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Class Information
Number: 438/11
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Electrical characteristic sensed > Utilizing integral test element
Description: Process wherein the electrical property is sensed utilizing a specific test structure integral to the semiconductor substrate and which has no other function in the completed device.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8680523 |
Sensor for semiconductor degradation monitoring and modeling |
Mar. 25, 2014 |
| 8680881 |
Test method and interposer used therefor |
Mar. 25, 2014 |
| 8664113 |
Multilayer interconnect structure and method for integrated circuits |
Mar. 4, 2014 |
| 8638084 |
Bandgap bias circuit compenastion using a current density range and resistive loads |
Jan. 28, 2014 |
| 8624620 |
Test system and write wafer |
Jan. 7, 2014 |
| 8623772 |
Method of forming patterns of semiconductor device |
Jan. 7, 2014 |
| 8598579 |
Test structure for ILD void testing and contact resistance measurement in a semiconductor device |
Dec. 3, 2013 |
| 8557633 |
Electronic device and manufacturing method of the same |
Oct. 15, 2013 |
| 8524513 |
Measuring floating body voltage in silicon-on-insulator (SOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) |
Sep. 3, 2013 |
| 8518721 |
Dopant marker for precise recess control |
Aug. 27, 2013 |
| 8476630 |
Methods of adding pads and one or more interconnect layers to the passivated topside of a wafer including connections to at least a portion of the integrated circuit pads thereon |
Jul. 2, 2013 |
| 8461588 |
In-situ monitoring and method to determine accumulated printed wiring board thermal and/or vibration stress fatigue using a mirrored monitor chip and continuity circuit |
Jun. 11, 2013 |
| 8461011 |
Method for fabricating a back contact solar cell |
Jun. 11, 2013 |
| 8420411 |
Method for aligning wafer stack |
Apr. 16, 2013 |
| 8409882 |
Differential FET structures for electrical monitoring of overlay |
Apr. 2, 2013 |
| 8405078 |
Test device and a semiconductor integrated circuit device |
Mar. 26, 2013 |
| 8378698 |
Integrated circuit testing apparatus and method |
Feb. 19, 2013 |
| 8330160 |
Random number generating device |
Dec. 11, 2012 |
| 8330472 |
Device and method for detecting electrical properties of a sample of an excitable material |
Dec. 11, 2012 |
| 8323991 |
Method for detecting stress migration properties |
Dec. 4, 2012 |
| 8304791 |
Nitride-based semiconductor light emitting device and methods of manufacturing the same |
Nov. 6, 2012 |
| 8304766 |
Semiconductor chip with a bonding pad having contact and test areas |
Nov. 6, 2012 |
| 8257986 |
Testing wiring structure and method for forming the same |
Sep. 4, 2012 |
| 8219341 |
System and method for implementing wafer acceptance test ("WAT") advanced process control ("APC") with routing model |
Jul. 10, 2012 |
| 8211720 |
Method for detecting stress migration properties |
Jul. 3, 2012 |
| 8202740 |
Method of manufacturing a semiconductor device and a testing method of the same |
Jun. 19, 2012 |
| 8188469 |
Test device and a semiconductor integrated circuit device |
May. 29, 2012 |
| 8178876 |
Method and configuration for connecting test structures or line arrays for monitoring integrated circuit manufacturing |
May. 15, 2012 |
| 8120026 |
Testing wiring structure and method for forming the same |
Feb. 21, 2012 |
| 8097473 |
Alignment method, exposure method, pattern forming method, and exposure apparatus |
Jan. 17, 2012 |
| 8087155 |
Method of forming an integrated circuit with MM-wave antennas using conventional IC packaging |
Jan. 3, 2012 |
| 8088634 |
Methods of adding pads and one or more interconnect layers to the passivated topside of a wafer including connections to at least a portion of the integrated circuit pads thereon |
Jan. 3, 2012 |
| 8053898 |
Connection for off-chip electrostatic discharge protection |
Nov. 8, 2011 |
| 8000928 |
Methods and apparatus for data analysis |
Aug. 16, 2011 |
| 7989803 |
Manufacturing method for semiconductor chips and semiconductor wafer |
Aug. 2, 2011 |
| 7981700 |
Semiconductor oxidation apparatus and method of producing semiconductor element |
Jul. 19, 2011 |
| 7947978 |
Semiconductor chip with bond area |
May. 24, 2011 |
| 7935549 |
Seminconductor device |
May. 3, 2011 |
| 7932103 |
Integrated circuit system with MOS device |
Apr. 26, 2011 |
| 7927892 |
Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device |
Apr. 19, 2011 |
| 7919869 |
Semiconductor device and method of visual inspection and apparatus for visual inspection |
Apr. 5, 2011 |
| 7892863 |
Measuring apparatus |
Feb. 22, 2011 |
| 7868606 |
Process variation on-chip sensor |
Jan. 11, 2011 |
| 7842519 |
In-line lithography and etch system |
Nov. 30, 2010 |
| 7844857 |
Writing data processing control apparatus, writing method, and writing apparatus |
Nov. 30, 2010 |
| 7807480 |
Test cells for semiconductor yield improvement |
Oct. 5, 2010 |
| 7807481 |
Method of semiconductor device protection, package of semiconductor device |
Oct. 5, 2010 |
| 7799583 |
System for separation of an electrically conductive connection |
Sep. 21, 2010 |
| 7785905 |
Dielectric actuator or sensor structure and method of making it |
Aug. 31, 2010 |
| 7749778 |
Addressable hierarchical metal wire test methodology |
Jul. 6, 2010 |
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