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Class Information
Number: 427/572
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Plasma (e.g., corona, glow discharge, cold plasma, etc.) > Utilizing plasma with other nonionizing energy sources > Light as energy source
Description: Processes wherein the secondary energy used in conjunction with a plasma is electromagnetic wave energy.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7504136 |
Method and system for forming a film of material using plasmon assisted chemical reactions |
Mar. 17, 2009 |
| 7422775 |
Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing |
Sep. 9, 2008 |
| 6926933 |
Method of manufacturing water-repelling film |
Aug. 9, 2005 |
| 6733848 |
Thin film forming equipment and method |
May. 11, 2004 |
| 6677001 |
Microwave enhanced CVD method and apparatus |
Jan. 13, 2004 |
| 6673524 |
Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method |
Jan. 6, 2004 |
| 6616987 |
Procedure and device for specific particle manipulation and deposition |
Sep. 9, 2003 |
| 6558757 |
Method and device for coating substrates in a vacuum |
May. 6, 2003 |
| 6524517 |
Methods for molding and grafting highly uniform polymer layers onto electronic microchips |
Feb. 25, 2003 |
| 6517912 |
Particle manipulation |
Feb. 11, 2003 |
| 6509070 |
Laser ablation, low temperature-fabricated yttria-stabilized zirconia oriented films |
Jan. 21, 2003 |
| 6480074 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters by reducing thickness non-uniformity |
Nov. 12, 2002 |
| 6375860 |
Controlled potential plasma source |
Apr. 23, 2002 |
| 6338778 |
Vacuum coating system with a coating chamber and at least one source chamber |
Jan. 15, 2002 |
| 6149984 |
Laser irradiation method |
Nov. 21, 2000 |
| 6130118 |
Plasma reaction apparatus and plasma reaction |
Oct. 10, 2000 |
| 6110542 |
Method for forming a film |
Aug. 29, 2000 |
| 6099783 |
Photopolymerizable compositions for encapsulating microelectronic devices |
Aug. 8, 2000 |
| 5980999 |
Method of manufacturing thin film and method for performing precise working by radical control and apparatus for carrying out such methods |
Nov. 9, 1999 |
| 5925421 |
Laser irradiation method |
Jul. 20, 1999 |
| 5776557 |
Method for forming a film on a substrate by activating a reactive gas |
Jul. 7, 1998 |
| 5763002 |
Methods of manufacture of master disk for making a die for pressing optical disks |
Jun. 9, 1998 |
| 5753320 |
Process for forming deposited film |
May. 19, 1998 |
| 5725914 |
Process and apparatus for producing a functional structure of a semiconductor component |
Mar. 10, 1998 |
| 5654043 |
Pulsed plate plasma implantation system and method |
Aug. 5, 1997 |
| 5591492 |
Process for forming and etching a film to effect specific crystal growth from activated species |
Jan. 7, 1997 |
| 5591486 |
Method for forming a film on a substrate by activating a reactive gas |
Jan. 7, 1997 |
| 5585148 |
Process for forming a deposited film using a light transmissive perforated diffusion plate |
Dec. 17, 1996 |
| 5547716 |
Laser absorption wave deposition process and apparatus |
Aug. 20, 1996 |
| 5478609 |
Substrate heating mechanism |
Dec. 26, 1995 |
| 5458919 |
Method for forming a film on a substrate by activating a reactive gas |
Oct. 17, 1995 |
| 5385763 |
Method for forming a film on a substrate by activating a reactive gas |
Jan. 31, 1995 |
| 5324552 |
Process for coating substrate material |
Jun. 28, 1994 |
| 5314726 |
Process for forming a mixed layer of a plasma sprayed material and diamond |
May. 24, 1994 |
| 5300485 |
Method of preparing oxide superconducting films by laser ablation |
Apr. 5, 1994 |
| 5246529 |
Plasma processing method |
Sep. 21, 1993 |
| 5231047 |
High quality photovoltaic semiconductor material and laser ablation method of fabrication same |
Jul. 27, 1993 |
| 5211995 |
Method of protecting an organic surface by deposition of an inorganic refractory coating thereon |
May. 18, 1993 |
| 5158931 |
Method for manufacturing an oxide superconductor thin film |
Oct. 27, 1992 |
| 5156881 |
Method for forming a film on a substrate by activating a reactive gas |
Oct. 20, 1992 |
| 5138973 |
Wafer processing apparatus having independently controllable energy sources |
Aug. 18, 1992 |
| 5126165 |
Laser deposition method and apparatus |
Jun. 30, 1992 |
| 5122632 |
Device for laser plasma coating |
Jun. 16, 1992 |
| 5079187 |
Method for processing semiconductor materials |
Jan. 7, 1992 |
| 5049406 |
Method of manufacturing solid bodies |
Sep. 17, 1991 |
| 5030475 |
Plasma-enhanced CVD coating process |
Jul. 9, 1991 |
| 5001001 |
Process for the fabrication of ceramic monoliths by laser-assisted chemical vapor infiltration |
Mar. 19, 1991 |
| 4988533 |
Method for deposition of silicon oxide on a wafer |
Jan. 29, 1991 |
| 4981717 |
Diamond like coating and method of forming |
Jan. 1, 1991 |
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