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Class Information
Number: 414/939
Name: Material or article handling > Associated with semiconductor wafer handling > Including wafer charging or discharging means for vacuum chamber
Description: A collection of art including means for charging or discharging one or more wafers to or from areas having different pressures, one of which areas operates in a vacuum condition.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614840 |
Wafer processing apparatus having dust proof function |
Nov. 10, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7607880 |
Wafer processing apparatus having dust proof function |
Oct. 27, 2009 |
| 7591625 |
Carrying mechanism, a carrying device and a vacuum processing apparatus |
Sep. 22, 2009 |
| 7585141 |
Load lock system for ion beam processing |
Sep. 8, 2009 |
| 7585144 |
Variable lot size load port |
Sep. 8, 2009 |
| 7585383 |
Vacuum processing apparatus |
Sep. 8, 2009 |
| 7541061 |
Vacuum chamber load lock structure and article transport mechanism |
Jun. 2, 2009 |
| 7537425 |
Wafer processing apparatus having dust proof function |
May. 26, 2009 |
| 7534080 |
Vacuum processing and transfer system |
May. 19, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7521089 |
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers |
Apr. 21, 2009 |
| 7491662 |
Substrate processing apparatus |
Feb. 17, 2009 |
| 7470098 |
Detecting apparatus and detecting method |
Dec. 30, 2008 |
| 7458763 |
Mid-entry load lock for semiconductor handling system |
Dec. 2, 2008 |
| 7431585 |
Apparatus and method for heating substrates |
Oct. 7, 2008 |
| 7419346 |
Integrated system for tool front-end workpiece handling |
Sep. 2, 2008 |
| 7400158 |
Test fixture and method for testing a semi-finished chip package |
Jul. 15, 2008 |
| 7399154 |
Vacuum processing system being able to carry process object into and out of vacuum chamber |
Jul. 15, 2008 |
| 7394520 |
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
Jul. 1, 2008 |
| 7387484 |
Wafer positioning systems and methods thereof |
Jun. 17, 2008 |
| 7384228 |
Insertion device, lithographic apparatus with said insertion device and device manufacturing method |
Jun. 10, 2008 |
| 7381969 |
Load lock control |
Jun. 3, 2008 |
| 7367769 |
Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool |
May. 6, 2008 |
| 7367139 |
Vacuum processing apparatus and method operation thereof |
May. 6, 2008 |
| 7351292 |
Assembly for processing substrates |
Apr. 1, 2008 |
| 7347656 |
Vacuum processing apparatus and semiconductor manufacturing line using the same |
Mar. 25, 2008 |
| 7335277 |
Vacuum processing apparatus |
Feb. 26, 2008 |
| 7331751 |
Vacuum processing method |
Feb. 19, 2008 |
| 7329299 |
Plate-shaped work piece transporting apparatus |
Feb. 12, 2008 |
| 7314068 |
Apparatus for replacing gas in storage container and method for replacing gas therewith |
Jan. 1, 2008 |
| 7293950 |
Universal modular wafer transport system |
Nov. 13, 2007 |
| 7258520 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing |
Aug. 21, 2007 |
| 7246984 |
Method and apparatus for transferring an article to be processed and processing apparatus |
Jul. 24, 2007 |
| 7246985 |
Work-piece processing system |
Jul. 24, 2007 |
| 7247207 |
Vacuum processing apparatus |
Jul. 24, 2007 |
| 7245987 |
Cluster tool and transfer control method |
Jul. 17, 2007 |
| 7244086 |
Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates |
Jul. 17, 2007 |
| 7236229 |
Load lock chamber, processing system |
Jun. 26, 2007 |
| 7232284 |
Device for loading substrates into and unloading them from a clean room |
Jun. 19, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7226512 |
Load lock system for supercritical fluid cleaning |
Jun. 5, 2007 |
| 7217076 |
Semiconductor material handling system |
May. 15, 2007 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
May. 8, 2007 |
| 7214027 |
Wafer handler method and system |
May. 8, 2007 |
| 7207763 |
Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system |
Apr. 24, 2007 |
| 7207766 |
Load lock chamber for large area substrate processing system |
Apr. 24, 2007 |
| 7208047 |
Apparatus and method for thermally isolating a heat chamber |
Apr. 24, 2007 |
| 7201551 |
Vacuum processing apparatus and semiconductor manufacturing line using the same |
Apr. 10, 2007 |
| 7201823 |
High throughput plasma treatment system |
Apr. 10, 2007 |
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