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Class Information
Number: 430/316
Name: Radiation imagery chemistry: process, composition, or product thereof > Imaging affecting physical property of radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product > Making electrical device > With formation of resist image, and etching of substrate or material deposition > Multiple etching of substrate
Description: Processes wherein portions of the medium are removed using more than one etching procedure.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8693074 MOEMS apparatus and a method for manufacturing same Apr. 8, 2014
8680671 Self-aligned double patterning for memory and other microelectronic devices Mar. 25, 2014
8673544 Method of forming openings Mar. 18, 2014
8658051 Lithography resolution improving method Feb. 25, 2014
8623587 Residue removing liquid composition and method for cleaning semiconductor element using same Jan. 7, 2014
8609323 System for producing patterned silicon carbide structures Dec. 17, 2013
8603732 Resist underlayer film-forming composition, process for forming resist underlayer film and patterning process Dec. 10, 2013
8598041 Method for positioning spacers in pitch multiplication Dec. 3, 2013
8563227 Method and system for exposure of a phase shift mask Oct. 22, 2013
8551691 Method of forming mask pattern Oct. 8, 2013
8455162 Alignment marks for multi-exposure lithography Jun. 4, 2013
8450048 Method for forming resist underlayer film, patterning process using the same, and composition for the resist underlayer film May. 28, 2013
8445185 Method of manufacturing piezoelectric vibrating reed, piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece May. 21, 2013
8440576 Method for pitch reduction in integrated circuit fabrication May. 14, 2013
8440388 Method to restore hydrophobicity in dielectric films and materials May. 14, 2013
8426112 Resist underlayer film forming composition containing polymer having nitrogen-containing silyl group Apr. 23, 2013
8409787 Method of forming a pattern in a semiconductor device and method of forming a gate using the same Apr. 2, 2013
8399182 Method of fabricating liquid crystal display device Mar. 19, 2013
8361337 Method of producing nanopatterned templates Jan. 29, 2013
8313889 Double patterning method using metallic compound mask layer Nov. 20, 2012
8309371 System and method for creating a flat wavefront using a photonic crystal Nov. 13, 2012
8304172 Semiconductor device fabrication using a multiple exposure and block mask approach to reduce design rule violations Nov. 6, 2012
8288081 Method and system for exposure of a phase shift mask Oct. 16, 2012
8263321 Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer Sep. 11, 2012
8257908 Coating-type underlayer coating forming composition for lithography containing vinylnaphthalene resin derivative Sep. 4, 2012
8252516 Manufacturing a narrow track read head Aug. 28, 2012
8241823 Method of fabrication of a semiconductor device having reduced pitch Aug. 14, 2012
8222075 Nonvolatile semiconductor memory device using a variable resistance film and method of manufacturing the same Jul. 17, 2012
8178405 Resistor random access memory cell device May. 15, 2012
8178284 Method of forming pattern May. 15, 2012
8178287 Photoresist composition and method of forming a resist pattern May. 15, 2012
8175736 Method and system for performing a chemical oxide removal process May. 8, 2012
8168374 Method of forming a contact hole May. 1, 2012
8148037 Optical component for EUVL and smoothing method thereof Apr. 3, 2012
8110506 Methods of forming fine patterns in semiconductor devices Feb. 7, 2012
8048615 Silicon-containing resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating Nov. 1, 2011
8012674 Efficient pitch multiplication process Sep. 6, 2011
8001685 Method for manufacturing probe card needles Aug. 23, 2011
8003305 Method for patterning a semiconductor wafer Aug. 23, 2011
7989145 Method for forming fine pattern of semiconductor device Aug. 2, 2011
7989147 Method for fabricating liquid crystal display device Aug. 2, 2011
7981591 Semiconductor buried grating fabrication method Jul. 19, 2011
7977019 Semiconductor device manufacturing method, semiconductor device manufacturing equipment, and computer readable medium Jul. 12, 2011
7972755 Substrate processing method and substrate processing system Jul. 5, 2011
7968270 Process of making a semiconductor device using multiple antireflective materials Jun. 28, 2011
7955784 Photoresist composition and method of manufacturing a thin-film transistor substrate using the same Jun. 7, 2011
7947432 Pattern formation method May. 24, 2011
7943285 Pattern formation method May. 17, 2011
7914973 Method of forming a pattern in a semiconductor device and method of forming a gate using the same Mar. 29, 2011
7910289 Use of dual mask processing of different composition such as inorganic/organic to enable a single poly etch using a two-print-two-etch approach Mar. 22, 2011

1 2 3 4 5 6 7 8 9 10

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