalization monitoring using eddy current measurements during the process for removing the film Jul. 4, 2006
7043830 Method of forming conductive bumps May. 16, 2006
7029927 Method of repairing an integrated electronic circuit using a formed electrical isolation Apr. 18, 2006
6991944 Surface treatment for multi-layer wafers formed from layers of materials chosen from among semiconducting materials Jan. 31, 2006
6987053 Method of evaluating reticle pattern overlay registration Jan. 17, 2006
6954711 Test substrate reclamation method and apparatus Oct. 11, 2005
6951995 Method and system for high-speed, precise micromachining an array of devices Oct. 4, 2005
6900459 Apparatus for automatically positioning electronic dice within component packages May. 31, 2005
6881592 Method and device for minimizing multi-layer microscopic and macroscopic alignment errors Apr. 19, 2005
6709980 Using stabilizers in electroless solutions to inhibit plating of fuses Mar. 23, 2004

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