Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Chemistry
Class Information
Number: 430/313
Name: Radiation imagery chemistry: process, composition, or product thereof > Imaging affecting physical property of radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product > Making electrical device > With formation of resist image, and etching of substrate or material deposition
Description: Processes wherein the image is developed to form a resist image in the medium, and portions of the medium not covered by the resist image are removed or have material deposited thereon.










Sub-classes under this class:

Class Number Class Name Patents
430/314 Etching of substrate and material deposition 1,201
430/317 Insulative or nonmetallic dielectric etched 798
430/315 Material deposition only 862
430/318 Metal etched 723
430/316 Multiple etching of substrate 500


Patents under this class:

Patent Number Title Of Patent Date Issued
8709706 Methods and apparatus for performing multiple photoresist layer development and etching processes Apr. 29, 2014
8709701 Resist underlayer film forming composition for lithography, containing aromatic fused ring-containing resin Apr. 29, 2014
8709700 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Apr. 29, 2014
8703392 Method and apparatus for developing process Apr. 22, 2014
8685626 Method of measuring a characteristic Apr. 1, 2014
8680671 Self-aligned double patterning for memory and other microelectronic devices Mar. 25, 2014
8679981 Method for self-aligned doubled patterning lithography Mar. 25, 2014
8663905 Pattern-forming method Mar. 4, 2014
8663901 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Mar. 4, 2014
8663898 Resist underlayer film composition and patterning process using the same Mar. 4, 2014
8658346 Pattern forming process, chemically amplified positive resist composition, and resist-modifying composition Feb. 25, 2014
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8652751 Resist composition, method for forming resist pattern, and method for producing electronic device Feb. 18, 2014
8652750 Silicon-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method Feb. 18, 2014
8647816 Method of manufacturing electronic device Feb. 11, 2014
8647810 Resist lower layer film-forming composition, polymer, resist lower layer film, pattern-forming method, and method of producing semiconductor device Feb. 11, 2014
8647521 Method of forming micro pattern of semiconductor device Feb. 11, 2014
8628910 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Jan. 14, 2014
8628909 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Jan. 14, 2014
8623584 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Jan. 7, 2014
8623458 Methods of directed self-assembly, and layered structures formed therefrom Jan. 7, 2014
8618002 Resist pattern formating method Dec. 31, 2013
8617791 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Dec. 31, 2013
8617653 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent Dec. 31, 2013
8609323 System for producing patterned silicon carbide structures Dec. 17, 2013
8609322 Process of making a lithographic structure using antireflective materials Dec. 17, 2013
8609305 Methods of forming a photolithography reticle Dec. 17, 2013
8603732 Resist underlayer film-forming composition, process for forming resist underlayer film and patterning process Dec. 10, 2013
8585915 Methods for fabricating sub-resolution alignment marks on semiconductor structures Nov. 19, 2013
8574971 Method of manufacturing a thin-film transistor and method of manufacturing a display substrate using the same Nov. 5, 2013
8574816 Positive resist composition and patterning process Nov. 5, 2013
8568960 Multiple exposure photolithography methods Oct. 29, 2013
8568604 CMOS gate structures fabricated by selective oxidation Oct. 29, 2013
8563410 End-cut first approach for critical dimension control Oct. 22, 2013
8552538 Methods of eliminating pattern collapse on photoresist patterns Oct. 8, 2013
8551684 Polymer for forming resist protection film, composition for forming resist protection film, and method of forming patterns of semiconductor devices using the composition Oct. 8, 2013
8546066 Method for electroconductive pattern formation Oct. 1, 2013
8535858 Photomask and method for forming overlay mark using the same Sep. 17, 2013
8530145 Method for manufacturing a semiconductor device Sep. 10, 2013
8524439 Silsesquioxane resin systems with base additives bearing electron-attracting functionalities Sep. 3, 2013
8518630 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Aug. 27, 2013
8518278 Method of drying substrate, and method of manufacturing image display apparatus using the same Aug. 27, 2013
8507186 Patterning methods and masks Aug. 13, 2013
8507183 Method of manufacturing a coordinate detector Aug. 13, 2013
8501386 Silicon-containing film-forming composition, silicon-containing film-formed substrate, and patterning process Aug. 6, 2013
8497060 Manufacturing method of semiconductor device Jul. 30, 2013
8492079 Method of forming a pattern of an array of shapes including a blocked region Jul. 23, 2013
8492076 Method of manufacturing carbon nanotube device array Jul. 23, 2013
8486840 Inverse spacer processing Jul. 16, 2013
8486610 Mask material conversion Jul. 16, 2013











 
 
  Recently Added Patents
Under bump passive components in wafer level packaging
Semiconductor device and method for fabricating the same
Display screen with graphical user interface
Device for maneuvering a vehicle using maneuvering moves using at least one trajectory
Filtering method for improving the data quality of geometric tire measurements
Label printer
Solid-state image pickup element, method of manufacturing the same, and image pickup apparatus including the same
  Randomly Featured Patents
Method for making a scissoring-type current-perpendicular-to-the-plane (CPP) magnetoresistive sensor
Security system with extraction, reconstruction and secure recovery and storage of data
Inner-cam type distribution fuel injection pump
Battery casing with an ejector
Applying interpretations of chemical names
Rear combination lamp for vehicle
Method and apparatus for feeding wire to a welding arc
Cytological sampling method and device
Child safety harness
Using additional information provided in session requests