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Class Information
Number: 430/311
Name: Radiation imagery chemistry: process, composition, or product thereof > Imaging affecting physical property of radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product > Making electrical device
Description: Processes wherein the image is used as or to form an electrical device.


Sub-classes under this class:

Class Number Class Name Patents
430/312 Including multiple resist image formation 962
430/319 Named electrical device 696
430/313 With formation of resist image, and etching of substrate or material deposition 1,927


Patents under this class:

Patent Number Title Of Patent Date Issued
7625692 Yield and line width performance for liquid polymers and other materials Dec. 1, 2009
7625677 Half-tone stacked film, photomask-blank, photomask and fabrication method thereof Dec. 1, 2009
7623220 Source optimization for image fidelity and throughput Nov. 24, 2009
7622246 Contrast enhancing layers Nov. 24, 2009
7622244 Method for contaminant removal Nov. 24, 2009
7622243 Photosensitive element, resist pattern formation method and printed wiring board production method Nov. 24, 2009
7622240 Low blur molecular resist Nov. 24, 2009
7619716 Exposure method Nov. 17, 2009
7618767 Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method Nov. 17, 2009
7618751 RET for optical maskless lithography Nov. 17, 2009
7616383 Lithographic apparatus and device manufacturing method Nov. 10, 2009
7615335 Imaging methods Nov. 10, 2009
7615332 Photosensitive compound, photosensitive composition, resist pattern forming method, and device production process Nov. 10, 2009
7614146 Method for fabricating circuit board structure Nov. 10, 2009
7612864 Exposure apparatus and method Nov. 3, 2009
7611826 Photosensitive resin composition controlling solubility and pattern formation method of double-layer structure using the same Nov. 3, 2009
7611825 Photolithography method to prevent photoresist pattern collapse Nov. 3, 2009
7611820 Positive resist composition and pattern-forming method using the same Nov. 3, 2009
7611819 Resist composition, method for forming resist pattern, and semiconductor device and method for manufacturing the same Nov. 3, 2009
7611818 Photosensitive resin composition, photosensitive element, resist pattern forming method and process for manufacturing printed circuit board Nov. 3, 2009
7608390 Top antireflective coating composition containing hydrophobic and acidic groups Oct. 27, 2009
7608389 Photoresists processable under biocompatible conditions for multi-biomolecule patterning Oct. 27, 2009
7608386 Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same Oct. 27, 2009
7608383 UV radiation blocking protective layers compatible with thick film pastes Oct. 27, 2009
7605390 Programmable photolithographic mask based on semiconductor nano-particle optical modulators Oct. 20, 2009
7604928 Patterning method and methods for producing electro-optic device, color filter, illuminant, and thin-film transistor Oct. 20, 2009
7604927 Methods of patterning using photomasks including shadowing elements therein and related systems Oct. 20, 2009
7604926 Method of manufacturing a semiconductor device Oct. 20, 2009
7604925 Exposure apparatus and method Oct. 20, 2009
7604922 Process of surface treatment, surface treating device, surface treated plate, and electro-optic device, and electronic equipment Oct. 20, 2009
7604912 Local flare correction Oct. 20, 2009
7604910 Exposure mask, method of forming resist pattern and method of forming thin film pattern Oct. 20, 2009
7604909 Method for improved manufacturability and patterning of sub-wavelength contact hole mask Oct. 20, 2009
7604908 Fine pattern forming method Oct. 20, 2009
7604906 Films for prevention of crystal growth on fused silica substrates for semiconductor lithography Oct. 20, 2009
7603001 Method and apparatus for providing back-lighting in an interferometric modulator display device Oct. 13, 2009
7601486 Ultra dark polymer Oct. 13, 2009
7601485 Exposure method Oct. 13, 2009
7601483 Anti-reflective coatings using vinyl ether crosslinkers Oct. 13, 2009
7601471 Apparatus and method for correcting pattern dimension and photo mask and test photo mask Oct. 13, 2009
7601466 System and method for photolithography in semiconductor manufacturing Oct. 13, 2009
7598023 Process for fabricating micro-display Oct. 6, 2009
7598022 Positive and negative dual function magnetic resist lithography Oct. 6, 2009
7598021 High resolution printing technique Oct. 6, 2009
7598020 Exposure apparatus and method Oct. 6, 2009
7598019 Method for cleavage of labile functional groups from chemical compounds Oct. 6, 2009
7595496 Optimized correction of wafer thermal deformations in a lithographic process Sep. 29, 2009
7595145 Method of forming pattern of semiconductor device Sep. 29, 2009
7595144 Sulfonate-containing anti-reflective coating forming composition for lithography Sep. 29, 2009
7595143 Photoresist composition and method of manufacturing a thin-film transistor substrate using the same Sep. 29, 2009



 
 
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