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Class Information
Number: 414/937
Name: Material or article handling > Associated with semiconductor wafer handling > Including means for charging or discharging wafer cassette
Description: A collection of art including means used in charging or discharging a wafer into a portable rack having distinct supporting elements for plural wafers.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7585142 |
Substrate handling chamber with movable substrate carrier loading platform |
Sep. 8, 2009 |
| 7578647 |
Load port configurations for small lot size substrate carriers |
Aug. 25, 2009 |
| 7572092 |
Substrate alignment system |
Aug. 11, 2009 |
| 7568875 |
Vacuum interface between a mini-environment pod and a piece of equipment |
Aug. 4, 2009 |
| 7559730 |
Cassette device for accepting substrates |
Jul. 14, 2009 |
| 7520286 |
Apparatus and method for cleaning and drying a container for semiconductor workpieces |
Apr. 21, 2009 |
| 7458469 |
Substrate transfer apparatus and method, and storage medium |
Dec. 2, 2008 |
| 7431551 |
Substrate distribution system and a method using the same |
Oct. 7, 2008 |
| 7422406 |
Stacked process modules for a semiconductor handling system |
Sep. 9, 2008 |
| 7396199 |
Substrate processing apparatus and substrate processing method |
Jul. 8, 2008 |
| 7393172 |
Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device |
Jul. 1, 2008 |
| 7363107 |
Substrate transfer system |
Apr. 22, 2008 |
| 7357846 |
Substrate processing apparatus and substrate processing method |
Apr. 15, 2008 |
| 7334979 |
Adjustable substrate transfer apparatus |
Feb. 26, 2008 |
| 7335090 |
Substrate processing apparatus and substrate handling method |
Feb. 26, 2008 |
| 7279067 |
Port structure in semiconductor processing system |
Oct. 9, 2007 |
| 7278813 |
Automated processing system |
Oct. 9, 2007 |
| 7260448 |
Substrate holding device |
Aug. 21, 2007 |
| 7207766 |
Load lock chamber for large area substrate processing system |
Apr. 24, 2007 |
| 7198447 |
Semiconductor device producing apparatus and producing method of semiconductor device |
Apr. 3, 2007 |
| 7179044 |
Method of removing substrates from a storage site and a multiple substrate batch loader |
Feb. 20, 2007 |
| 7141120 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section |
Nov. 28, 2006 |
| 7139640 |
Substrate transfer system |
Nov. 21, 2006 |
| 7134825 |
Device for handling substrates inside and outside a clean room |
Nov. 14, 2006 |
| 7114908 |
Method and apparatus for stacking semiconductor wafers |
Oct. 3, 2006 |
| 7115891 |
Wafer mapping device and load port provided with same |
Oct. 3, 2006 |
| 7109509 |
Device for the detection of substrates stacked with a specific spacing |
Sep. 19, 2006 |
| RE39241 |
Modular SMIF pod breather, adsorbent, and purge cartridges |
Aug. 22, 2006 |
| 7077173 |
Wafer carrier, wafer conveying system, stocker, and method of replacing gas |
Jul. 18, 2006 |
| 7070379 |
Semiconductor fabrication apparatus having FOUP index in apparatus installation area |
Jul. 4, 2006 |
| 7066707 |
Wafer engine |
Jun. 27, 2006 |
| 7062344 |
Fabrication system and fabrication method |
Jun. 13, 2006 |
| 7044703 |
Automatic guided vehicle, automatic guided vehicle system and wafer carrying method |
May. 16, 2006 |
| 7042553 |
Apparatus for conveying substrates |
May. 9, 2006 |
| 7039501 |
Method for determining a position of a robot |
May. 2, 2006 |
| 7032739 |
Intermediate product carrying apparatus, and intermediate product carrying method |
Apr. 25, 2006 |
| 7033126 |
Method and apparatus for loading a batch of wafers into a wafer boat |
Apr. 25, 2006 |
| 7014415 |
Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate |
Mar. 21, 2006 |
| 7011483 |
Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter |
Mar. 14, 2006 |
| 7011484 |
End effector with tapered fingertips |
Mar. 14, 2006 |
| 7008884 |
Transfer robot and inspection method for thin substrate |
Mar. 7, 2006 |
| 7004708 |
Apparatus for processing wafers |
Feb. 28, 2006 |
| 6984839 |
Wafer processing apparatus capable of mapping wafers |
Jan. 10, 2006 |
| 6979168 |
Method and apparatus for transferring substrate |
Dec. 27, 2005 |
| 6975920 |
In-situ randomization and recording of wafer processing order at process tools |
Dec. 13, 2005 |
| 6942738 |
Automated semiconductor processing system |
Sep. 13, 2005 |
| 6930050 |
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing |
Aug. 16, 2005 |
| 6927181 |
Transfer robot and inspection method for thin substrate |
Aug. 9, 2005 |
| 6918730 |
Apparatus for assisting operator in performing manual operations in connection with component feeders |
Jul. 19, 2005 |
| 6914251 |
Alignment structure and method for mating a wafer delivery device to a wafer treatment tool |
Jul. 5, 2005 |
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