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Class Information
Number: 427/563
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Pretreatment of coating supply or source outside of primary deposition zone or off site > Electric discharge (e.g., corona, glow discharge, etc.) > Silicon containing coating material
Description: Processes wherein coating material applied to the substrate contains silicon.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7572482 |
Photo-patterned carbon electronics |
Aug. 11, 2009 |
| 7473443 |
Composition for forming silicon film and method for forming silicon film |
Jan. 6, 2009 |
| 7465478 |
Plasma immersion ion implantation process |
Dec. 16, 2008 |
| 7288292 |
Ultra low k (ULK) SiCOH film and method |
Oct. 30, 2007 |
| 7279112 |
Method of manufacture of smart microfluidic medical device with universal coating |
Oct. 9, 2007 |
| 7273638 |
High density plasma oxidation |
Sep. 25, 2007 |
| 7244474 |
Chemical vapor deposition plasma process using an ion shower grid |
Jul. 17, 2007 |
| 7112453 |
Retentate chromatography and protein chip arrays with applications in biology and medicine |
Sep. 26, 2006 |
| 6936310 |
Plasma processing method |
Aug. 30, 2005 |
| 6830786 |
Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film |
Dec. 14, 2004 |
| 6800336 |
Method and device for plasma coating surfaces |
Oct. 5, 2004 |
| 6797339 |
Method for forming thin film with a gas cluster ion beam |
Sep. 28, 2004 |
| 6797336 |
Multi-component substances and processes for preparation thereof |
Sep. 28, 2004 |
| 6737121 |
Multilayer article and method of making by arc plasma deposition |
May. 18, 2004 |
| 6709715 |
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds |
Mar. 23, 2004 |
| 6703081 |
Installation and method for vacuum treatment or powder production |
Mar. 9, 2004 |
| 6673722 |
Microwave enhanced CVD system under magnetic field |
Jan. 6, 2004 |
| 6653245 |
Method for liquid phase deposition |
Nov. 25, 2003 |
| 6616986 |
Sequential chemical vapor deposition |
Sep. 9, 2003 |
| 6616985 |
Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor |
Sep. 9, 2003 |
| 6610368 |
Leather and a method of dressing same |
Aug. 26, 2003 |
| 6607790 |
Method of forming a thin film for a semiconductor device |
Aug. 19, 2003 |
| 6468601 |
Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology |
Oct. 22, 2002 |
| 6436487 |
Method for depositing a silicon oxide film |
Aug. 20, 2002 |
| 6426125 |
Multilayer article and method of making by ARC plasma deposition |
Jul. 30, 2002 |
| 6342277 |
Sequential chemical vapor deposition |
Jan. 29, 2002 |
| 6323135 |
Method of forming reliable capped copper interconnects/with high etch selectivity to capping layer |
Nov. 27, 2001 |
| RE37294 |
Ion beam process for deposition of highly abrasion-resistant coatings |
Jul. 24, 2001 |
| 6254940 |
Electrically assisted synthesis of particles and film with precisely controlled characteristic |
Jul. 3, 2001 |
| 6251795 |
Method for depositing high density plasma chemical vapor deposition oxide with improved topography |
Jun. 26, 2001 |
| 6245396 |
CVD apparatus and method of using same |
Jun. 12, 2001 |
| 6194036 |
Deposition of coatings using an atmospheric pressure plasma jet |
Feb. 27, 2001 |
| 6180185 |
Method of forming a film on a substrate |
Jan. 30, 2001 |
| 6177142 |
Method of forming a film on a substrate |
Jan. 23, 2001 |
| 6143142 |
Composite coatings |
Nov. 7, 2000 |
| 6096700 |
Environmental wipe solvent compositions and processes |
Aug. 1, 2000 |
| 6083569 |
Discharging a wafer after a plasma process for dielectric deposition |
Jul. 4, 2000 |
| 6077569 |
Highly durable and abrasion-resistant dielectric coatings for lenses |
Jun. 20, 2000 |
| 6059937 |
Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof |
May. 9, 2000 |
| 6042901 |
Method for depositing fluorine doped silicon dioxide films |
Mar. 28, 2000 |
| 6007878 |
Process for producing an optical recording medium having a protective layer formed using a plasma processing device |
Dec. 28, 1999 |
| 5906861 |
Apparatus and method for depositing borophosphosilicate glass on a substrate |
May. 25, 1999 |
| 5888593 |
Ion beam process for deposition of highly wear-resistant optical coatings |
Mar. 30, 1999 |
| 5879775 |
Protective inorganic and DLC coatings for plastic media such as plastic cards |
Mar. 9, 1999 |
| 5874350 |
Process for preparing a functional thin film by way of the chemical reaction among active species |
Feb. 23, 1999 |
| 5874134 |
Production of nanostructured materials by hypersonic plasma particle deposition |
Feb. 23, 1999 |
| 5872065 |
Method for depositing low K SI-O-F films using SIF.sub.4 /oxygen chemistry |
Feb. 16, 1999 |
| 5858476 |
Method and apparatus for making and depositing compounds |
Jan. 12, 1999 |
| 5849370 |
Method for producing low scatter, low loss, environmentally stable dielectric coatings |
Dec. 15, 1998 |
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