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Class Information
Number: 414/938
Name: Material or article handling > Associated with semiconductor wafer handling > Including means for charging or discharging wafer cassette > Wafers positioned vertically within cassette
Description: A collection of art wherein the wafer is placed into a rack which has its supporting elements arranged in a manner that maintains the planar surface of the wafer in a vertical attitude.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7416405 |
Vertical type of thermal processing apparatus and method of using the same |
Aug. 26, 2008 |
| 7236229 |
Load lock chamber, processing system |
Jun. 26, 2007 |
| 7226512 |
Load lock system for supercritical fluid cleaning |
Jun. 5, 2007 |
| 7134827 |
Reduced footprint tool for automated processing of microelectronic substrates |
Nov. 14, 2006 |
| 7105847 |
Semiconductor processing-purpose substrate detecting method and device, and substrate transfer system |
Sep. 12, 2006 |
| 7067018 |
Automated system for handling and processing wafers within a carrier |
Jun. 27, 2006 |
| 7008884 |
Transfer robot and inspection method for thin substrate |
Mar. 7, 2006 |
| 6960257 |
Semiconductor processing system with wafer container docking and loading station |
Nov. 1, 2005 |
| 6927181 |
Transfer robot and inspection method for thin substrate |
Aug. 9, 2005 |
| 6878955 |
Method and apparatus for accessing microelectronic workpiece containers |
Apr. 12, 2005 |
| 6854948 |
Stage with two substrate buffer station |
Feb. 15, 2005 |
| 6848876 |
Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers |
Feb. 1, 2005 |
| 6844242 |
Method of manufacturing SOI wafer |
Jan. 18, 2005 |
| 6837663 |
Loading and unloading station for semiconductor processing installations |
Jan. 4, 2005 |
| 6833035 |
Semiconductor processing system with wafer container docking and loading station |
Dec. 21, 2004 |
| 6828235 |
Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus |
Dec. 7, 2004 |
| 6821912 |
Substrate processing pallet and related substrate processing method and machine |
Nov. 23, 2004 |
| 6817821 |
Wafer handling for a reflow tool |
Nov. 16, 2004 |
| 6817823 |
Method, device and system for semiconductor wafer transfer |
Nov. 16, 2004 |
| 6814573 |
Vacuum heat-treatment apparatus |
Nov. 9, 2004 |
| 6769855 |
Substrate processing apparatus and substrate processing method |
Aug. 3, 2004 |
| 6759336 |
Methods for reducing contamination of semiconductor substrates |
Jul. 6, 2004 |
| 6690993 |
Reticle storage system |
Feb. 10, 2004 |
| 6647641 |
Device and method for the treatment of substrates in a fluid container |
Nov. 18, 2003 |
| 6634847 |
Method and an apparatus for picking up a module IC in a customer tray of a module IC handler |
Oct. 21, 2003 |
| 6612801 |
Method and device for arraying substrates and processing apparatus thereof |
Sep. 2, 2003 |
| 6609876 |
Loading and unloading station for semiconductor processing installations |
Aug. 26, 2003 |
| 6580955 |
Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
Jun. 17, 2003 |
| 6567725 |
Method and apparatus for teaching robot station location |
May. 20, 2003 |
| 6537010 |
Wafer boat support and method for twin tower wafer boat loader |
Mar. 25, 2003 |
| 6532975 |
Substrate processing apparatus and substrate processing method |
Mar. 18, 2003 |
| 6520348 |
Multiple inclined wafer holder for improved vapor transport and reflux for sealed ampoule diffusion process |
Feb. 18, 2003 |
| 6517691 |
Substrate processing system |
Feb. 11, 2003 |
| 6493961 |
Processing unit for a substrate |
Dec. 17, 2002 |
| 6457929 |
Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment |
Oct. 1, 2002 |
| 6447217 |
Substrate transfer device and operating method thereof |
Sep. 10, 2002 |
| 6449520 |
Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
Sep. 10, 2002 |
| 6439824 |
Automated semiconductor immersion processing system |
Aug. 27, 2002 |
| 6431320 |
Manual wafer lift |
Aug. 13, 2002 |
| 6423978 |
System for detecting disk-shaped object such as semiconductor wafer or magnetic disk |
Jul. 23, 2002 |
| 6393337 |
Method and apparatus for orienting substrates |
May. 21, 2002 |
| 6375403 |
Loading and unloading station for semiconductor processing installations |
Apr. 23, 2002 |
| 6354794 |
Method for automatically transferring wafers between wafer holders in a liquid environment |
Mar. 12, 2002 |
| 6352399 |
Twin tower wafer boat loading system and method |
Mar. 5, 2002 |
| 6345947 |
Substrate arranging apparatus and method |
Feb. 12, 2002 |
| 6341935 |
Wafer boat having improved wafer holding capability |
Jan. 29, 2002 |
| 6338604 |
Lid latch mechanism for clean box |
Jan. 15, 2002 |
| 6336546 |
Conveying system |
Jan. 8, 2002 |
| 6327794 |
Processing method for substrate |
Dec. 11, 2001 |
| 6319373 |
Substrate transfer apparatus of substrate processing system |
Nov. 20, 2001 |
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