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Class Information
Number: 427/255.28
Name: Coating processes > Coating by vapor, gas, or smoke > Mixture of vapors or gases (e.g., deposition gas and inert gas, inert gas and reactive gas, two or more reactive gases, etc.) utilized > Coating formed from vaporous or gaseous phase reaction mixture (e.g., chemical vapor deposition, cvd, etc.)
Description: Process wherein all or any part of the mixture of vapors or gases is caused to react, resulting in the formation of a coating.


Sub-classes under this class:

Class Number Class Name Patents
427/255.39 Halogen or halogen compound containing reactant 184
427/255.29 Inorganic oxygen, sulfur, selenium, or tellurium (i.e., chalcogen) containing coating (e.g., phosphosilicate, silicon oxynitride, etc.) 206
427/255.394 Nitrogen containing coating (e.g., metal nitride, etc.) 372
427/255.38 Phosphorus or boron containing coating (e.g., aluminum boride, boron phosphide etc.) 198


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7622153 Method of making vapour deposited oxygen-scavenging particles Nov. 24, 2009
7618681 Process for producing bismuth-containing oxide films Nov. 17, 2009
7615251 Processing device using shower head structure and processing method Nov. 10, 2009
7608299 Process for the deposition by CVD of a silver film on a substrate Oct. 27, 2009
7608301 Process for forming a protective coating containing aluminium and zirconium on a metal Oct. 27, 2009
7605083 Formation of composite tungsten films Oct. 20, 2009
7598196 Vapor-deposition material for the production of layers of high refractive index Oct. 6, 2009
7597951 Coated cutting tool insert Oct. 6, 2009
7597932 Mesoporous permeation layers for use on active electronic matrix devices Oct. 6, 2009
7592471 Tantalum compound, method for producing same, tantalum-containing thin film and method for forming same Sep. 22, 2009
7585545 Hydrogen sulfide injection method for phosphor deposition Sep. 8, 2009
7556839 Method of manufacturing semiconductor device and apparatus for processing substrate Jul. 7, 2009
7547464 Organometallic precursor compounds Jun. 16, 2009
7544410 Hard metal or cermet body and method for producing the same Jun. 9, 2009
7531031 Copper (I) compounds useful as deposition precursors of copper thin films May. 12, 2009
7524481 Reactors for producing inorganic fullerene-like tungsten disulfide hollow nanoparticles and nanotubes Apr. 28, 2009
7514119 Method and apparatus for using solution based precursors for atomic layer deposition Apr. 7, 2009
7514586 Organic zinc precursor and ZnO thin-film deposition by MOCVD Apr. 7, 2009
7514374 Method for manufacturing flat substrates Apr. 7, 2009
7510608 Hard coating film Mar. 31, 2009
7501154 Surface modification of CVD polymer films Mar. 10, 2009
7501153 Alkoxide compound, thin film-forming material and method for forming thin film Mar. 10, 2009
7498059 Method for growing thin films Mar. 3, 2009
7485340 Production of elemental films using a boron-containing reducing agent Feb. 3, 2009
7470454 Non-thermal process for forming porous low dielectric constant films Dec. 30, 2008
7470450 Forming a silicon nitride film Dec. 30, 2008
7470296 Coated insert and method of making same Dec. 30, 2008
7468290 Mechanical enhancement of dense and porous organosilicate materials by UV exposure Dec. 23, 2008
7455884 Atomic layer deposition with point of use generated reactive gas species Nov. 25, 2008
7452569 Organic aluminum precursor and method of manufacturing a metal wiring using the same Nov. 18, 2008
7442415 Modulated temperature method of atomic layer deposition (ALD) of high dielectric constant films Oct. 28, 2008
7431966 Atomic layer deposition method of depositing an oxide on a substrate Oct. 7, 2008
7431967 Limited thermal budget formation of PMD layers Oct. 7, 2008
7431969 Chemical vapor deposition of hydrogel films Oct. 7, 2008
7431998 Tool and method for the chemical vapor deposition of a two-phase layer on a substrate member Oct. 7, 2008
7429402 Ruthenium as an underlayer for tungsten film deposition Sep. 30, 2008
7427425 Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Sep. 23, 2008
7425350 Apparatus, precursors and deposition methods for silicon-containing materials Sep. 16, 2008
7422770 Forming a thin film structure Sep. 9, 2008
7422805 Cutting tool for bimetal machining Sep. 9, 2008
7419888 Method of forming a silicon-rich nanocrystalline structure by an atomic layer deposition process and method of manufacturing a non-volatile semiconductor device using the same Sep. 2, 2008
7413776 Method of depositing a metal-containing film Aug. 19, 2008
7410666 Metal nitride carbide deposition by ALD Aug. 12, 2008
7404983 Method and apparatus for open-air coating by laser-induced chemical vapor deposition Jul. 29, 2008
7404984 Method for growing thin films Jul. 29, 2008
7396563 Ceramic thin film on various substrates, and process for producing same Jul. 8, 2008
7393562 Deposition methods for improved delivery of metastable species Jul. 1, 2008
7390536 Method for fabricating composite gas separation modules Jun. 24, 2008
7390535 Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings Jun. 24, 2008
7384665 Formation of protective coatings for color filters Jun. 10, 2008

1 2 3 4 5 6 7 8 9


 
 
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