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Class Information
Number: 438/11
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Electrical characteristic sensed > Utilizing integral test element
Description: Process wherein the electrical property is sensed utilizing a specific test structure integral to the semiconductor substrate and which has no other function in the completed device.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8680523 Sensor for semiconductor degradation monitoring and modeling Mar. 25, 2014
8680881 Test method and interposer used therefor Mar. 25, 2014
8664113 Multilayer interconnect structure and method for integrated circuits Mar. 4, 2014
8638084 Bandgap bias circuit compenastion using a current density range and resistive loads Jan. 28, 2014
8624620 Test system and write wafer Jan. 7, 2014
8623772 Method of forming patterns of semiconductor device Jan. 7, 2014
8598579 Test structure for ILD void testing and contact resistance measurement in a semiconductor device Dec. 3, 2013
8557633 Electronic device and manufacturing method of the same Oct. 15, 2013
8524513 Measuring floating body voltage in silicon-on-insulator (SOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) Sep. 3, 2013
8518721 Dopant marker for precise recess control Aug. 27, 2013
8476630 Methods of adding pads and one or more interconnect layers to the passivated topside of a wafer including connections to at least a portion of the integrated circuit pads thereon Jul. 2, 2013
8461588 In-situ monitoring and method to determine accumulated printed wiring board thermal and/or vibration stress fatigue using a mirrored monitor chip and continuity circuit Jun. 11, 2013
8461011 Method for fabricating a back contact solar cell Jun. 11, 2013
8420411 Method for aligning wafer stack Apr. 16, 2013
8409882 Differential FET structures for electrical monitoring of overlay Apr. 2, 2013
8405078 Test device and a semiconductor integrated circuit device Mar. 26, 2013
8378698 Integrated circuit testing apparatus and method Feb. 19, 2013
8330160 Random number generating device Dec. 11, 2012
8330472 Device and method for detecting electrical properties of a sample of an excitable material Dec. 11, 2012
8323991 Method for detecting stress migration properties Dec. 4, 2012
8304791 Nitride-based semiconductor light emitting device and methods of manufacturing the same Nov. 6, 2012
8304766 Semiconductor chip with a bonding pad having contact and test areas Nov. 6, 2012
8257986 Testing wiring structure and method for forming the same Sep. 4, 2012
8219341 System and method for implementing wafer acceptance test ("WAT") advanced process control ("APC") with routing model Jul. 10, 2012
8211720 Method for detecting stress migration properties Jul. 3, 2012
8202740 Method of manufacturing a semiconductor device and a testing method of the same Jun. 19, 2012
8188469 Test device and a semiconductor integrated circuit device May. 29, 2012
8178876 Method and configuration for connecting test structures or line arrays for monitoring integrated circuit manufacturing May. 15, 2012
8120026 Testing wiring structure and method for forming the same Feb. 21, 2012
8097473 Alignment method, exposure method, pattern forming method, and exposure apparatus Jan. 17, 2012
8087155 Method of forming an integrated circuit with MM-wave antennas using conventional IC packaging Jan. 3, 2012
8088634 Methods of adding pads and one or more interconnect layers to the passivated topside of a wafer including connections to at least a portion of the integrated circuit pads thereon Jan. 3, 2012
8053898 Connection for off-chip electrostatic discharge protection Nov. 8, 2011
8000928 Methods and apparatus for data analysis Aug. 16, 2011
7989803 Manufacturing method for semiconductor chips and semiconductor wafer Aug. 2, 2011
7981700 Semiconductor oxidation apparatus and method of producing semiconductor element Jul. 19, 2011
7947978 Semiconductor chip with bond area May. 24, 2011
7935549 Seminconductor device May. 3, 2011
7932103 Integrated circuit system with MOS device Apr. 26, 2011
7927892 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device Apr. 19, 2011
7919869 Semiconductor device and method of visual inspection and apparatus for visual inspection Apr. 5, 2011
7892863 Measuring apparatus Feb. 22, 2011
7868606 Process variation on-chip sensor Jan. 11, 2011
7842519 In-line lithography and etch system Nov. 30, 2010
7844857 Writing data processing control apparatus, writing method, and writing apparatus Nov. 30, 2010
7807480 Test cells for semiconductor yield improvement Oct. 5, 2010
7807481 Method of semiconductor device protection, package of semiconductor device Oct. 5, 2010
7799583 System for separation of an electrically conductive connection Sep. 21, 2010
7785905 Dielectric actuator or sensor structure and method of making it Aug. 31, 2010
7749778 Addressable hierarchical metal wire test methodology Jul. 6, 2010

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