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Class Information
Number: 438/10
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Electrical characteristic sensed
Description: Process wherein the sensed condition is an electrical property of the device or an electrical property of the process.

Sub-classes under this class:

Class Number Class Name Patents
438/13 Altering electrical property by material removal 97
438/12 And removal of defect 145
438/11 Utilizing integral test element 235

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8691597 Method for manufacturing a semiconductor device including application of a plating voltage Apr. 8, 2014
8691598 Dual-loop control for laser annealing of semiconductor wafers Apr. 8, 2014
8686711 High-frequency measuring device and high-frequency measuring device calibration method Apr. 1, 2014
8679863 Fine tuning highly resistive substrate resistivity and structures thereof Mar. 25, 2014
8658436 Method for separating and transferring IC chips Feb. 25, 2014
8604449 Glitch control during implantation Dec. 10, 2013
8580586 Memory arrays using nanotube articles with reprogrammable resistance Nov. 12, 2013
8575664 Chemically-sensitive sensor array calibration circuitry Nov. 5, 2013
8546153 Resin dispensing apparatus for light emitting device package and method of manufacturing light emitting device package using the same Oct. 1, 2013
8538571 Substrate processing system, group managing apparatus, and method of analyzing abnormal state Sep. 17, 2013
8530941 Methods and apparatus for measuring analytes using large scale FET arrays Sep. 10, 2013
8524513 Measuring floating body voltage in silicon-on-insulator (SOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) Sep. 3, 2013
8519456 Solid-state image pickup device, image pickup apparatus including the same, and method of manufacturing the same Aug. 27, 2013
8519448 Chemically-sensitive array with active and reference sensors Aug. 27, 2013
8519447 Ion sensitive sensor with multilayer construction in the sensor region Aug. 27, 2013
8501631 Plasma processing system control based on RF voltage Aug. 6, 2013
8502372 Low-cost 3D face-to-face out assembly Aug. 6, 2013
8502278 Chemically-sensitive sample and hold sensors Aug. 6, 2013
8492799 Methods and apparatus for detecting molecular interactions using FET arrays Jul. 23, 2013
8486761 Hybrid combination of substrate and carrier mounted light emitting devices Jul. 16, 2013
8486724 Wafer level reflector for LED packaging Jul. 16, 2013
8470613 Flexible packaging for chip-on-chip and package-on-package technologies Jun. 25, 2013
8455269 Method for recovering an on-state forward voltage and, shrinking stacking faults in bipolar semiconductor devices, and the bipolar semiconductor devices Jun. 4, 2013
8455306 Methods of forming voltage limiting devices Jun. 4, 2013
8450121 Method of manufacturing an organic light emitting display May. 28, 2013
8445906 Method for sorting and acquiring semiconductor element, method for producing semiconductor device, and semiconductor device May. 21, 2013
8445945 Low noise chemically-sensitive field effect transistors May. 21, 2013
8445988 Apparatus and method for plasma processing May. 21, 2013
8441044 Methods for manufacturing low noise chemically-sensitive field effect transistors May. 14, 2013
8436421 Semiconductor device with trench gate transistors and method for production thereof May. 7, 2013
8426898 Methods and apparatus for measuring analytes using large scale FET arrays Apr. 23, 2013
8426899 Methods and apparatus for measuring analytes using large scale FET arrays Apr. 23, 2013
8415716 Chemically sensitive sensors with feedback circuits Apr. 9, 2013
8396682 Semiconductor device Mar. 12, 2013
8355810 Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility Jan. 15, 2013
8349625 Method of sensing a high voltage Jan. 8, 2013
8349623 Method and apparatus for manufacturing thin film photoelectric conversion module Jan. 8, 2013
8349167 Methods and apparatus for detecting molecular interactions using FET arrays Jan. 8, 2013
8330472 Device and method for detecting electrical properties of a sample of an excitable material Dec. 11, 2012
8329479 Information managing method, information managing apparatus and substrate processing system Dec. 11, 2012
8329054 Plasma processing apparatus and plasma processing method Dec. 11, 2012
8323991 Method for detecting stress migration properties Dec. 4, 2012
8306757 Methods and apparatus for measuring analytes using large scale FET arrays Nov. 6, 2012
8301288 Optimized scheduling based on sensitivity data Oct. 30, 2012
8299390 Apparatus and method for controlling plasma density profile Oct. 30, 2012
8288174 Electrostatic post exposure bake apparatus and method Oct. 16, 2012
8268642 Method for removing electricity and method for manufacturing semiconductor device Sep. 18, 2012
8269261 Methods and apparatus for measuring analytes using large scale FET arrays Sep. 18, 2012
8262875 Sensor arrangement and method for detecting a sensor event Sep. 11, 2012
8264014 Methods and apparatus for measuring analytes using large scale FET arrays Sep. 11, 2012

1 2 3 4 5 6 7 8

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