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Class Information
Number: 414/939
Name: Material or article handling > Associated with semiconductor wafer handling > Including wafer charging or discharging means for vacuum chamber
Description: A collection of art including means for charging or discharging one or more wafers to or from areas having different pres­sures, one of which areas operates in a vacuum condition.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8672605 Semiconductor wafer handling and transport Mar. 18, 2014
8668422 Low cost high throughput processing platform Mar. 11, 2014
8663489 Substrate replacing method and substrate processing apparatus Mar. 4, 2014
8651789 Substrate processing apparatus Feb. 18, 2014
8616821 Integrated apparatus to assure wafer quality and manufacturability Dec. 31, 2013
8616820 Double dual slot load lock chamber Dec. 31, 2013
8596312 Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method Dec. 3, 2013
8573264 Reticle pod having function of gas exchange Nov. 5, 2013
8574366 Vacuum processing apparatus Nov. 5, 2013
8562275 Transfer device and semiconductor processing system Oct. 22, 2013
8562271 Compact substrate transport system Oct. 22, 2013
8562272 Substrate load and unload mechanisms for high throughput Oct. 22, 2013
8545159 Apparatus having conveyor and method of transferring substrate using the same Oct. 1, 2013
8534975 Substrate transport apparatus and method for manufacturing magnetic recording medium Sep. 17, 2013
8534976 Apparatus for providing a rotation carrier magazine, and method of operating thereof Sep. 17, 2013
8528722 Conveyor assembly and method for conveying a substrate carrier Sep. 10, 2013
8522958 Vacuum processing apparatus Sep. 3, 2013
8523507 Semiconductor manufacturing systems Sep. 3, 2013
8500388 Semiconductor wafer handling and transport Aug. 6, 2013
8485771 Load port apparatus and dust exhaust method for load port apparatus Jul. 16, 2013
8480346 Apparatus for loading and unloading semiconductor substrate platelets Jul. 9, 2013
8459922 Manipulator auto-teach and position correction system Jun. 11, 2013
8462008 System and method for introducing a substrate into a process chamber Jun. 11, 2013
8462009 System and method for introducing a substrate into a process chamber Jun. 11, 2013
8454293 Substrate loading and unloading station with buffer Jun. 4, 2013
8444364 Auto-sequencing multi-directional inline processing apparatus May. 21, 2013
8439623 Linear semiconductor processing facilities May. 14, 2013
8425172 Reticle manipulation device Apr. 23, 2013
8419341 Linear vacuum robot with Z motion and articulated arm Apr. 16, 2013
8408158 Coating/developing device and method Apr. 2, 2013
8403613 Bypass thermal adjuster for vacuum semiconductor processing Mar. 26, 2013
8398355 Linearly distributed semiconductor workpiece processing tool Mar. 19, 2013
8371792 Substrate processing apparatus Feb. 12, 2013
8366370 Vacuum processing apparatus Feb. 5, 2013
8357588 Method for machining a workpiece on a workpiece support Jan. 22, 2013
8354001 Processing thin wafers Jan. 15, 2013
8352074 Path planning apparatus and method of robot Jan. 8, 2013
8348583 Container and loader for substrate Jan. 8, 2013
8347915 Load-lock technique Jan. 8, 2013
8328494 In vacuum optical wafer heater for cryogenic processing Dec. 11, 2012
8328940 Apparatus for transferring a substrate Dec. 11, 2012
8328946 Conveyor assembly with removable rollers for a vapor deposition system Dec. 11, 2012
8317923 Protective self-aligned buffer layers for damascene interconnects Nov. 27, 2012
8313277 Semiconductor manufacturing process modules Nov. 20, 2012
8303232 Substrate processing system Nov. 6, 2012
8297319 Carrier gas system and coupling substrate carrier to a loadport Oct. 30, 2012
8292563 Nonproductive wafer buffer module for substrate processing apparatus Oct. 23, 2012
8272826 Substrate processing apparatus Sep. 25, 2012
8261905 Wafer carrier drive apparatus and method for operating the same Sep. 11, 2012
8257013 Substrate treatment apparatus Sep. 4, 2012

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