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Class Information
Number: 427/589
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Chemical vapor deposition (e.g., electron beam or heating using ir, inductance, resistance, etc.) > Resistance or induction heating > Silicon or semiconductor material containing coating > Silicon carbide
Description: Processes wherein the silicon utilized in the coating is silicon carbide.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7482060 |
Silicon oxycarbide coatings having durable hydrophilic properties |
Jan. 27, 2009 |
| 7022545 |
Production method of SiC monitor wafer |
Apr. 4, 2006 |
| 6746776 |
Laminated structure, and manufacturing method thereof |
Jun. 8, 2004 |
| 6436361 |
Silicon carbide and process for its production |
Aug. 20, 2002 |
| 6407013 |
Soft plasma oxidizing plasma method for forming carbon doped silicon containing dielectric layer with enhanced adhesive properties |
Jun. 18, 2002 |
| 6365527 |
Method for depositing silicon carbide in semiconductor devices |
Apr. 2, 2002 |
| 6331362 |
Refractory composite materials protected against oxidising at high temperature, precursors of the said materials, their preparation |
Dec. 18, 2001 |
| 6268061 |
Objects constructed of silicon carbide |
Jul. 31, 2001 |
| 6221154 |
Method for growing beta-silicon carbide nanorods, and preparation of patterned field-emitters by chemical vapor depositon (CVD) |
Apr. 24, 2001 |
| 6033533 |
Method of forming films over inner surface of cylindrical member |
Mar. 7, 2000 |
| 5854495 |
Preparation of nucleated silicon surfaces |
Dec. 29, 1998 |
| 5738908 |
Method of densifying porous substrates by chemical vapor infiltration of silicon carbide |
Apr. 14, 1998 |
| 5738951 |
Method of manufacturing a composite material with lamellar interphase between reinforcing fibers and matrix, and material obtained |
Apr. 14, 1998 |
| 5733611 |
Method for densification of porous billets |
Mar. 31, 1998 |
| 5448418 |
Mirror for SOR |
Sep. 5, 1995 |
| 5319479 |
Deposited multi-layer device with a plastic substrate having an inorganic thin film layer |
Jun. 7, 1994 |
| 5284544 |
Apparatus for and method of surface treatment for microelectronic devices |
Feb. 8, 1994 |
| 4999228 |
Silicon carbide diffusion tube for semi-conductor |
Mar. 12, 1991 |
| 4900483 |
Method of producing isotropically reinforced net-shape microcomposites |
Feb. 13, 1990 |
| 4842888 |
Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors |
Jun. 27, 1989 |
| 4810526 |
Method of coating a recrystallized silicon carbide body with a compact silicon carbide coating |
Mar. 7, 1989 |
| 4565711 |
Method of and apparatus for the coating of quartz crucibles with protective layers |
Jan. 21, 1986 |
| 4426405 |
Method for producing improved silicon carbide resistance elements |
Jan. 17, 1984 |
| 4401689 |
Radiation heated reactor process for chemical vapor deposition on substrates |
Aug. 30, 1983 |
| 3985917 |
Method of depositing material on a heated substrate |
Oct. 12, 1976 |
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