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Class Information
Number: 430/314
Name: Radiation imagery chemistry: process, composition, or product thereof > Imaging affecting physical property of radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product > Making electrical device > With formation of resist image, and etching of substrate or material deposition > Etching of substrate and material deposition
Description: Processes wherein portions of the medium are removed and material is deposited on the medium.

Patents under this class:

Patent Number Title Of Patent Date Issued
8709702 Methods to fabricate a photoactive substrate suitable for microfabrication Apr. 29, 2014
8703395 Pattern-forming method Apr. 22, 2014
8703394 Method for forming thin film pattern and flat display device having the same Apr. 22, 2014
8673544 Method of forming openings Mar. 18, 2014
8673543 Method for manufacturing semiconductor device Mar. 18, 2014
8663898 Resist underlayer film composition and patterning process using the same Mar. 4, 2014
8658346 Pattern forming process, chemically amplified positive resist composition, and resist-modifying composition Feb. 25, 2014
8652763 Method for fabricating dual damascene profiles using sub pixel-voting lithography and devices made by same Feb. 18, 2014
8652339 Patterned lift-off of thin films deposited at high temperatures Feb. 18, 2014
8637225 Magnetic recording medium and magnetic recording/reproducing apparatus Jan. 28, 2014
8609323 System for producing patterned silicon carbide structures Dec. 17, 2013
8574820 Method for fabricating semiconductor device Nov. 5, 2013
8574819 Method for forming fine pattern Nov. 5, 2013
8563226 Mould for galvanoplasty and method of fabricating the same Oct. 22, 2013
8563225 Forming a self-aligned hard mask for contact to a tunnel junction Oct. 22, 2013
8557506 Method of fabricating a metallic microstructure and microstructure obtained via the method Oct. 15, 2013
8551691 Method of forming mask pattern Oct. 8, 2013
8551690 Methods of forming patterns Oct. 8, 2013
8551689 Methods of manufacturing semiconductor devices using photolithography Oct. 8, 2013
8535858 Photomask and method for forming overlay mark using the same Sep. 17, 2013
8530145 Method for manufacturing a semiconductor device Sep. 10, 2013
8524851 Silicon-based hardmask composition and process of producing semiconductor integrated circuit device using the same Sep. 3, 2013
8524439 Silsesquioxane resin systems with base additives bearing electron-attracting functionalities Sep. 3, 2013
8497060 Manufacturing method of semiconductor device Jul. 30, 2013
8465908 Method for forming fine patterns of semiconductor device Jun. 18, 2013
8450048 Method for forming resist underlayer film, patterning process using the same, and composition for the resist underlayer film May. 28, 2013
8440576 Method for pitch reduction in integrated circuit fabrication May. 14, 2013
8440388 Method to restore hydrophobicity in dielectric films and materials May. 14, 2013
8426117 Mask pattern forming method, fine pattern forming method, and film deposition apparatus Apr. 23, 2013
8420947 Integrated circuit system with ultra-low k dielectric and method of manufacture thereof Apr. 16, 2013
8409787 Method of forming a pattern in a semiconductor device and method of forming a gate using the same Apr. 2, 2013
8399181 Methods of fabricating photomasks for improving damascene wire uniformity without reducing performance Mar. 19, 2013
8394576 Method for patterning a photosensitive layer Mar. 12, 2013
8383327 Method for producing an electro-optical printed circuit board with optical waveguide structures Feb. 26, 2013
8377632 Method of reducing microloading effect Feb. 19, 2013
8377316 Structure and method for creating surface texture of compliant coatings on piezo ink jet imaging drums Feb. 19, 2013
8338085 Method to align mask patterns Dec. 25, 2012
8334093 Method and system for providing a perpendicular magnetic recording head Dec. 18, 2012
8334090 Mixed lithography with dual resist and a single pattern transfer Dec. 18, 2012
8329385 Method of manufacturing a semiconductor device Dec. 11, 2012
8323860 Solid-state imaging device producing method and exposure mask Dec. 4, 2012
8313890 Antireflective coating composition, antireflective coating, and patterning process Nov. 20, 2012
8313889 Double patterning method using metallic compound mask layer Nov. 20, 2012
8309371 System and method for creating a flat wavefront using a photonic crystal Nov. 13, 2012
8304260 Method of manufacturing semiconductor device Nov. 6, 2012
8304175 Patterning method Nov. 6, 2012
8304174 Method for fabricating semiconductor device Nov. 6, 2012
8294034 Circuit board and process for fabricating the same Oct. 23, 2012
8288082 Method of fabricating triode-structure field-emission device Oct. 16, 2012
8283256 Methods of forming microdevice substrates using double-sided alignment techniques Oct. 9, 2012

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