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Class Information
Number: 427/575
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Plasma (e.g., corona, glow discharge, cold plasma, etc.) > Generated by microwave (i.e., 1mm to 1m)
Description: Processes wherein microwave energy is utilized to activate or initiate the plasma.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7597941 |
Tubular carbon nano/micro structures and method of making same |
Oct. 6, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7498066 |
Plasma-assisted enhanced coating |
Mar. 3, 2009 |
| 7473436 |
Functionalization of carbon nanotubes |
Jan. 6, 2009 |
| 7465406 |
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semic |
Dec. 16, 2008 |
| 7435454 |
Plasma enhanced atomic layer deposition system and method |
Oct. 14, 2008 |
| 7404991 |
Device and control method for micro wave plasma processing |
Jul. 29, 2008 |
| 7399500 |
Rapid process for the production of multilayer barrier layers |
Jul. 15, 2008 |
| 7361387 |
Plasma enhanced pulsed layer deposition |
Apr. 22, 2008 |
| 7323230 |
Coating for aluminum component |
Jan. 29, 2008 |
| 7303790 |
Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained |
Dec. 4, 2007 |
| 7276266 |
Functionalization of carbon nanotubes |
Oct. 2, 2007 |
| 7244474 |
Chemical vapor deposition plasma process using an ion shower grid |
Jul. 17, 2007 |
| 7244475 |
Plasma treatment apparatus and control method thereof |
Jul. 17, 2007 |
| 7160585 |
Process for making at least one nanotube between two electrically conducting elements and device for implementing such a process |
Jan. 9, 2007 |
| 7125588 |
Pulsed plasma CVD method for forming a film |
Oct. 24, 2006 |
| 7105208 |
Methods and processes utilizing microwave excitation |
Sep. 12, 2006 |
| 7097782 |
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semic |
Aug. 29, 2006 |
| 6928839 |
Method for production of silica optical fiber preforms |
Aug. 16, 2005 |
| 6929830 |
Plasma treatment method and method of manufacturing optical parts using the same |
Aug. 16, 2005 |
| 6916512 |
Method and device for coating substrates |
Jul. 12, 2005 |
| 6905737 |
Method of delivering activated species for rapid cyclical deposition |
Jun. 14, 2005 |
| 6900138 |
Oxygen plasma treatment for nitride surface to reduce photo footing |
May. 31, 2005 |
| 6875480 |
Method of enhancement of electrical conductivity for conductive polymer by use of field effect control |
Apr. 5, 2005 |
| 6855379 |
Method and device for surface-treating substrates |
Feb. 15, 2005 |
| 6851939 |
System for chemical vapor deposition at ambient temperature using electron cyclotron resonance and method for depositing metal composite film using the same |
Feb. 8, 2005 |
| 6849307 |
Method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith |
Feb. 1, 2005 |
| 6841201 |
Apparatus and method for treating a workpiece using plasma generated from microwave radiation |
Jan. 11, 2005 |
| 6841202 |
Device and method for the vacuum plasma processing of objects |
Jan. 11, 2005 |
| 6812146 |
Chemical vapor deposition process for depositing titanium nitride films from an organo-metallic compound |
Nov. 2, 2004 |
| 6808748 |
Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology |
Oct. 26, 2004 |
| 6787200 |
Method and device for electronic cyclotronic resonance plasma deposit of carbon nanofibre layers in fabric form and resulting fabric layers |
Sep. 7, 2004 |
| 6770332 |
Method for forming film by plasma |
Aug. 3, 2004 |
| 6756311 |
Methods and apparatus for producing semiconductor devices |
Jun. 29, 2004 |
| 6730369 |
Device and method for plasma processing |
May. 4, 2004 |
| 6715441 |
PCVD apparatus and a method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith |
Apr. 6, 2004 |
| 6677001 |
Microwave enhanced CVD method and apparatus |
Jan. 13, 2004 |
| 6673722 |
Microwave enhanced CVD system under magnetic field |
Jan. 6, 2004 |
| 6660342 |
Pulsed electromagnetic energy method for forming a film |
Dec. 9, 2003 |
| 6652923 |
Electron-emitting source, electron-emitting module, and method of manufacturing electron-emitting source |
Nov. 25, 2003 |
| 6645575 |
Method for making a multi-layer plastic container having a carbon-treated internal surface |
Nov. 11, 2003 |
| 6617152 |
Method for creating a cell growth surface on a polymeric substrate |
Sep. 9, 2003 |
| 6610373 |
Magnetic film-forming device and method |
Aug. 26, 2003 |
| 6607790 |
Method of forming a thin film for a semiconductor device |
Aug. 19, 2003 |
| 6582778 |
Method of treatment with a microwave plasma |
Jun. 24, 2003 |
| 6531192 |
Chemical vapor deposition process for depositing titanium nitride films from an organo-metallic compound |
Mar. 11, 2003 |
| 6487986 |
Device for the plasma deposition of a polycrystalline diamond |
Dec. 3, 2002 |
| 6475620 |
Method for depositing a coating layer on an optical fiber while it is being drawn and device for its implementation |
Nov. 5, 2002 |
| 6468603 |
Plasma film forming method utilizing varying bias electric power |
Oct. 22, 2002 |
| 6458415 |
Method of forming diamond film and film-forming apparatus |
Oct. 1, 2002 |
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