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Class Information
Number: 430/312
Name: Radiation imagery chemistry: process, composition, or product thereof > Imaging affecting physical property of radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product > Making electrical device > Including multiple resist image formation
Description: Processes wherein the imaged medium is developed to form more than one resist image.

Patents under this class:

Patent Number Title Of Patent Date Issued
8691495 Photoresist pattern forming method, and microlens array forming method Apr. 8, 2014
8685633 Method for optimizing wafer edge patterning Apr. 1, 2014
8685615 Photosensitive resist underlayer film forming composition Apr. 1, 2014
8658346 Pattern forming process, chemically amplified positive resist composition, and resist-modifying composition Feb. 25, 2014
8652764 Method for manufacturing a piezoelectric membrane type device Feb. 18, 2014
8623458 Methods of directed self-assembly, and layered structures formed therefrom Jan. 7, 2014
8617797 Pattern forming method, semiconductor device manufacturing method and phase shift photomask having dummy gate patterns Dec. 31, 2013
8617653 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent Dec. 31, 2013
8603732 Resist underlayer film-forming composition, process for forming resist underlayer film and patterning process Dec. 10, 2013
8574971 Method of manufacturing a thin-film transistor and method of manufacturing a display substrate using the same Nov. 5, 2013
8563410 End-cut first approach for critical dimension control Oct. 22, 2013
8563226 Mould for galvanoplasty and method of fabricating the same Oct. 22, 2013
8563202 Single field zero mask for increased alignment accuracy in field stitching Oct. 22, 2013
8535858 Photomask and method for forming overlay mark using the same Sep. 17, 2013
8530145 Method for manufacturing a semiconductor device Sep. 10, 2013
8518632 Method of manufacturing electroforming mold, electroforming mold, and method of manufacturing electroformed component Aug. 27, 2013
8507187 Multi-exposure lithography employing a single anti-reflective coating layer Aug. 13, 2013
8507185 Methods of forming electronic devices Aug. 13, 2013
8507184 Method of manufacturing semiconductor device Aug. 13, 2013
8507173 Patterning process Aug. 13, 2013
8497060 Manufacturing method of semiconductor device Jul. 30, 2013
8492075 Methods of forming electronic devices Jul. 23, 2013
8492072 Method for marking objects Jul. 23, 2013
8492068 Methods of forming electronic devices Jul. 23, 2013
8486605 Positive resist composition and method of forming resist pattern Jul. 16, 2013
8465908 Method for forming fine patterns of semiconductor device Jun. 18, 2013
8465901 Methods of adjusting dimensions of resist patterns Jun. 18, 2013
8460857 Manufacturing method for wiring Jun. 11, 2013
8455179 Method of forming semiconductor device by using reduction projection aligner Jun. 4, 2013
8455162 Alignment marks for multi-exposure lithography Jun. 4, 2013
8450045 Pattern forming method May. 28, 2013
8435722 Method for fabricating liquid crystal display device May. 7, 2013
8431330 Surface-treating agent for pattern formation and pattern-forming method using the surface-treating agent Apr. 30, 2013
8431329 Self-aligned spacer multiple patterning methods Apr. 30, 2013
8431291 Intensity selective exposure photomask Apr. 30, 2013
8426115 Patterning process and resist composition Apr. 23, 2013
8423923 Optical proximity correction method Apr. 16, 2013
8419950 Pattern forming method Apr. 16, 2013
8415083 On-track process for patterning hardmask by multiple dark field exposures Apr. 9, 2013
8404430 Multi-chip reticle photomasks Mar. 26, 2013
8399180 Three dimensional integration with through silicon vias having multiple diameters Mar. 19, 2013
8399174 Method of forming fine patterns using a block copolymer Mar. 19, 2013
8394573 Photoresist compositions and methods for shrinking a photoresist critical dimension Mar. 12, 2013
8394571 Methods of forming electronic devices Mar. 12, 2013
8361684 Method for patterning trenches with varying dimension Jan. 29, 2013
8361335 Methods for fabricating semiconductor devices Jan. 29, 2013
8343716 Method of forming variable patterns using a reticle Jan. 1, 2013
8338310 Method of forming line/space patterns Dec. 25, 2012
8338085 Method to align mask patterns Dec. 25, 2012
8338083 Methods of forming electronic devices Dec. 25, 2012

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