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Class Information
Number: 427/527
Name: Coating processes > Direct application of electrical, magnetic, wave, or particulate energy > Ion plating or implantation > Silicon present in substrate, plating, or implanted layer
Description: Processes, wherein (1) the plating or implanted material contains silicon or (2) the substrate which is plated or implanted contains silicon.










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8673406 Method and device for the plasma treatment of surfaces containing alkali and alkaline-earth metals Mar. 18, 2014
8673404 Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film Mar. 18, 2014
8388643 Bioabsorbable polymeric implants and a method of using the same to create occlusions Mar. 5, 2013
8389068 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Mar. 5, 2013
8361564 Protective layer for implant photoresist Jan. 29, 2013
8329260 Cooled cleaving implant Dec. 11, 2012
8304033 Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles Nov. 6, 2012
8226835 Ultra-thin film formation using gas cluster ion beam processing Jul. 24, 2012
8216671 Luminescent glass element, producing method thereof and luminescing method thereof Jul. 10, 2012
8192805 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices Jun. 5, 2012
8153207 Fine particle-containing body, fine particle-containing body manufacturing method, storage element, semiconductor device and electronic equipment Apr. 10, 2012
8119208 Apparatus and method for focused electric field enhanced plasma-based ion implantation Feb. 21, 2012
7988836 Method of making window unit including diamond-like carbon (DLC) coating Aug. 2, 2011
7985188 Vessel, coating, inspection and processing apparatus Jul. 26, 2011
7981483 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices Jul. 19, 2011
7943204 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation May. 17, 2011
7916986 Erbium-doped silicon nanocrystalline embedded silicon oxide waveguide Mar. 29, 2011
7794798 Method for depositing films using gas cluster ion beam processing Sep. 14, 2010
7759657 Methods for implanting B22Hx and its ionized lower mass byproducts Jul. 20, 2010
7718231 Thin buried oxides by low-dose oxygen implantation into modified silicon May. 18, 2010
7666464 RF measurement feedback control and diagnostics for a plasma immersion ion implantation reactor Feb. 23, 2010
7655282 Method of forming patterned film Feb. 2, 2010
7622161 Method of making window unit including diamond-like carbon (DLC) coating Nov. 24, 2009
7578889 Methodology for cleaning of surface metal contamination from electrode assemblies Aug. 25, 2009
7566481 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) Jul. 28, 2009
7566482 SOI by oxidation of porous silicon Jul. 28, 2009
7465478 Plasma immersion ion implantation process Dec. 16, 2008
7455890 Ion implantation of turbine engine rotor component Nov. 25, 2008
7374642 Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith May. 20, 2008
7311881 Chips, and apparatus and method for reaction analysis Dec. 25, 2007
7229675 Protective coating method for pieces made of heat resistant alloys Jun. 12, 2007
7179508 Conducting polymer films and method of manufacturing the same by surface polymerization using ion-assisted deposition Feb. 20, 2007
7141096 Gas-selective permeable membrane and method of manufacturing thereof Nov. 28, 2006
7112453 Retentate chromatography and protein chip arrays with applications in biology and medicine Sep. 26, 2006
7097884 Stability of ion beam generated alignment layers by surface modification Aug. 29, 2006
6916541 Modified substrates for the attachment of biomolecules Jul. 12, 2005
6893543 Information carrier and method for producing the same May. 17, 2005
6878415 Methods for chemical formation of thin film layers using short-time thermal processes Apr. 12, 2005
6808606 Method of manufacturing window using ion beam milling of glass substrate(s) Oct. 26, 2004
6797339 Method for forming thin film with a gas cluster ion beam Sep. 28, 2004
6743369 Method for manufacturing electrode for secondary battery Jun. 1, 2004
6736982 Micromachined vertical vibrating gyroscope May. 18, 2004
6683012 Method for epitaxially growing crystalline insulation layer on crystalline silicon substrate while simultaneously growing silicon oxide, nitride, or oxynitride Jan. 27, 2004
6632482 Plasma immersion ion implantation process Oct. 14, 2003
6627320 Method for producing composition for vapor deposition, composition for vapor deposition, and method for producing optical element with antireflection film Sep. 30, 2003
6602558 Non-linear optical silica thin film manufacturing method and non-linear optical silica element Aug. 5, 2003
6569534 Optical material and optical element using the same May. 27, 2003
6551718 Low friction coating Apr. 22, 2003
6541079 Engineered high dielectric constant oxide and oxynitride heterostructure gate dielectrics by an atomic beam deposition technique Apr. 1, 2003
6503578 Method for preparing ZnSe thin films by ion-assisted continuous wave CO2 laser deposition Jan. 7, 2003

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