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Class Information
Number: 414/941
Name: Material or article handling > Associated with semiconductor wafer handling > Includes means for gripping wafer
Description: A collection of art which includes means having seizing, grasping, or clamping structure for engaging the wafer during a handling operation.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8701862 Disk transportation device and disk storage system Apr. 22, 2014
8702142 Apparatus and method for handling a substrate Apr. 22, 2014
8703583 Fabrication method of semiconductor device Apr. 22, 2014
8663489 Substrate replacing method and substrate processing apparatus Mar. 4, 2014
8657352 Robotic device for substrate transfer applications Feb. 25, 2014
8651796 Substrate transport apparatus with multiple independently movable articulated arms Feb. 18, 2014
8651539 Integrated gripper for workpiece transfer Feb. 18, 2014
8622451 Endeffectors for handling semiconductor wafers Jan. 7, 2014
8599531 Electrostatic end effector apparatus, systems and methods Dec. 3, 2013
8590956 Substrate handling system for aligning and orienting substrates during a transfer operation Nov. 26, 2013
8591700 Susceptor support system Nov. 26, 2013
8585112 Sample conveying mechanism Nov. 19, 2013
8562271 Compact substrate transport system Oct. 22, 2013
8556318 Electric-controlled operator Oct. 15, 2013
8545165 High speed substrate aligner apparatus Oct. 1, 2013
8529314 Method of transporting work and apparatus with work handover mechanism Sep. 10, 2013
8505991 Conveying device and vacuum apparatus Aug. 13, 2013
8500182 Vacuum wafer carriers for strengthening thin wafers Aug. 6, 2013
8491252 Transport method for disk-shaped workpieces Jul. 23, 2013
8469368 Edge rings for electrostatic chucks Jun. 25, 2013
8469346 Substrate mounting mechanism and substrate processing apparatus using same Jun. 25, 2013
8465072 Panel transferring apparatus and panel supporting mechanism thereof Jun. 18, 2013
8459928 Conveyor robot Jun. 11, 2013
8454027 Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring Jun. 4, 2013
8454068 Edge grip device and robot including the same Jun. 4, 2013
8444194 Substrate transport hand and substrate transport robot May. 21, 2013
8434992 Arm mechanism, and vacuum robot provided with the same May. 7, 2013
8430620 Dedicated hot and cold end effectors for improved throughput Apr. 30, 2013
8415770 Apparatus and methods for uniform metal plating Apr. 9, 2013
8408158 Coating/developing device and method Apr. 2, 2013
8403619 High speed substrate aligner apparatus Mar. 26, 2013
8393662 Robot hand for substrate transfer Mar. 12, 2013
8382180 Advanced FI blade for high temperature extraction Feb. 26, 2013
8376428 Integrated gripper for workpiece transfer Feb. 19, 2013
8357588 Method for machining a workpiece on a workpiece support Jan. 22, 2013
8336188 Thin wafer chuck Dec. 25, 2012
8323412 Substrate support, substrate processing device and method of placing a substrate Dec. 4, 2012
8319947 Operating valve, exposure apparatus, and device manufacturing method Nov. 27, 2012
8307543 Semiconductor chip attaching apparatus Nov. 13, 2012
8303764 Apparatus and methods for transporting and processing substrates Nov. 6, 2012
8293066 Apparatus and methods for transporting and processing substrates Oct. 23, 2012
8276959 Magnetic pad for end-effectors Oct. 2, 2012
8226142 Workpiece gripping integrity sensor Jul. 24, 2012
8221045 Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof Jul. 17, 2012
8215890 Semiconductor wafer robot alignment system and method Jul. 10, 2012
8202034 Vacuum processing apparatus and substrate transfer method Jun. 19, 2012
8182009 End effector May. 22, 2012
8177469 Magnetic disk handling apparatus May. 15, 2012
8172646 Magnetically actuated chuck for edge bevel removal May. 8, 2012
8172291 Substrate transport apparatus and substrate transport method May. 8, 2012

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