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Class Information
Number: 414/940
Name: Material or article handling > Associated with semiconductor wafer handling > Wafer cassette transporting
Description: A collection of art for bodily moving a portable rack which has distinct elements for supporting plural wafers (e.g., furnace charging, etc.).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7617924 |
Tray transportation device |
Nov. 17, 2009 |
| 7611023 |
Overhead travelling carriage |
Nov. 3, 2009 |
| 7611319 |
Methods and apparatus for identifying small lot size substrate carriers |
Nov. 3, 2009 |
| 7607881 |
Compact apparatus and method for storing and loading semiconductor wafer carriers |
Oct. 27, 2009 |
| 7597183 |
Kinematic pin with shear member and substrate carrier for use therewith |
Oct. 6, 2009 |
| 7597523 |
Variable lot size load port |
Oct. 6, 2009 |
| 7591624 |
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate |
Sep. 22, 2009 |
| 7577487 |
Methods and apparatus for a band to band transfer module |
Aug. 18, 2009 |
| 7520286 |
Apparatus and method for cleaning and drying a container for semiconductor workpieces |
Apr. 21, 2009 |
| 7491662 |
Substrate processing apparatus |
Feb. 17, 2009 |
| 7490637 |
Transportable container including an internal environment monitor |
Feb. 17, 2009 |
| 7482555 |
Substrate transportation device (air) |
Jan. 27, 2009 |
| 7476960 |
System and method for improved auto-boating |
Jan. 13, 2009 |
| 7464823 |
Overhead travelling carriage |
Dec. 16, 2008 |
| 7462011 |
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program |
Dec. 9, 2008 |
| 7445415 |
Direct tool loading |
Nov. 4, 2008 |
| 7445111 |
Transport system including vertical rollers |
Nov. 4, 2008 |
| 7441999 |
Overhead travelling carriage system |
Oct. 28, 2008 |
| 7422107 |
Kinematic coupling with textured contact surfaces |
Sep. 9, 2008 |
| 7413396 |
Article storage facility and system for the same |
Aug. 19, 2008 |
| 7410340 |
Direct tool loading |
Aug. 12, 2008 |
| 7409257 |
System and method for moving substrates in and out of a manufacturing process |
Aug. 5, 2008 |
| 7408615 |
Lithographic apparatus and device manufacturing method |
Aug. 5, 2008 |
| 7398801 |
Apparatus and method for processing wafers |
Jul. 15, 2008 |
| 7363107 |
Substrate transfer system |
Apr. 22, 2008 |
| 7349067 |
Lithographic apparatus and device manufacturing method |
Mar. 25, 2008 |
| 7329079 |
Semiconductor wafer processing machine |
Feb. 12, 2008 |
| 7328812 |
Overhead travelling carriage |
Feb. 12, 2008 |
| 7314068 |
Apparatus for replacing gas in storage container and method for replacing gas therewith |
Jan. 1, 2008 |
| 7299831 |
Substrate carrier having door latching and substrate clamping mechanisms |
Nov. 27, 2007 |
| 7281623 |
Transport system including vertical rollers |
Oct. 16, 2007 |
| 7275905 |
Method and device for controlling position of cassette in semiconductor manufacturing equipment |
Oct. 2, 2007 |
| 7261207 |
Method for carrying a semiconductor device |
Aug. 28, 2007 |
| 7261510 |
Overhead travelling carriage system |
Aug. 28, 2007 |
| 7249925 |
System and method for reticle protection and transport |
Jul. 31, 2007 |
| 7156129 |
Transportable container including an internal environment monitor |
Jan. 2, 2007 |
| 7153083 |
Material handling and transport process |
Dec. 26, 2006 |
| 7153081 |
Self-propelled carriage |
Dec. 26, 2006 |
| 7141120 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section |
Nov. 28, 2006 |
| 7139640 |
Substrate transfer system |
Nov. 21, 2006 |
| 7134825 |
Device for handling substrates inside and outside a clean room |
Nov. 14, 2006 |
| 7134826 |
Substrate transfer apparatus, substrate processing apparatus and holding table |
Nov. 14, 2006 |
| 7108899 |
Chip tray with tacky surface |
Sep. 19, 2006 |
| 7101138 |
Extractor/buffer |
Sep. 5, 2006 |
| 7099739 |
Stocker utilization self-balancing system and method |
Aug. 29, 2006 |
| 7089680 |
Vacuum processing apparatus and operating method therefor |
Aug. 15, 2006 |
| 7083338 |
Lithography equipment |
Aug. 1, 2006 |
| 7074000 |
Method and apparatus for undocking substrate pod with door status check |
Jul. 11, 2006 |
| 7073999 |
Receiving container body for object to be processed |
Jul. 11, 2006 |
| 7076326 |
Proactive staging for distributed material handling |
Jul. 11, 2006 |
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