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Class Information
Number: 414/941
Name: Material or article handling > Associated with semiconductor wafer handling > Includes means for gripping wafer
Description: A collection of art which includes means having seizing, grasping, or clamping structure for engaging the wafer during a handling operation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611182 |
Wafer transfer apparatus |
Nov. 3, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7597183 |
Kinematic pin with shear member and substrate carrier for use therewith |
Oct. 6, 2009 |
| 7585686 |
Method and apparatus for processing a wafer |
Sep. 8, 2009 |
| 7578649 |
Dual arm substrate transport apparatus |
Aug. 25, 2009 |
| 7563042 |
Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus |
Jul. 21, 2009 |
| 7547053 |
Substrate gripping apparatus, substrate gripping method and substrate releasing method |
Jun. 16, 2009 |
| 7532004 |
Inspection device for inspecting thin plate container and method of inspecting thin plate container |
May. 12, 2009 |
| 7520545 |
Robot for transfer of glass |
Apr. 21, 2009 |
| 7510226 |
Non-contact holder device and non-contact holding and conveying device |
Mar. 31, 2009 |
| 7499767 |
Methods and apparatus for positioning a substrate relative to a support stage |
Mar. 3, 2009 |
| 7490878 |
ESD safe vacuum wand tip |
Feb. 17, 2009 |
| 7482555 |
Substrate transportation device (air) |
Jan. 27, 2009 |
| 7422411 |
Gripping mechanisms, apparatus and methods |
Sep. 9, 2008 |
| 7401828 |
Substrate conveyance device for fabrication of liquid crystal display device |
Jul. 22, 2008 |
| 7400158 |
Test fixture and method for testing a semi-finished chip package |
Jul. 15, 2008 |
| 7396199 |
Substrate processing apparatus and substrate processing method |
Jul. 8, 2008 |
| 7384083 |
O-ring locking mount |
Jun. 10, 2008 |
| 7380850 |
Holding structure for holding an object |
Jun. 3, 2008 |
| 7371287 |
Substrate handling system |
May. 13, 2008 |
| 7354335 |
CMP apparatus and load cup mechanism |
Apr. 8, 2008 |
| 7334826 |
End-effectors for handling microelectronic wafers |
Feb. 26, 2008 |
| 7335090 |
Substrate processing apparatus and substrate handling method |
Feb. 26, 2008 |
| 7326021 |
Device for loading and unloading silicon wafers in an oven from a multiple-cassette station |
Feb. 5, 2008 |
| 7300082 |
Active edge gripping and effector |
Nov. 27, 2007 |
| 7293811 |
Ultra low contact area end effector |
Nov. 13, 2007 |
| 7290813 |
Active edge grip rest pad |
Nov. 6, 2007 |
| 7270510 |
Device and method for transporting wafer-shaped articles |
Sep. 18, 2007 |
| 7250084 |
Downward mechanism for support pins |
Jul. 31, 2007 |
| 7241099 |
Center ball O-ring |
Jul. 10, 2007 |
| 7234913 |
Fast swapping station for wafer transport |
Jun. 26, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7226269 |
Substrate edge grip apparatus |
Jun. 5, 2007 |
| 7226512 |
Load lock system for supercritical fluid cleaning |
Jun. 5, 2007 |
| 7179044 |
Method of removing substrates from a storage site and a multiple substrate batch loader |
Feb. 20, 2007 |
| 7175214 |
Wafer gripping fingers to minimize distortion |
Feb. 13, 2007 |
| 7156602 |
Mechanism for exchanging chip-carrier plates for use in a hybrid chip-bonding machine |
Jan. 2, 2007 |
| 7153087 |
Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method |
Dec. 26, 2006 |
| 7151981 |
Methods and apparatus for positioning a substrate relative to a support stage |
Dec. 19, 2006 |
| 7144056 |
Detection and handling of semiconductor wafers and wafers-like objects |
Dec. 5, 2006 |
| 7140655 |
Precision soft-touch gripping mechanism for flat objects |
Nov. 28, 2006 |
| 7134827 |
Reduced footprint tool for automated processing of microelectronic substrates |
Nov. 14, 2006 |
| 7108899 |
Chip tray with tacky surface |
Sep. 19, 2006 |
| 7108470 |
Buffer device for semiconductor processing apparatus |
Sep. 19, 2006 |
| 7104579 |
Detection and handling of semiconductor wafers and wafer-like objects |
Sep. 12, 2006 |
| 7104578 |
Two level end effector |
Sep. 12, 2006 |
| 7073834 |
Multiple section end effector assembly |
Jul. 11, 2006 |
| 7064512 |
Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method |
Jun. 20, 2006 |
| 7048316 |
Compound angled pad end-effector |
May. 23, 2006 |
| 7044521 |
Chuck and suction board for plates |
May. 16, 2006 |
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