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Class Information
Number: 427/569
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Plasma (e.g., corona, glow discharge, cold plasma, etc.)
Description: Processes wherein a wholly or partially ionized gas, which has an activating source, is responsible for the deposition of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622150 |
Oxidation resistant coatings for molybdenum silicide-based composite articles |
Nov. 24, 2009 |
| 7618686 |
Method and apparatus for sequential plasma treatment |
Nov. 17, 2009 |
| RE40963 |
Method for plasma processing by shaping an induced electric field |
Nov. 10, 2009 |
| 7615931 |
Pulsed dielectric barrier discharge |
Nov. 10, 2009 |
| 7615259 |
Method and apparatus for processing workpiece |
Nov. 10, 2009 |
| 7611758 |
Method of improving post-develop photoresist profile on a deposited dielectric film |
Nov. 3, 2009 |
| 7611751 |
Vapor deposition of metal carbide films |
Nov. 3, 2009 |
| 7604849 |
Plasma processing method and apparatus |
Oct. 20, 2009 |
| 7601405 |
DLC coating system and process and apparatus for making coating system |
Oct. 13, 2009 |
| 7601404 |
Method for switching decoupled plasma nitridation processes of different doses |
Oct. 13, 2009 |
| 7601399 |
High density low pressure plasma sprayed focal tracks for X-ray anodes |
Oct. 13, 2009 |
| 7601392 |
Organic-metal precursor material and method of manufacturing metal thin film using the same |
Oct. 13, 2009 |
| 7598503 |
Lithographic apparatus and cleaning method therefor |
Oct. 6, 2009 |
| 7597941 |
Tubular carbon nano/micro structures and method of making same |
Oct. 6, 2009 |
| 7595096 |
Method of manufacturing vacuum plasma treated workpieces |
Sep. 29, 2009 |
| 7595088 |
Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology |
Sep. 29, 2009 |
| 7591948 |
Process for production of a regioselective membrane |
Sep. 22, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7578301 |
Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system |
Aug. 25, 2009 |
| 7569284 |
Incorporation of nitrogen into high k dielectric film |
Aug. 4, 2009 |
| 7569256 |
Plasma CVD apparatus and dry cleaning method of the same |
Aug. 4, 2009 |
| 7560144 |
Method of stabilizing film quality of low-dielectric constant film |
Jul. 14, 2009 |
| 7550180 |
Plasma treatment method |
Jun. 23, 2009 |
| 7541069 |
Method and system for coating internal surfaces using reverse-flow cycling |
Jun. 2, 2009 |
| 7534854 |
Apparatus and method for oxidation and stabilization of polymeric materials |
May. 19, 2009 |
| 7517558 |
Methods for positioning carbon nanotubes |
Apr. 14, 2009 |
| 7514125 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films |
Apr. 7, 2009 |
| 7513214 |
Plasma processing method and apparatus |
Apr. 7, 2009 |
| 7509738 |
Solid-free-form fabrication of hot gas valve discs |
Mar. 31, 2009 |
| 7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Mar. 17, 2009 |
| 7504136 |
Method and system for forming a film of material using plasmon assisted chemical reactions |
Mar. 17, 2009 |
| 7501161 |
Methods and apparatus for reducing arcing during plasma processing |
Mar. 10, 2009 |
| 7498066 |
Plasma-assisted enhanced coating |
Mar. 3, 2009 |
| 7498057 |
Deposition methods |
Mar. 3, 2009 |
| 7497963 |
Etching method |
Mar. 3, 2009 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Feb. 24, 2009 |
| 7491430 |
Deposition method for forming a film including metal, nitrogen and carbon |
Feb. 17, 2009 |
| 7491429 |
Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG) |
Feb. 17, 2009 |
| 7485349 |
Thin film forming method |
Feb. 3, 2009 |
| 7485348 |
Method for forming nanostructured carbons, nanostructured carbons and a substrate having nanostructured carbons formed thereby |
Feb. 3, 2009 |
| 7476414 |
Magnetoresistance effect element |
Jan. 13, 2009 |
| 7473436 |
Functionalization of carbon nanotubes |
Jan. 6, 2009 |
| 7468290 |
Mechanical enhancement of dense and porous organosilicate materials by UV exposure |
Dec. 23, 2008 |
| 7465478 |
Plasma immersion ion implantation process |
Dec. 16, 2008 |
| 7462379 |
Layer forming method, product comprising the layer, optical film, dielectric-coated electrode and plasma discharge apparatus |
Dec. 9, 2008 |
| 7459188 |
Method and apparatus for making diamond-like carbon films |
Dec. 2, 2008 |
| 7459187 |
Surface-treatment method and equipment |
Dec. 2, 2008 |
| 7455892 |
Method and apparatus for forming a coating |
Nov. 25, 2008 |
| 7452569 |
Organic aluminum precursor and method of manufacturing a metal wiring using the same |
Nov. 18, 2008 |
| 7449221 |
Metallic thin film type magnetic recording medium and method of manufacturing thereof |
Nov. 11, 2008 |
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