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Class Information
Number: 427/575
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Plasma (e.g., corona, glow discharge, cold plasma, etc.) > Generated by microwave (i.e., 1mm to 1m)
Description: Processes wherein microwave energy is utilized to activate or initiate the plasma.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8679594 Index modified coating on polymer substrate Mar. 25, 2014
8679592 System to continuously produce carbon fiber via microwave assisted plasma processing Mar. 25, 2014
8668962 Microwave plasma reactors Mar. 11, 2014
8637123 Oxygen radical generation for radical-enhanced thin film deposition Jan. 28, 2014
8603402 Microwave-excited plasma device Dec. 10, 2013
8574687 Method and device for depositing a non-metallic coating by means of cold-gas spraying Nov. 5, 2013
8518182 Substrate processing apparatus Aug. 27, 2013
8513137 Plasma processing apparatus and plasma processing method Aug. 20, 2013
8512798 Plasma assisted metalorganic chemical vapor deposition (MOCVD) system Aug. 20, 2013
8404313 Synthesis of nanocrystalline diamond fibers Mar. 26, 2013
8394197 Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques Mar. 12, 2013
8383210 Method of forming a film by deposition from a plasma Feb. 26, 2013
8318267 Method and apparatus for forming silicon oxide film Nov. 27, 2012
8308897 Plasma processing apparatus and plasma processing method Nov. 13, 2012
RE43651 Surface coatings Sep. 11, 2012
8222125 Plasma deposition of amorphous semiconductors at microwave frequencies Jul. 17, 2012
8206776 Insulator coating for reducing power line system pollution problems Jun. 26, 2012
8168268 Thin film deposition via a spatially-coordinated and time-synchronized process May. 1, 2012
8138458 Microwave chemical reaction device Mar. 20, 2012
8133562 Plastic formed articles having a vapor deposited film and method of producing the same Mar. 13, 2012
8101245 Plasma deposition of amorphous semiconductors at microwave frequencies Jan. 24, 2012
8097082 Nonplanar faceplate for a plasma processing chamber Jan. 17, 2012
8075950 Process of preparing graphene shell Dec. 13, 2011
8021723 Method of plasma treatment using amplitude-modulated RF power Sep. 20, 2011
8006641 Installation for depositing, by means of a microwave plasma, an internal barrier coating in thermoplastic containers Aug. 30, 2011
7981485 Apparatus and method for performing a PCVD process Jul. 19, 2011
7976908 High throughput processes and systems for barrier film deposition and/or encapsulation of optoelectronic devices Jul. 12, 2011
7976893 Superconductivity in boron-doped diamond thin film Jul. 12, 2011
7947337 Method and apparatus for plasma enhanced chemical vapor deposition May. 24, 2011
7879396 High aspect ratio performance coatings for biological microfluidics Feb. 1, 2011
7875322 Plasma processing method Jan. 25, 2011
7857984 Plasma surface treatment method, quartz member, plasma processing apparatus and plasma processing method Dec. 28, 2010
7838071 Container-treatment method comprising vacuum pumping phases, and machine for implementing same Nov. 23, 2010
7829157 Methods of making multilayered, hydrogen-containing thermite structures Nov. 9, 2010
7824742 Plasma-coated conveyor belt Nov. 2, 2010
7807234 Plasma processing method, plasma processing apparatus, and computer recording medium Oct. 5, 2010
7776408 Method and apparatus for producing single crystalline diamonds Aug. 17, 2010
7767270 Selective functionalization of carbon nanotubes based upon distance traveled Aug. 3, 2010
7638727 Plasma-assisted heat treatment Dec. 29, 2009
7597941 Tubular carbon nano/micro structures and method of making same Oct. 6, 2009
7578889 Methodology for cleaning of surface metal contamination from electrode assemblies Aug. 25, 2009
7498066 Plasma-assisted enhanced coating Mar. 3, 2009
7473436 Functionalization of carbon nanotubes Jan. 6, 2009
7465406 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semic Dec. 16, 2008
7435454 Plasma enhanced atomic layer deposition system and method Oct. 14, 2008
7404991 Device and control method for micro wave plasma processing Jul. 29, 2008
7399500 Rapid process for the production of multilayer barrier layers Jul. 15, 2008
7361387 Plasma enhanced pulsed layer deposition Apr. 22, 2008
7323230 Coating for aluminum component Jan. 29, 2008
7303790 Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained Dec. 4, 2007

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