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Class Information
Number: 417/901
Name: Pumps > Cryogenic pumps
Description: Pumps which are disclosed as pumping gases in the liquified state at very low temperatures, e.g., liquid oxygen. This collection is not intended to include refrigerant compressors in which the refrigerant liquifies at a relatively high temperature when placed under compression.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8671700 High pressure cryogenic fluid generator Mar. 18, 2014
8366423 Method and arrangement for realizing a vacuum in a vacuum chamber Feb. 5, 2013
8302409 Cryopump and regenerating method of the cryopump Nov. 6, 2012
8261559 Cryopump Sep. 11, 2012
8259284 Exposure apparatus and device manufacturing method Sep. 4, 2012
7997089 Method and apparatus for regeneration water Aug. 16, 2011
7992394 Cold trap and cold trap regeneration method Aug. 9, 2011
7913496 Apparatus and method for pumping a cryogenic fluid from a storage vessel and diagnosing cryogenic pump performance Mar. 29, 2011
7413411 Electronically controlled vacuum pump Aug. 19, 2008
7410348 Multi-speed compressor/pump apparatus Aug. 12, 2008
7356996 Apparatus and method for holding a cryogenic fluid and removing cryogenic fluid therefrom with reduced heat leak Apr. 15, 2008
7297055 Vacuum-insulating system and method for generating a high-level vacuum Nov. 20, 2007
7223080 Double-acting, high pressure cryogenic pump May. 29, 2007
7037083 Radiation shielding coating May. 2, 2006
6659730 High pressure pump system for supplying a cryogenic fluid from a storage tank Dec. 9, 2003
6655930 Insulation means for a centrifugal pump Dec. 2, 2003
6653792 Ion implanting system Nov. 25, 2003
6620250 Method and apparatus for shielding a device from a semiconductor wafer process chamber Sep. 16, 2003
6550256 Alternative backing up pump for turbomolecular pumps Apr. 22, 2003
6510697 System and method for recovering from a power failure in a cryopump Jan. 28, 2003
6460351 Electronically controlled cryopump Oct. 8, 2002
6327863 Cryopump with gate valve control Dec. 11, 2001
6318093 Electronically controlled cryopump Nov. 20, 2001
6233948 Control apparatus for a plurality of cryopumps May. 22, 2001
6220037 Cryogenic pump manifold with subcooler and heat exchanger Apr. 24, 2001
6092373 Cryopump Jul. 25, 2000
6053704 Cryogenic vacuum pump system having a cryopanel and a heat absorbing unit Apr. 25, 2000
RE36610 Evacuation apparatus and evacuation method Mar. 14, 2000
5996472 Cryogenic reciprocating pump Dec. 7, 1999
5974809 Cryopump with an exhaust filter Nov. 2, 1999
5906103 Convection-shielded cryopump May. 25, 1999
5901558 Water pump with integral gate valve May. 11, 1999
5887438 Low profile in line cryogenic water pump Mar. 30, 1999
5884488 High pressure fuel supply system for natural gas vehicles Mar. 23, 1999
5865605 Method and apparatus for removing a high pressure in-tank pump using a low pressure tube Feb. 2, 1999
5862671 Purge and rough cryopump regeneration process, cryopump and controller Jan. 26, 1999
5860798 Pump for pumping a fluid comprising a liquefied gas and apparatus having a pump Jan. 19, 1999
5855118 Combination cryopump/getter pump and method for regenerating same Jan. 5, 1999
5810570 Super-low net positive suction head cryogenic reciprocating pump Sep. 22, 1998
5806319 Method and apparatus for cryogenically cooling a deposition chamber Sep. 15, 1998
5799493 Corrosion resistant cryopump Sep. 1, 1998
5782096 Cryopump with improved shielding Jul. 21, 1998
5778682 Reactive PVD with NEG pump Jul. 14, 1998
5727392 Convection-shielded cryopump Mar. 17, 1998
5720174 Secondary pump unit Feb. 24, 1998
5704214 Apparatus for removing tramp materials and method therefor Jan. 6, 1998
5687574 Throttle cycle cryopumping system for Group I gases Nov. 18, 1997
5611208 Modified cryogenic diffusion pump Mar. 18, 1997
5586050 Remotely controllable LNG field station management system and method Dec. 17, 1996
5582017 Cryopump Dec. 10, 1996

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