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Class Information
Number: 427/586
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Chemical vapor deposition (e.g., electron beam or heating using ir, inductance, resistance, etc.) > Pyrolytic use of laser or focused light (e.g., ir, uv lasers to heat, etc.)
Description: Processes in which a chemical vapor deposition process utilizes heat generated by laser (UV, IR, or focused beam) radiation to drive the chemical reaction.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618679 |
Thermally and electrically conductive structure, method of applying a carbon coating to same, and method of reducing a contact resistance of same |
Nov. 17, 2009 |
| 7608307 |
Method of forming film upon a substrate |
Oct. 27, 2009 |
| 7608308 |
P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates |
Oct. 27, 2009 |
| 7504136 |
Method and system for forming a film of material using plasmon assisted chemical reactions |
Mar. 17, 2009 |
| 7491431 |
Dense coating formation by reactive deposition |
Feb. 17, 2009 |
| 7455884 |
Atomic layer deposition with point of use generated reactive gas species |
Nov. 25, 2008 |
| 7157144 |
Giant remnant polarization in laser ablated SrBi.sub.2Nb.sub.2O.sub.9 thin films on Pt/TiO.sub.2/SiO.sub.2/Si substrates |
Jan. 2, 2007 |
| 7109024 |
Biomolecule-bound substrates |
Sep. 19, 2006 |
| 7041342 |
Thin-film solar cells and method of making |
May. 9, 2006 |
| 7001672 |
Laser based metal deposition of implant structures |
Feb. 21, 2006 |
| 6994894 |
Method and system for thick-film deposition of ceramic materials |
Feb. 7, 2006 |
| 6926933 |
Method of manufacturing water-repelling film |
Aug. 9, 2005 |
| 6838125 |
Method of film deposition using activated precursor gases |
Jan. 4, 2005 |
| 6803073 |
Particle forming method |
Oct. 12, 2004 |
| 6797336 |
Multi-component substances and processes for preparation thereof |
Sep. 28, 2004 |
| 6797341 |
Method for producing boride thin films |
Sep. 28, 2004 |
| 6797338 |
Process for producing thin metal oxide film |
Sep. 28, 2004 |
| 6793980 |
Method of forming photo-catalytic film made of titanium oxide on base material and laminated material thereof |
Sep. 21, 2004 |
| 6783811 |
Method of reducing resistance for conductive film formed on base material |
Aug. 31, 2004 |
| 6740368 |
Beam shaped film pattern formation method |
May. 25, 2004 |
| 6733848 |
Thin film forming equipment and method |
May. 11, 2004 |
| 6641863 |
Method of forming thin film of inorganic solid electrolyte |
Nov. 4, 2003 |
| 6596343 |
Method and apparatus for processing semiconductor substrates with hydroxyl radicals |
Jul. 22, 2003 |
| 6589717 |
Photon assisted deposition of hard mask formation for use in manufacture of both devices and masks |
Jul. 8, 2003 |
| 6589868 |
Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput |
Jul. 8, 2003 |
| 6578381 |
Fine glass particle containing embedded oxide and process for producing the same |
Jun. 17, 2003 |
| 6548124 |
Nanometric scale coherently controlled molecular deposition |
Apr. 15, 2003 |
| 6506439 |
Apparatus and process for the production of a superconductive layer |
Jan. 14, 2003 |
| 6480074 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters by reducing thickness non-uniformity |
Nov. 12, 2002 |
| 6472030 |
Preparation of laser deposited oriented films and membranes |
Oct. 29, 2002 |
| 6451391 |
Thin film formation method |
Sep. 17, 2002 |
| 6423411 |
Method of coating three dimensional objects with molecular sieves |
Jul. 23, 2002 |
| 6410086 |
Method for forming high performance surface coatings and compositions of same |
Jun. 25, 2002 |
| 6391528 |
Methods of making wire grid optical elements by preferential deposition of material on a substrate |
May. 21, 2002 |
| 6375860 |
Controlled potential plasma source |
Apr. 23, 2002 |
| 6338778 |
Vacuum coating system with a coating chamber and at least one source chamber |
Jan. 15, 2002 |
| 6319565 |
Stable hydride source compositions for manufacture of semiconductor devices and structures |
Nov. 20, 2001 |
| 6287645 |
Preparation of laser deposited oriented films and membranes |
Sep. 11, 2001 |
| 6274207 |
Method of coating three dimensional objects with molecular sieves |
Aug. 14, 2001 |
| 6264747 |
Apparatus for forming multicolor interference coating |
Jul. 24, 2001 |
| 6204178 |
Nucleation and deposition of PT films using ultraviolet irradiation |
Mar. 20, 2001 |
| 6187392 |
Laser desorption of CVD precursor species |
Feb. 13, 2001 |
| 6177150 |
Photomagnetic recording medium and film forming method |
Jan. 23, 2001 |
| 6146714 |
Method of forming metal, ceramic or ceramic/metal layers on inner surfaces of hollow bodies using pulsed laser deposition |
Nov. 14, 2000 |
| 6090458 |
Method and apparatus for film formation by chemical vapor deposition |
Jul. 18, 2000 |
| 6063453 |
Method of manufacturing electron-emitting device and image-forming apparatus comprising such devices |
May. 16, 2000 |
| 6060127 |
Mechanically restricted laser deposition |
May. 9, 2000 |
| 6057031 |
Plastic substrate with thin metal-containing layer |
May. 2, 2000 |
| 6051287 |
Laser desorption of CVD precursor species |
Apr. 18, 2000 |
| 6033721 |
Image-based three-axis positioner for laser direct write microchemical reaction |
Mar. 7, 2000 |
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